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    • 3. 发明专利
    • Surface treatment method for conductive base material for mounting tape carrier-fitted semiconductor, conductive base material for mounting tape carrier-fitted semiconductor obtained by using the treatment method, and semiconductor package
    • 用于安装带状载体半导体的导电基材的表面处理方法,用于使用处理方法获得的用于安装带状载体的半导体的导电基材和半导体封装
    • JP2013023766A
    • 2013-02-04
    • JP2011163092
    • 2011-07-26
    • Hitachi Chemical Co Ltd日立化成工業株式会社
    • INOUE FUMIOYAMASHITA TOMOAKIHIROYAMA YUKIHISASAKAYORI KAZUHIKO
    • C23F1/18H01L23/12H01L23/28H01L23/50
    • H01L2224/32245H01L2224/48091H01L2224/48247H01L2224/73265H01L2224/92247H01L2924/00014H01L2924/00
    • PROBLEM TO BE SOLVED: To provide: a surface treatment method for a conductive base material for mounting a tape carrier-fitted semiconductor which can improve reliability and adhesive properties with a sealing material; a conductive base material for mounting a tape carrier-fitted semiconductor obtained by using the treatment method; and a semiconductor package obtained by using them.SOLUTION: The surface treatment method for a conductive base material for mounting a tape carrier-fitted semiconductor includes a first roughening step of bringing a conductive base material for mounting a tape carrier-fitted semiconductor into contact with a first chemical roughening liquid including a corrosion inhibitor to form a roughened shape on the surface of the conductive base material for mounting a semiconductor. The surface treatment method for a conductive base material for mounting a tape carrier-fitted semiconductor further includes a second roughening step of bringing the same into contact with a second chemical roughening liquid including a corrosion inhibitor after the first roughening step. The conductive base material for mounting a tape carrier-fitted semiconductor is obtained by using the surface treatment. The semiconductor package is obtained by using them.
    • 要解决的问题:提供一种用于安装带状载体配合半导体的导电性基材的表面处理方法,其能够利用密封材料提高可靠性和粘合性; 用于安装通过使用所述处理方法获得的带状载体配合半导体的导电基材; 以及通过使用它们获得的半导体封装。 解决方案:用于安装带状载体安装半导体的导电基材的表面处理方法包括:第一粗糙化步骤,将用于安装载带配合半导体的导电性基材与第一化学粗糙化液接触,所述第一化学粗糙化液包括 在用于安装半导体的导电性基材的表面上形成粗糙化形状的腐蚀抑制剂。 用于安装带状载体半导体的导电基材的表面处理方法还包括在第一粗糙化步骤之后使其与含有腐蚀抑制剂的第二化学粗糙化液接触的第二粗糙化步骤。 通过使用表面处理获得用于安装带状载体配合半导体的导电性基材。 通过使用半导体封装。 版权所有(C)2013,JPO&INPIT