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1. 发明专利

JP2012103068A Mems measurement method 有权
标题翻译： MEMS测量方法
公开(公告)号：JP2012103068A
公开(公告)日：2012-05-31
申请号：JP2010250871
申请日：2010-11-09
申请人： Fukuoka Pref Gov Sangyo Kagaku Gijutsu Shinko Zaidan , Fukuoka Univ , Optical Comb Inc , Yuji Kikaku Ltd , ユージ企画有限会社 , 学校法人福岡大学 , 株式会社光コム , 財団法人福岡県産業・科学技術振興財団
发明人： TOMOKAGE HAJIME , YOSHIDA KEISUKE , SUEYOSHI HARUKI , IMAI KAZUHIRO , YASUKOCHI YUJI
IPC分类号： G01H9/00 , B81C99/00
摘要： PROBLEM TO BE SOLVED: To provide a MEMS measurement method for similarly measuring oscillation states at a predetermined point of time at many measuring points of MEMS by simultaneously irradiating many parts of the oscillated MEMS with a laser beam and for exactly grasping the oscillation states of respective parts of the MEMS by excluding an influence of an excitation part side to the MEMS.SOLUTION: Only an oscillation component of a movable part 81 is taken out from a result of synthesis of unnecessary oscillation components of an excitation part, correct oscillation characteristics of the movable part 81 are acquired, and features of oscillation to appear based on the structure of a MEMS 80 are certainly grasped by simultaneously irradiating the movable part 81 and a fixed part 82 of the MEMS 80 under oscillation with many laser beams with mutually different frequencies, detecting reflected beams from the respective irradiation positions of the MEMS 80 by an optical detection part as interference beams, calculating oscillation states of the MEMS 80 at the respective irradiation positions from information which can be taken out from a detection signal, and further calculating a difference of an oscillation state at the movable part 81 to an oscillation state of the fixed part.
摘要翻译：要解决的问题：为了提供MEMS测量方法，用于通过用激光束同时照射振荡的MEMS的许多部分并且精确地掌握振荡来在MEMS的许多测量点处类似地测量在预定时间点的振荡状态通过排除激励部分侧对MEMS的影响，MEMS的各部分的状态。解决方案：从合成激励部分的不必要的振荡分量的结果中，仅可以取出可动部81的振动分量，获得可动部81的正确的振动特性，基于通过同时以相互不同的频率的许多激光束同时照射MEMS 80的可动部分81和固定部分82来确定MEMS 80的结构，该激光束具有来自MEMS 80的各个照射位置的反射光束，光检测部分作为干涉光束，从可从检测信号中取出的信息计算各个照射位置处的MEMS 80的振荡状态，并且还计算可动部81的振荡状态的差与振动状态固定部分。版权所有（C）2012，JPO＆INPIT

2. 发明专利

JP2011059011A Mems measuring device 有权
标题翻译： MEMS测量装置
公开(公告)号：JP2011059011A
公开(公告)日：2011-03-24
申请号：JP2009210754
申请日：2009-09-11
申请人： Fukuoka Pref Gov Sangyo Kagaku Gijutsu Shinko Zaidan , Fukuoka Univ , Optical Comb Inc , Yuji Kikaku Ltd , ユージ企画有限会社 , 学校法人福岡大学 , 株式会社光コム , 財団法人福岡県産業・科学技術振興財団
发明人： TOMOKAGE HAJIME , YOSHIDA KEISUKE , SUEYOSHI HARUKI , IMAI KAZUHIRO , YASUKOCHI YUJI
IPC分类号： G01H9/00
摘要： PROBLEM TO BE SOLVED: To provide an MEMS measuring device that measures vibration conditions in the same way at the specified timing at a number of MEMS measuring points and surely find out features of a vibration in each part of the MEMS by applying laser beams to a number of points of the vibrated MEMS at the same time.
SOLUTION: A number of laser beams with different frequencies are applied to a number of points of vibrating MEMS 80 at the same time, and reflection beams from each of irradiated points of the MEMS 80 are detected as an interference beam by an optical detection unit 50. Information picked up from the obtained detection signal is used to find out vibration conditions at each of applied positions of the MEMS 80, and therefore vibration conditions can be detected at the plurality of points of the MEMS at the same timing. A variance of vibration at each unit of the MEMS 80 at the specified timing is measured, and features of vibration that appears depending on the structure of the MEMS 80 can surely be understood.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种MEMS测量装置，其在多个MEMS测量点的指定时刻以相同的方式测量振动条件，并且通过应用激光器确定地找出MEMS各部分中的振动的特征光束同时振动的MEMS的多个点。解决方案：将许多具有不同频率的激光束同时施加到多个振动MEMS 80的点，并且来自MEMS 80的每个照射点的反射光束通过光学器件被检测为干涉光束从所获得的检测信号中拾取的信息用于在MEMS 80的每个施加位置找出振动条件，因此可以在相同的定时在MEMS的多个点处检测振动条件。测量在指定时刻的MEMS 80的每个单元处的振动的变化，并且可以肯定地理解根据MEMS 80的结构出现的振动特征。版权所有（C）2011，JPO＆INPIT

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