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    • 4. 发明专利
    • THIN FILM MAGNETIC HEAD AND ITS MANUFACTURE
    • JPS6455716A
    • 1989-03-02
    • JP21019887
    • 1987-08-26
    • HITACHI LTD
    • IMANAKA RITSUKOBAYASHI TETSUOSAITO HARUNOBUHIRAI OSAMUKAWAKAMI HIROJI
    • G11B5/31
    • PURPOSE:To improve an electromagnetic converting function by constituting a wiring with a lower side first wiring and an upper side second wiring, forming the first wiring by a conducting material and forming the second wiring so that the first wiring can be approximately covered with the same material as the first layer magnetic film of a second magnetic core. CONSTITUTION:On the whole surface of a substrate 11, a magnetic film 71 such as a 'Permalloy(R)' film, an inorganic insulating film 72 such as an alumina and a second layer magnetic film 73 such as the 'Permalloy(R)' film are accumulated. Films 71 and 73 are formed by the same material to the same thickness. Next, a part equivalent to a magnetic gap G of the film 73, the section between a second magnetic core 7 and a second wiring 70 and a part to form an input output terminal connecting part H are removed with dry etching and patterning is executed. Further, a mask material is formed at the magnetic gap G and the core 7, the section between the core 7 in the insulating film 72 and the magnetic film 71 and the wiring 70 and a part to form the input output terminal connecting part H are removed by the dry etching and the patterning is executed. For the connecting part H, films 71, 72 and 73 are removed, a first wiring 61 becomes the exposing condition, a substrate 81 such as Cu is plated for the connecting part H, and next, an input output terminal 80 such as a protecting film 9 and Au is formed.
    • 5. 发明专利
    • PRODUCTION OF THIN FILM MAGNETIC HEAD
    • JPS6366710A
    • 1988-03-25
    • JP21079186
    • 1986-09-09
    • HITACHI LTD
    • TOGAWA EISEISUZUKI SABUROSAITO HARUNOBUSUGIMOTO KENJIIMANAKA RITSU
    • G11B5/31
    • PURPOSE:To prevent the broken step of a coil and the defect of a protecting film and to obtain a reliable thin film magnetic head having a high efficiency by evading the etching in edge part where the lead terminal part of a conductor coil intersects an organic insulating film in case of forming a multilayer coil wiring and a multilayer organic insulating film. CONSTITUTION:After a lower magnetic substance 3 and a gap material 4 are formed on a substrate 1, the conductor coil 6 whose lead terminal part intersects the edges of the lower organic insulating film 5 and its lower organic insulating film 5 to be superposed, is made to pile 8 one layer or more than one layer through an intermediate organic insulating film 7 and on the top surface an upper magnetic substance 10 is formed through an upper organic insulating film 9. Especially the positions A and C of the edges where the terminal parts of the conductor coils 6 and 8 intersects the organic insulating film 5 which positions under the conductor coils 6 and 8 are covered with the organic insulating film 9 above the conductor coils so as not to be etched. Thus the broken step of the conductor coil can be prevented.
    • 6. 发明专利
    • Inspecting element of magnetic head and wafer
    • 检查磁头和波浪的元素
    • JP2000076633A
    • 2000-03-14
    • JP24519498
    • 1998-08-31
    • Hitachi Ltd株式会社日立製作所
    • KUWAZUKA SHUNICHIROTAKAGI MASAYUKIIMANAKA RITSU
    • G11B5/39G11B5/455
    • PROBLEM TO BE SOLVED: To enable grasping the write characteristic in a state of a wafer by making up of a monitoring inductive element and a magneto-resistance effect element arranged at a fore end of an inductive element so as to detect magnetic flux generated from the inductive element.
      SOLUTION: A MR sensor 3 is arranged in a gap like a reading-out element of an actual element, and the left end position is to be from a top end position C of a lower core to a starting position D of the gap depth. Write current is made to flow through a coil 8, a magnetic field is generated, and a leakage magnetic field generated between an upper core 4 and a lower shield 1 is drawn into the detecting MR sensor 3. The MR sensor 3 supplies a constant sense current through a bonding pad and a leader electrode, and a resistance value of the MR sensor changes by the leakage magnetic field from an inspecting element side and is detected as a voltage change. By detecting the intensity of the leakage magnetic field, the writing capacity of an actual element on a wafer level is grasped.
      COPYRIGHT: (C)2000,JPO
    • 要解决的问题:为了通过构成设置在电感元件的前端的监控电感元件和磁阻效应元件来获得晶片状态下的写入特性,以便检测从电感元件产生的磁通量 电感元件。 解决方案:MR传感器3设置在与实际元件的读出元件类似的间隙中,并且左端位置将从下芯的顶端位置C到间隙深度的起始位置D. 使写入电流流过线圈8,产生磁场,并且在上芯4和下屏蔽1之间产生的泄漏磁场被吸入检测MR传感器3中.MR传感器3提供恒定的感测 电流通过接合焊盘和引导电极,并且MR传感器的电阻值由检测元件侧的泄漏磁场变化,并被检测为电压变化。 通过检测泄漏磁场的强度,掌握实际元件在晶片级上的写入能力。
    • 8. 发明专利
    • MAGNETO-RESISTANCE EFFECT TYPE HEAD ELEMENT ASSEMBLY AND ITS PRODUCTION
    • JP2000048326A
    • 2000-02-18
    • JP21684498
    • 1998-07-31
    • HITACHI LTD
    • IMANAKA RITSUSHIRAKI KIYONORISAITO HARUNOBUAKIMOTO HAJIMESASAKI SHINOBUTAI YOSHIHARU
    • G11B5/39
    • PROBLEM TO BE SOLVED: To prevent insulation breakdown at the time of manufacturing a magneto- resistance effect type magnetic head element by allowing an assembly to have a first conductor in which respective magnetic shields of plural reproducing elements, respective magnetic poles of plural recording elements or respective magnetic shields of plural reproducing elements and respective magnetic poles of plural recording elements are electrically connected and a second conductor in which respective electrodes of plural reproducing elements are electrically connected to the first conductor. SOLUTION: A lower magnetic shield 3 and an upper magnetic shield 9 are electrically connected each other through the contact hole 33 of a lower gap film and an upper gap film and the upper magnetic shield 9 and an upper magnetic pole 13 are electrically connected each other through the contact hole 34 of a gap film for recording 10. In the electrode 6 of a reproducing element, a second conductor 52 in which one part of the electrode is extended is formed and the second conductor 52 is electrically connected to a first conductor 51. Since the first and second conductors are formed with the lower shield layer 3 being the lowermost layer of the constitution of a magneto-resistance effect type head element and an electrode layer, electrostatic breakdown to be generated between the layers is prevented.
    • 9. 发明专利
    • MAGNETORESISTIVE MAGNETIC HEAD
    • JPH0944820A
    • 1997-02-14
    • JP19720895
    • 1995-08-02
    • HITACHI LTD
    • TANABE HIDEOKARAKAMA YOSHIAKIIMANAKA RITSUOTSU TAKAYOSHI
    • G11B5/39G11B5/10
    • PROBLEM TO BE SOLVED: To obtain a magnetoresistive magnetic head with which the destruction of a magnetoresistive element part by the static voltage suddenly impressed between the electrodes of the magnetoresistive magnetic head is prevented and which is optimum for high-density magnetic recording and reproducing, is highly reliable and has a good yield at the time of production. SOLUTION: A pair of magnetic shielding layers 3, 10, the magnetoresistive effect element part 6 and a pair of electrodes 9, 9' for passing sense current to this magnetoresistive element part and detecting the voltage change by signals are arranged on a substrate and a capacitor is constituted by disposing a dielectric substance 13' between one of a pair of there electrodes 9, 9' and one of a pair of the magnetic shielding layers 3, 10. A resistor of a resistance value larger than the resistance value of the magnetoresistive effect element part may be disposed in place of the magnetoresistive magnetic head capacitor formed to have a capacity from 5pF to 100μF.