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1. 发明专利

JPH1114846A SINGLE-MODE OPTICAL WAVEGUIDE AND ITS MANUFACTURE, AND OPTICAL MODULE USING THE SAME 失效
公开(公告)号：JPH1114846A
公开(公告)日：1999-01-22
申请号：JP16621497
申请日：1997-06-23
申请人： HITACHI CABLE , NIPPON TELEGRAPH & TELEPHONE , HITACHI LTD
发明人： MORIWAKI KAZUYUKI , HIBINO YOSHINORI , YAMADA YASUBUMI , OKAWA MASAHIRO , UETSUKA NAOTO , OKANO HIROAKI , TERAOKA TATSUO , NISHIO TOMOYUKI , IWATO TAISUKE , KANETANI TATSUNORI , KUROIWA TSUTOMU
IPC分类号： G02B6/42 , G02B6/122 , G02B6/13
摘要： PROBLEM TO BE SOLVED: To provide the single-mode optical waveguide which has high position precision as to a positioning index, a thin groove for filter insertion, etc., and small-sized constitution and can prevent a clad mode from leaking to a reflection port, and its manufacture and the optical module using it. SOLUTION: A bench 25 for mounting a light emitting element 22 and a light receiving element 19 is formed on a substrate 11, a buffer layer 27 is formed except at benches 25 and 46 on the substrate 11, and a height adjustment layer 28 for optical axis alignment with both the elements 22 and 19 is formed on the buffer layer 27; and a waveguide core 12 is formed on the height adjustment layer 28, the alignment index for both the elements 19 and 22 is formed on the bench 25, and a clad layer 13 is formed on the substrate 11 where the index is formed. Then a deep groove for exposing the benches 25, 42a, and 46 is formed on the clad layer 13, and electrodes 39 to 41 for supplying a current to the light emitting element 22 and leading a current out of the photodetecting element 19 are formed on the bench 25 to obtain the single-mode optical waveguide.

2. 发明专利

JPH0634925A OPTICAL WAVEGUIDE CIRCUIT DEVICE 失效
公开(公告)号：JPH0634925A
公开(公告)日：1994-02-10
申请号：JP19207992
申请日：1992-07-20
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： MORIWAKI KAZUYUKI , INOUE YASUYUKI , KAWACHI MASAO
IPC分类号： G02F1/01 , G02B6/12 , G02F1/313
摘要： PURPOSE:To provide long-term reliability and to enable the simple adjustment of a resistance value to be conducted by specifying the material of a thin-film heater as a phase shifter which is disposed on the clad layer of an optical waveguide and finely adjusts the optical path length of an optical waveguide. CONSTITUTION:This optical waveguide circuit device has a substrate 1, a core part 2 which is provided on this substrate, the clad layer 3 which covers this core part 2 and the thin-film heater 4 which is disposed on the clad layer 3 of this optical waveguide and finely adjusts the optical path length of a part of the optical waveguide. A Ta2N film is used as the thin-film heater 4 serving as the phase shifter. This thin-film heater is preferably coated with a protective film 6 which is at least one layer among SiO2 films, Si3N4 and Ta2O5 films. Further, the resistance value of this thin-film heater 4 is preferably regulated to a desired value by heating by means of an electric oven, etc., or by energization to the thin-film heater itself after the film formation. As a result, the long-term stability of the resistance value of the thin-film heater is obtd. and the service life thereof is prolonged.

3. 发明专利

JPS60173885A SUPERCONDUCTIVE MATERIAL OF OXIDE AND MANUFACTURE THEREOF 失效
公开(公告)号：JPS60173885A
公开(公告)日：1985-09-07
申请号：JP2942584
申请日：1984-02-18
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： SUZUKI MINORU , MURAKAMI TOSHIAKI , MORIWAKI KAZUYUKI
IPC分类号： H01B12/00 , C01G1/00 , C01G29/00 , C04B35/00 , C04B35/45 , H01B12/06 , H01B13/00 , H01L39/12 , H01L39/24
摘要： PURPOSE:To obtain a high critical temperature by using a composite oxide composed of barium, bismuth, and oxygen and expressed by a specific chemical formula. CONSTITUTION:After uniform mixing of a Ba compound with a Bi compound or a Ba compound with an A compound [where, A is Sr, Pb, Sc, Y, or a lanthanum group element; the atomic ratio of Ba to A: A/(Ba+A) is 0.5 or less] and a Bi compound, the powder obtained by calcination at a temperature of 600 deg.C or more is molded by pressing in an oxidizing atmosphere, and next a large amount of oxygen defect produced at the step of calcination is repaired by firing at 700 deg.C or more under a pressure of 10kg/cm or more of oxygen or 10kg/cm or more of partial pressure of oxygen, thereby forming BaBiO3-delta (0

4. 发明专利

JPH10246828A METHOD FOR TRIMMING OPTICAL PATH LENGTH IN WAVEGUIDE TYPE OPTICAL CIRCUIT AND DEVICE THEREFOR 失效
公开(公告)号：JPH10246828A
公开(公告)日：1998-09-14
申请号：JP5007197
申请日：1997-03-05
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： GO TAKASHI , MORIWAKI KAZUYUKI , ABE ATSUSHI , INOUE YASUYUKI
IPC分类号： G02B6/13
摘要： PROBLEM TO BE SOLVED: To exactly match the optical path length of a waveguide to a desired value by measuring the trimming quantity actually shifted every time each trimming treatment ends and progressing the trimming little by little while taking the error of the trimming quantity known by this measurement into consideration. SOLUTION: This device has a silicon substrate 1, a core part 2 consisting of quartz glass embedded into a clad layer 3, the clad layer 3 consisting of the quartz glass and thin-film heaters 14, 15 formed on the surface of the clad layer 3 in the upper part of the core part 2. The trimming is executed by impressing electric power on the thin-film heater (transfer shifter for trimming) 15. In such a case, the trimming quantity actually shifted is measured every time trimming treatment ends by taking the error of trimming quanty into consideration and the trimming is progressed little by little while taking the error of the trimming quantity know by this measurement into consideration. Then, the optical path length of the waveguide may be exactly matched with the desired value without overtrimming.

5. 发明专利

JPH1048449A PRODUCTION OF PACKAGE BOARD FOR HYBRID PHOTOELECTRONIC INTEGRATED CIRCUIT 失效
公开(公告)号：JPH1048449A
公开(公告)日：1998-02-20
申请号：JP20186296
申请日：1996-07-31
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： YANAGISAWA MASAHIRO , MORIWAKI KAZUYUKI , YAMADA YASUBUMI
IPC分类号： G02B6/122 , G02B6/13
摘要： PROBLEM TO BE SOLVED: To obtain a package board which can be easily and economically produced and has good electric characteristics by patterning an electric wiring part when a core layer is patterned and forming a dielectric layer comprising a part of an optical waveguide on the substrate where the electric wiring part is formed. SOLUTION: A lower clad layer 6d and a core layer 7c are successively deposited on a flat substrate (Si substrate) 1c. The core layer 7c is patterned by reactive ion etching method RIE method) using a fluorine-based gas. During this process, the core pattern is formed not only in a region where light is to be guided but in an electric wiring part. By forming an optical waveguide by RIE to expose the Si substrate 1a where optical elements are to be mounted. During this process, the core pattern around the electric wiring part is transferred to automatically form a lower clad layer 6a having the same thickness as the core layer 7c. Then in the final process, an insulating film 9b, conductive layer 12a and soldering layer 13a are formed to complete the production of a package board.

6. 发明专利

JPH08327841A PACKAGING SUBSTRATE FOR HYBRID OPTICAL INTEGRATION AND ITS PRODUCTION 失效
公开(公告)号：JPH08327841A
公开(公告)日：1996-12-13
申请号：JP13022495
申请日：1995-05-29
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： YANAGISAWA MASAHIRO , YAMADA YASUBUMI , MORIWAKI KAZUYUKI , YASU MITSUHO , HIBINO YOSHINORI , SUZUKI SENTA
IPC分类号： G02B6/42 , B81B1/00 , B81C1/00 , G02B6/122 , G02B6/13
摘要： PURPOSE: To provide a packaging substrate for hybrid optical integration capable of suppressing stress concentration to the substrate and a process for producing this packaging substrate for optical integration capable of producing the packaging substrate for hybrid optical integration having high performance without using a polishing stage and with a simple stage. CONSTITUTION: This packaging substrate for hybrid optical integration is composed of a flat substrate 1 having projecting parts 4 to mount optical elements 3 in a part, a clad disposed on this substrate 1 and an optical waveguide 2 consisting of a core 7 which is enclosed by this clad and has the refractive index higher than the refractive index of the clad. This packaging substrate for hybrid optical integration is constituted by forming the optical waveguide 2 on the flat part of the substrate 1.

7. 发明专利

JPH0727940A PRODUCTION OF LAMINATED QUARTZ OPTICAL WAVEGUIDE 失效
公开(公告)号：JPH0727940A
公开(公告)日：1995-01-31
申请号：JP17129293
申请日：1993-07-12
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： OMORI YASUJI , MORIWAKI KAZUYUKI , HIDA YASUHIRO , ONOSE KATSUHIDE
IPC分类号： G02B6/13
摘要： PURPOSE:To provide a process for production of the laminated quartz optical waveguide which is used in a field of waveguide optical circuit parts, has high reproducibility and is cost effective. CONSTITUTION:The laminated quartz optical waveguide is obtd. by a stage for forming quartz glass as a lower clad layer 2 on a substrate 1, a stage for depositing a first core layer having the refractive index higher than the refractive index of lower clad glass in the part worked to be a recessed shape of the lower clad layer 2 and forming a first core waveguide 31 having a light propagation effect in the recessed part, a stage for forming an intermediate clad layer 4 and core waveguides 51 of a projecting shape on the upper part of the core waveguide 31 of the first layer and a stage for forming the quartz glass having the refractive index lower than the refractive index of the core glass as an upper clad layer 6.

8. 发明专利

JPH0446084A METHOD AND DEVICE FOR SURFACE-TREATING OXIDE SUPERCONDUCTING THIN FILM 失效
公开(公告)号：JPH0446084A
公开(公告)日：1992-02-17
申请号：JP15188690
申请日：1990-06-11
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： ASANO HIDEFUMI , MICHIGAMI OSAMU , MORIWAKI KAZUYUKI
IPC分类号： C04B41/90 , C01G1/00 , C01G3/00 , C01G29/00 , H01B12/06 , H01B13/00 , H01L39/24
摘要： PURPOSE:To remove the deteriorated layer on the surface of an oxide superconducting thin film without damaging the surface by irradiating a substrate covered with the oxide superconducting thin film with an ion beam in a vacuum. CONSTITUTION:A substrate 2 covered with an oxide superconducting thin film 9 is held by a holding and cooling mechanism 1 set in a vacuum vessel 8, and the vessel 8 is evacuated to Torr through an evacuating system 7. The surface of the thin film 9 is irradiated with the inert gas ion beam having 10-200eV energy and ion beam with a halogen element as the constituent element respectively from ion sources 3 and 4 to remove the deteriorated layer on the surface, a metal layer is then continuously deposited from a metal depositing mechanism 5, and then an insulating layer is formed by an insulating layer depositing mechanism 6.

9. 发明专利

JPH03241781A GRAIN BOUNDARY JOSEPHSON JUNCTION 失效
公开(公告)号：JPH03241781A
公开(公告)日：1991-10-28
申请号：JP3804290
申请日：1990-02-19
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： ENOMOTO YOICHI , TANABE KEIICHI , MORIWAKI KAZUYUKI
IPC分类号： H01L39/22
摘要： PURPOSE:To enable operability and economy to be improved by setting a poten tial barrier layer which is formed on a crystal grain boundary to a tunnel barrier. CONSTITUTION:A grain boundary Josephson junction is produced by a polycrystal thin film with Ba1-XMXBiO3 (M:K, Rb, 0.22

10. 发明专利

JPH0366253B2 失效
公开(公告)号：JPH0366253B2
公开(公告)日：1991-10-16
申请号：JP2942584
申请日：1984-02-18
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： SUZUKI MINORU , MURAKAMI TOSHIAKI , MORIWAKI KAZUYUKI
IPC分类号： H01B12/00 , C01G1/00 , C01G29/00 , C04B35/00 , C04B35/45 , H01B12/06 , H01B13/00 , H01L39/12 , H01L39/24

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