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1. 发明专利

JP2012089883A Driver laser for extreme ultraviolet light source device 有权
标题翻译：极光紫外线光源设备的驱动激光器
公开(公告)号：JP2012089883A
公开(公告)日：2012-05-10
申请号：JP2012010576
申请日：2012-01-23
申请人： Gigaphoton Inc , Komatsu Ltd , ギガフォトン株式会社 , 株式会社小松製作所
发明人： ARIGA TATSUYA , HOSHINO HIDEYUKI , MIURA TAISUKE , ENDO AKIRA
IPC分类号： H01S3/23 , H01S3/00 , H01S3/104
摘要： PROBLEM TO BE SOLVED: To provide a driver laser for an extreme ultraviolet light source device that suppresses self-oscillation light and amplifies laser light efficiently.SOLUTION: A driver laser includes: an oscillator that produces laser light by oscillation and outputs the laser light; and at least one amplifier that amplifies the laser light output from the oscillator. The amplifier includes a discharge section and an optical system. The discharge section has a first window through which the laser light is to be input, and a second window through which the laser light is to be output. By using energy of a medium excited by discharge, the discharge section amplifies the laser light input through the first window, and outputs the amplified laser light through the second window. The optical system outputs the laser light output from the oscillator, to the first window of the discharge section. Next, the optical system outputs the laser light output through the second window of the discharge section, again to the first window. Then, the optical system outputs the laser light output through the second window of the discharge section, in a predetermined direction.
摘要翻译：解决的问题：为了提供抑制自振荡光并有效放大激光的极紫外光源装置的驱动激光器。解决方案：驱动激光器包括：通过振荡产生激光并输出激光的振荡器; 以及放大从振荡器输出的激光的至少一个放大器。放大器包括放电部分和光学系统。放电部具有要输入激光的第一窗口和要输出激光的第二窗口。通过使用通过放电激发的介质的能量，放电部放大通过第一窗口输入的激光，并通过第二窗口输出放大的激光。光学系统将从振荡器输出的激光输出到放电部分的第一窗口。接下来，光学系统将通过放电部的第二窗口的激光输出再次输出到第一窗口。然后，光学系统沿预定方向输出通过排出部分的第二窗口输出的激光。版权所有（C）2012，JPO＆INPIT

2. 发明专利

JP2010004053A Two-stage laser device for exposure 有权
标题翻译：用于曝光的两级激光装置
公开(公告)号：JP2010004053A
公开(公告)日：2010-01-07
申请号：JP2009172995
申请日：2009-07-24
申请人： Gigaphoton Inc , Komatsu Ltd , ギガフォトン株式会社 , 株式会社小松製作所
发明人： WAKABAYASHI OSAMU , ARIGA TATSUYA , KUMAZAKI TAKAHITO , SASANO KOTARO
IPC分类号： H01S3/08 , G03F7/20 , H01S3/23
CPC分类号： H01S3/2308 , G03F7/70025 , H01S3/083
摘要： PROBLEM TO BE SOLVED: To provide a two-stage laser device suitable for a semiconductor exposure device, having a low spatial coherence, while taking advantages such as high stability, high output efficiency, and a narrow line width of the MOPO method. SOLUTION: A two-stage laser device for exposure includes an oscillation-stage laser 50 and an amplification-stage laser 60 that receives laser light oscillated by the oscillation-stage laser so as to output the laser light while amplifying it. Both of the oscillation-stage laser and the amplification-stage laser respectively have a chamber filled with laser gas. Oscillation laser light having divergence is used as the oscillation-stage laser 50. The amplification-stage laser 60 comprises a Fabry-Perot etalon resonator composed of an input-side mirror 1 and an output-side mirror 2. The resonator is configured as a stable resonator. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供适用于具有低空间相干性的半导体曝光装置的两级激光装置，同时具有MOPO方法的高稳定性，高输出效率和窄线宽等优点。解决方案：用于曝光的两级激光装置包括振荡级激光器50和放大级激光器60，其接收由振荡级激光器振荡的激光，以便在放大激光的同时输出激光。振荡级激光器和放大级激光器分别具有填充有激光气体的腔室。具有发散的振荡激光用作振荡级激光器50.放大级激光器60包括由输入侧反射镜1和输出侧反射镜2组成的法布里 - 珀罗标准具共振器。谐振器被配置为稳定谐振器。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2012049564A Driver laser for extreme ultraviolet light source device and lpp type extreme ultraviolet light source device 有权
标题翻译：极光紫外线光源装置的驱动激光器和LPP型超极紫外光源装置
公开(公告)号：JP2012049564A
公开(公告)日：2012-03-08
申请号：JP2011253149
申请日：2011-11-18
申请人： Gigaphoton Inc , Komatsu Ltd , ギガフォトン株式会社 , 株式会社小松製作所
发明人： ENDO AKIRA , ARIGA TATSUYA , SUGANUMA TAKASHI , MIURA TAISUKE
IPC分类号： H01S3/106 , H01S3/104 , H01S3/23
摘要： PROBLEM TO BE SOLVED: To provide a driver laser for an EUV light source device which can simultaneously achieve a short pulse and a multi-line oscillation.SOLUTION: A driver laser comprises: (i) a laser device to output a short pulse laser light; a laser oscillator having an optical parametric oscillation device for broadening the band of the short pulse laser light output from the laser device by optical parametric oscillation; (ii) at least one COlaser amplifier to input the laser light output from the laser oscillation device and to amplify the laser light by a comb-shaped gain spectrum to output the laser light; and a spectrum matching device to match to the gain spectrum of at least one amplifier the laser light having the band broadened by the optical parametric oscillation device owing to the laser oscillation device converting the laser light into a light pulse having a comb-shaped spectrum by using the COlaser reproduction amplifier.
摘要翻译：要解决的问题：为EUV光源装置提供驱动激光器，其可以同时实现短脉冲和多线振荡。驱动激光器包括：（i）输出短脉冲激光的激光装置; 激光振荡器，具有光学参量振荡器件，用于通过光学参数振荡来加宽从激光器件输出的短脉冲激光的频带; （ii）至少一个CO 2 激光放大器，以输入从激光振荡装置输出的激光，并通过梳状增益谱放大激光以输出激光光; 以及光谱匹配装置，以与由至少一个放大器的增益谱相匹配，由于激光振荡装置将具有梳状光谱的光脉冲转换成具有梳状光谱的光脉冲，因此具有由光参量振荡装置加宽的频带的激光使用CO 2 激光再现放大器。版权所有（C）2012，JPO＆INPIT

4. 发明专利

JP2010004052A Two-stage laser device for exposure 审中-公开
标题翻译：用于曝光的两级激光装置
公开(公告)号：JP2010004052A
公开(公告)日：2010-01-07
申请号：JP2009172993
申请日：2009-07-24
申请人： Gigaphoton Inc , Komatsu Ltd , ギガフォトン株式会社 , 株式会社小松製作所
发明人： WAKABAYASHI OSAMU , ARIGA TATSUYA , KUMAZAKI TAKAHITO , SASANO KOTARO
IPC分类号： H01S3/086 , G03F7/20 , H01S3/23
CPC分类号： H01S3/2308 , G03F7/70025 , H01S3/083
摘要： PROBLEM TO BE SOLVED: To provide a two-stage laser device suitable for a semiconductor exposure device, having a low spatial coherence, while taking advantages such as high stability, high output efficiency, and a narrow line width of the MOPO method. SOLUTION: A two-stage laser device for exposure includes an oscillation-stage laser 50 and an amplification-stage laser 60. Oscillation laser light having divergence is used as the oscillation-stage laser. The amplification-stage laser comprises a Fabry-Perot etalon resonator composed of an input-side mirror 1 and an output-side mirror 2. The resonator is configured as a stable resonator. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供适用于具有低空间相干性的半导体曝光装置的两级激光装置，同时具有MOPO方法的高稳定性，高输出效率和窄线宽等优点。解决方案：用于曝光的两级激光器件包括振荡级激光器50和放大级激光器60.使用具有发散度的振荡激光作为振荡级激光器。放大级激光器包括由输入侧反射镜1和输出侧反射镜2组成的法布里 - 珀罗标准具共振器。谐振器被配置为稳定谐振器。版权所有（C）2010，JPO＆INPIT

5. 发明专利

JP2009026854A Driver laser for extreme ultraviolet light source 有权
标题翻译：极光紫外线光源的驱动激光器
公开(公告)号：JP2009026854A
公开(公告)日：2009-02-05
申请号：JP2007186798
申请日：2007-07-18
申请人： Gigaphoton Inc , Komatsu Ltd , ギガフォトン株式会社 , 株式会社小松製作所
发明人： ARIGA TATSUYA , ENDO AKIRA
IPC分类号： H01S3/081 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a compact laser driver which can efficiently amplify laser beam and is superior in the convergence of the amplified laser beam.
SOLUTION: The driver laser includes a laser oscillator which oscillates to generate laser beam, and at least one slab type laser amplifier which inputs the laser beam generated by the laser oscillator, and amplifies and outputs the laser beam, and the at least one slab type laser amplifier includes a chamber which has a first window and a second window and is filled with gas containing carbon dioxide (CO2), a pair of electrodes which are disposed in the chamber and excites the gas in a discharge formed by application of a high frequency voltage to amplify the laser beam, and an optical system which is disposed in the chamber and has a plurality of mirrors propagating the laser beam made incident from the first window in the discharge area through repetitive reflection and projecting the laser beam from the second window.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供可以有效地放大激光束并且放大的激光束的会聚性优异的小型激光驱动器。解决方案：驱动器激光器包括振荡以产生激光束的激光振荡器，以及输入激光振荡器产生的激光束的至少一个板式激光放大器，并放大并输出激光束，并且至少一种板式激光放大器包括具有第一窗口和第二窗口的室，并且填充有包含二氧化碳（CO 2）的气体，一对电极，其设置在室中，并且通过施加高频电压以放大激光束;以及光学系统，其设置在腔室中，并且具有多个反射镜，其通过反复反射传播从放电区域中的第一窗口入射的激光束，并将激光束从第二个窗口。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2008283107A Extreme ultraviolet light source device 有权
标题翻译：极致超紫外光源设备
公开(公告)号：JP2008283107A
公开(公告)日：2008-11-20
申请号：JP2007127777
申请日：2007-05-14
申请人： Gigaphoton Inc , Komatsu Ltd , ギガフォトン株式会社 , 株式会社小松製作所
发明人： UENO YOSHIFUMI , MORIYA MASATO , SMAN GEORG , ARIGA TATSUYA , ASAYAMA TAKESHI
IPC分类号： H01L21/027 , H05G2/00
摘要： PROBLEM TO BE SOLVED: To provide an extreme ultraviolet light source device capable of preventing a breakdown of a driver laser caused by reflected light (returned light) reflected by a target material or plasma and returning to the driver laser.
SOLUTION: The extreme ultraviolet light source device comprises a target supplying part for supplying a target in a chamber; the driver laser for emitting a laser beam; a laser collection optical system for generating plasma by collecting the laser beam to the target; an EUV light collection optical system for collecting and emitting an extreme ultraviolet light emitted from the plasma; a spatial filter for decreasing the quantity of returned light when the collected laser beam reflected by the target or the plasma comes into the drive laser; a returned light detector for detecting the returned light passing through the spatial filter; a position control mechanism for controlling the position of an optical element included in the laser collection optical system; and a control part for controlling the position control mechanism on the basis of the quantity of returned light detected by the returned light detector.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够防止由靶材料或等离子体反射并返回到驱动激光器的反射光（返回光）引起的驱动激光的击穿的极光紫外光源装置。解决方案：极紫外光源装置包括用于在室中供应靶的目标供应部分; 用于发射激光束的驱动器激光器; 激光采集光学系统，用于通过将激光束收集到目标点来产生等离子体; 用于收集和发射从等离子体发射的极紫外光的EUV光收集光学系统; 用于当被靶或反射的等离子体收集的激光束进入驱动激光器时减少返回光量的空间滤波器; 用于检测通过空间滤波器的返回光的返回光检测器; 位置控制机构，用于控制包括在激光采集光学系统中的光学元件的位置; 以及控制部，其基于由返回的光检测器检测到的返回光的量来控制位置控制机构。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2006135298A Driver laser for extreme ultraviolet light source apparatus and lpp-type extreme ultraviolet light source apparatus 有权
标题翻译：极光紫外线光源装置和LPP型极光超紫外光源装置的驱动激光
公开(公告)号：JP2006135298A
公开(公告)日：2006-05-25
申请号：JP2005230619
申请日：2005-08-09
申请人： Gigaphoton Inc , Komatsu Ltd , ギガフォトン株式会社 , 株式会社小松製作所
发明人： ENDO AKIRA , ARIGA TATSUYA , SUGANUMA TAKASHI , MIURA TAISUKE
IPC分类号： H01S3/10 , H01L21/027 , H01S3/227 , H05G2/00
CPC分类号： H01S3/2308 , B82Y10/00 , G03F7/70033 , H01S3/0057 , H01S3/08004 , H01S3/08009 , H01S3/1075 , H01S3/108 , H01S3/1083 , H01S3/1103 , H01S3/2232 , H01S3/23 , H01S3/235
摘要： PROBLEM TO BE SOLVED: To realize a driver laser for EUV light source apparatus which simultaneously achieves pulse shortening and multiline oscillation. SOLUTION: A driver laser comprises a short-pulse multiline oscillation CO 2 laser oscillator having a means for shortening pulses of a laser beam to be output, and a means for suppressing oscillation of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier which inputs the laser beam with shortened pulses that is output by the short-pulse multiline oscillation CO 2 laser oscillator, and amplifies and outputs the input laser beam. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：实现同时实现脉冲缩短和多线振荡的EUV光源装置的驱动激光器。解决方案：驱动器激光器包括具有用于缩短要输出的激光束的脉冲的装置的短脉冲多行振荡CO 2 激光振荡器，以及用于抑制振荡频谱的振荡的装置表现出能量峰值; 以及至少一个放大器，其输入具有由短脉冲多行振荡CO 2 激光振荡器输出的缩短脉冲的激光束，并放大并输出输入的激光束。版权所有（C）2006，JPO＆NCIPI

8. 发明专利

JP2003332661A Two-stage laser system 有权
标题翻译：两级激光系统
公开(公告)号：JP2003332661A
公开(公告)日：2003-11-21
申请号：JP2002142728
申请日：2002-05-17
申请人： Gigaphoton Inc , Komatsu Ltd , Ushio Inc , ウシオ電機株式会社 , ギガフォトン株式会社 , 株式会社小松製作所
发明人： ARIGA TATSUYA , SEKI TADAHIRA , WAKABAYASHI OSAMU
IPC分类号： H01S3/131 , H01S3/036 , H01S3/08 , H01S3/134 , H01S3/225 , H01S3/23
CPC分类号： H01S3/10092 , H01S3/036 , H01S3/08004 , H01S3/08009 , H01S3/08059 , H01S3/134 , H01S3/225 , H01S3/2258 , H01S3/2316
摘要： PROBLEM TO BE SOLVED: To provide a two-stage laser system by which a required spectrum line width can be obtained at an required high output level even when the integration spectrum characteristic of an oscillation step laser is not a required spectrum line width. SOLUTION: The two-stage laser system comprises an oscillation step laser device 10 that is provided with a discharging electrode 2 in a chamber wherein a laser gas containing F 2 is filled and that emits a narrow-band laser beam by a narrow-band module 3 arranged in a laser resonator, and an amplification step laser device 20 that is provided with the discharging electrode 2 in the chamber wherein the laser gas containing F 2 is filled and that amplifies a laser pulse injected from the oscillation step laser device 10. In the laser system, a synchronization period having a specified spectrum line width exists in the laser pulse from the oscillation step laser device 10, and the amplification step laser device 20 is set so that discharging occurs within the synchronization period. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种两级激光系统，即使在振荡台阶激光器的积分光谱特性不是所需的光谱线宽度时，也可以以所需的高输出电平获得所需的光谱线宽度。解决方案：两级激光系统包括在腔室中设置有放电电极2的振荡台阶激光装置10，其中填充有F 2 的激光气体，并且发射窄通过布置在激光谐振器中的窄带模块3的带状激光束和在室中设置有放电电极2的放大步骤激光装置20，其中含有F 2 的激光气体是并且放大从振荡步进激光装置10注入的激光脉冲。在激光系统中，来自振荡台阶激光装置10的激光脉冲中存在具有指定的光谱线宽度的同步周期，放大步骤激光装置20 被设定为在同步期间内发生放电。版权所有（C）2004，JPO

9. 发明专利

JP2012164666A Laser amplifier of driver laser for extreme ultraviolet light source 审中-公开
标题翻译：激光激光器，用于极光紫外线光源
公开(公告)号：JP2012164666A
公开(公告)日：2012-08-30
申请号：JP2012075423
申请日：2012-03-29
申请人： Gigaphoton Inc , Komatsu Ltd , ギガフォトン株式会社 , 株式会社小松製作所
发明人： ARIGA TATSUYA , ENDO AKIRA
IPC分类号： H05G2/00 , H01L21/027 , H01S3/00 , H01S3/23
摘要： PROBLEM TO BE SOLVED: To provide a driver laser that is small, that can perform amplification of laser light with efficiency, and that has an excellent light condensing property of the amplified laser light.SOLUTION: The driver laser has: a laser oscillator generating laser light by oscillation; and at least one slab type laser amplifier inputting the laser light generated by the laser oscillator and amplifying and outputting the laser light. The at least one slab type laser amplifier has: a chamber having first and second windows and filled with a gas containing carbon dioxide gas (CO); a pair of electrodes arranged in the chamber and exciting the gas in a discharge region formed by application of a high-frequency voltage to amplify the laser light; and an optical system arranged in the chamber and having a plurality of mirrors that makes the laser light incoming through the first window propagate in the discharge region by multiple reflections and outgo through the second window.
摘要翻译：要解决的问题：提供一种小型的驱动器激光器，其能够高效地进行激光的放大，并且具有优异的放大的激光的聚光特性。
解决方案：驱动激光器有：激光振荡器通过振荡产生激光; 以及输入由激光振荡器产生的激光并放大并输出激光的至少一个平板型激光放大器。所述至少一个板式激光放大器具有：具有第一窗口和第二窗口并且填充有含有二氧化碳气体的气体的室（CO 2 ）; 一对电极，布置在腔室中，并且通过施加高频电压形成的放电区域中的气体激发以放大激光; 以及布置在所述腔室中并且具有多个反射镜的光学系统，所述多个反射镜使得通过所述第一窗口进入的激光通过多次反射在所述放电区域中传播并且通过所述第二窗口流出。版权所有（C）2012，JPO＆INPIT

10. 发明专利

JP2009283966A Two-stage laser system for aligner 审中-公开
标题翻译：对准器的两级激光系统
公开(公告)号：JP2009283966A
公开(公告)日：2009-12-03
申请号：JP2009172994
申请日：2009-07-24
申请人： Gigaphoton Inc , Komatsu Ltd , ギガフォトン株式会社 , 株式会社小松製作所
发明人： WAKABAYASHI OSAMU , ARIGA TATSUYA , KUMAZAKI TAKAHITO , SASANO KOTARO
IPC分类号： H01S3/105 , G03F7/20 , H01S3/08 , H01S3/23
CPC分类号： H01S3/2308 , G03F7/70025 , H01S3/083
摘要： PROBLEM TO BE SOLVED: To provide a two-stage laser system well fit for semiconductor aligners, which is reduced in terms of spatial coherence while taking advantage of the high stability, high output efficiency and fine line width of the MOPO mode. SOLUTION: The two-stage laser system for aligners includes an oscillation-stage laser 50 and an amplification-stage laser 60. Oscillation laser light having divergence is used as the oscillation-stage laser 50, and the amplification-stage laser 60 includes a Fabry-Perot etalon resonator made up of an input side mirror 1 and an output side mirror 2. The resonator is configured as a stable resonator. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种适用于半导体对准器的两级激光系统，其在利用MOPO模式的高稳定性，高输出效率和细线宽度的同时，在空间相干性方面减少。解决方案：用于对准器的两级激光系统包括振荡级激光器50和放大级激光器60.使用具有发散度的振荡激光作为振荡级激光器50，并且放大级激光器60 包括由输入侧反射镜1和输出侧反射镜2构成的法布里 - 珀罗标准具共振器。谐振器被配置为稳定的谐振器。版权所有（C）2010，JPO＆INPIT

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