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    • 3. 发明专利
    • DIFFERENTIAL PRESSURE SENSOR
    • JPH0735635A
    • 1995-02-07
    • JP19889193
    • 1993-07-17
    • HITACHI CONSTRUCTION MACHINERYNAGANO KEIKI SEISAKUSHO KK
    • SATO FUJIOICHIYANAGI TAKESHITAMURA MORIOTANAKA KIYOSHIHONMA TOSHIO
    • G01L13/02G01L9/00G01L13/06
    • PURPOSE:To reduce the influence of a film part for differential pressure detection even if silicon oil and the like are expanded and hold high responsibility and detection performance in a differential pressure sensor filled with the silicon oil and the like in the circumferential space of the film part for the pressure difference detection. CONSTITUTION:Constitution is performed in that a film part for differential pressure detection 2 is formed on one face of a both-faces pressure receiving type diaphragm 1, pressure introduction holes 5, 6 for introducing pressure for two spaces formed on both sides of the diaphragm 1 respectively are provided, the space of the side forming the film part for the differential pressure detection is filled with protection liquid 13 and the pressure B is indirectly applied to the diaphragm 1 through the protection liquid. In addition, constitution is performed in that a cylindrical resilient sealing member 12 isolating the space and the pressure introduction hole 6 for introducing the pressure therein therebetween is disposed and the space of the side forming the film part for the differential pressure detection in the inside of the resilient sealing member 12 is filled with the protection liquid 13. The ends 12a, 12b forming both-ends opening parts of the resilient sealing member respectively are formed of a thick plate and have a function as a seal ring.