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    • 1. 发明专利
    • Compound semiconductor epitaxial growth device
    • 化合物半导体外延生长装置
    • JP2011129822A
    • 2011-06-30
    • JP2009289252
    • 2009-12-21
    • Hitachi Cable Ltd日立電線株式会社
    • FUTAKUCHI NAOKITSUCHIYA TADAITSU
    • H01L21/205C23C16/30
    • PROBLEM TO BE SOLVED: To provide a compound semiconductor epitaxial growth device having a structure capable of suppressing deterioration of an epitaxial thin film by re-evaporation of decomposition extraneous matter by suppressing adhesion of foreign matter onto a substrate by allowing the structure to prevent generation of the decomposition extraneous matter in a reactor, and reducing the number of times of maintenance for removing the decomposition extraneous matter in the reactor.
      SOLUTION: In this compound semiconductor epitaxial growth device 10 for supplying a raw material containing a group V element into a reactor 11 with a substrate 13 stored therein to subject the raw material to vapor-phase epitaxial growth on the substrate 13, the raw material containing the group V element is decomposed, and a hydrogen radical supply means 36 for running gas excessively containing a hydrogen radical is connected to the upstream side of an adhesion part 17 to which the decomposed deposits adhere in the reactor 11.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 解决的问题:提供一种化合物半导体外延生长装置,其具有能够通过抑制外来物质附着在基板上而使外部薄膜的附着物再次蒸发来抑制外延薄膜的劣化的结构, 防止在反应器中产生分解的外来物质,并且减少用于除去反应器中分解的外来物质的维护次数。 解决方案:在这种化合物半导体外延生长装置10中,用于将含有V族元素的原料供入反应器11中,其中存储有基材13,以使原料在基板13上进行气相外延生长, 含有V族元素的原料分解,并且用于使过量含有氢自由基的气体运行的氢根供给装置36连接到分解的沉积物附着在反应器11中的粘附部17的上游侧。 版权所有(C)2011,JPO&INPIT
    • 4. 发明专利
    • FIELD-EFFECT TRANSISTOR
    • JPH03205834A
    • 1991-09-09
    • JP86790
    • 1990-01-05
    • HITACHI CABLE
    • SAKAGUCHI HARUNORITSUCHIYA TADAITSU
    • H01L21/20H01L21/338H01L29/778H01L29/812
    • PURPOSE:To improve the electric characteristics and crystallinity of an InxGa1-xAs channel layer by sandwiching the channel layer between a carrier block layer on the substrate side and a carrier supplier layer on the other side, wherein the indium content (x) in the channel layer is increased gradually from the substrate side toward the other side. CONSTITUTION:An InxGa1-xAs channel layer 9 is sandwiched between mixed crystal layers having a larger energy band gap than the channel layer. The mixed crystal layer on the substrate side is a carrier block layer 7, and the other mixed crystal layer is a carrier supplier layer 5. The indium content (x) in the channel layer 9 at the interface with the carrier block layer 7 is determined so that the lattice constant of InGaAs may be closest to the lattice constant of the layer 7. The indium content (x) at the interface with the carrier supplier layer 5 is determined so that the energy band gaps of the channel layer and the supplier layer 5 may become maximum. The proportion (x) in the channel layer 9 is varied continuously between the interface with the carrier supplier layer and the interface with the carrier block layer.
    • 7. 发明专利
    • Actuator element
    • 执行元件
    • JP2003339174A
    • 2003-11-28
    • JP2002147540
    • 2002-05-22
    • Hitachi Cable Ltd日立電線株式会社
    • TSUCHIYA TADAITSU
    • H02N2/00
    • PROBLEM TO BE SOLVED: To provide an actuator element which has large displacement and displacing stress and proper stress resistance. SOLUTION: The actuator element 10 comprises an ion exchange resin molding 11; and metal electrodes 14a, 14b provided in an insulating state from each other on the surface of the molding 11. Thus, a potential difference is applied between the electrodes 14a and 14b, to generate a bend or a deformation. The molding 11 is formed of an anion exchange resin, and the molding 11 is impregnated with water 13 containing HSiO 3 - , HCO 3 - , HCO 2 - or CH 3 COO - as anion 12. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供具有大的位移和位移应力和适当的应力阻力的致动器元件。 解决方案:致动器元件10包括离子交换树脂模制件11; 以及在模制品11的表面上彼此隔离的金属电极14a,14b。因此,在电极14a和14b之间施加电位差,产生弯曲或变形。 模制件11由阴离子交换树脂形成,并且模制件11浸渍含有含有HSiO 3 SBB的水13,SP 3,SP 3,SP 3 > - ,HCO 2 - 或CH 3 COO - 版权所有(C)2004,JPO