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1. 发明专利

JP2012255506A Check valve 有权
标题翻译：检查阀
公开(公告)号：JP2012255506A
公开(公告)日：2012-12-27
申请号：JP2011129720
申请日：2011-06-10
申请人： Fujikin Inc , 株式会社フジキン
发明人： IKEDA JUNYA , KOGAI MUTSUNORI , MAKINO MEGUMI , INADA TOSHIYUKI
IPC分类号： F16K15/02
CPC分类号： F16K15/026 , F16K15/025 , F16K17/0466 , F16K25/005 , Y10T137/7924
摘要： PROBLEM TO BE SOLVED: To provide a check valve which can be used even under high temperature conditions by improving heat resistance and solving the problem of "a stopper sticking to a sealing member" associated with a high temperature use.SOLUTION: As a stopper 5 biased by a biasing member 7 makes contact with a sealing member 4, an opening of a fluid channel 2a disposed on a first body 2 is brought into the blocked state. The sealing member 4 is post-cured perfluoro elastomer packing. A ring-shaped sealing part 6 which comes into line contact with the sealing member 4 is formed on the stopper 5.
摘要翻译：要解决的问题：提供一种即使在高温条件下也可以通过改善耐热性并解决与高温用途相关联的“与密封部件粘合的塞子”的问题的止回阀。解决方案：当偏置构件7偏置的止动件5与密封构件4接触时，设置在第一主体2上的流体通道2a的开口处于闭塞状态。密封构件4是后固化全氟弹性体填料。在止动器5上形成与密封构件4成直线接触的环状密封部6.权利要求（C）2013，JPO＆INPIT

2. 发明专利

JP2013177948A Fluid control device 有权
标题翻译：流体控制装置
公开(公告)号：JP2013177948A
公开(公告)日：2013-09-09
申请号：JP2012043124
申请日：2012-02-29
申请人： Fujikin Inc , 株式会社フジキン
发明人： YOKO TAKASHI , YOMO IZURU , KOGAI MUTSUNORI , MAKINO MEGUMI , MATSUDA TAKAHIRO
IPC分类号： F17D1/04 , F16K27/00 , F16L41/02
CPC分类号： F16K27/003 , C23C16/45561 , H01L21/67017 , Y10T137/4259 , Y10T137/87885
摘要： PROBLEM TO BE SOLVED: To provide a purge line change block joint for supplying a different purge gas between lines without considerably altering a fluid control device, and to provide a fluid control device with such a purge line change block joint.SOLUTION: In at least one Q among a plurality of lines, a purge line change block joint 5 is connected to an upper side of a three-way valve passage part. The purge line change block joint 5 includes: a process gas inlet passage 5a communicating to a process gas inlet passage 7a of the three-way valve passage part; an outlet passage 5b allowing the process gas inlet passage 5a to communicate with an outlet passage 8a of the three-way valve passage part; a passage closing part 5c which does not communicate with a purge gas inlet passage 9a of the three-way valve passage part to close the passage; and a novel purge gas inlet passage 5d which communicates with the outlet passage 5b and is opened on a top face.
摘要翻译：要解决的问题：提供一种用于在管线之间提供不同吹扫气体的吹扫管线更换块接头，而不会明显地改变流体控制装置，并且提供具有这种吹扫管线更换块接头的流体控制装置。解决方案：至少多条管线中的一个Q，清扫线切换块接头5连接到三通阀通道部分的上侧。吹扫线切换块接头5包括：与三通阀通路部分的处理气体入口通道7a连通的处理气体入口通道5a; 允许处理气体入口通道5a与三通阀通道部分的出口通道8a连通的出口通道5b; 通道闭合部5c，其不与三通阀通路部的吹扫气体入口通路9a连通，以封闭通路; 以及与出口通路5b连通并在顶面开口的新的吹扫气体入口通路5d。

3. 发明专利

JP2004169810A Fluid controller 有权
公开(公告)号：JP2004169810A
公开(公告)日：2004-06-17
申请号：JP2002336130
申请日：2002-11-20
申请人： Fujikin Inc , 株式会社フジキン
发明人： MAKINO MEGUMI , KOGAI MUTSUNORI , TAKI HARUNOBU , YAMAJI MICHIO
IPC分类号： F16K31/44 , F16K31/524 , F16K31/60
摘要： PROBLEM TO BE SOLVED: To provide a fluid controller of simple configuration for reducing an installation space when the plurality of fluid controllers are installed. SOLUTION: A lever guide member 14 having a through hole 20 capable of movably accommodating a lower end portion of a lever 13 is disposed on an upper surface of a lever receiver 10. The through hole 20 in the lever guide member 14 has a first stopper surface 21 to stop the lever 13 oscillated in the flow passage closing direction in a first inclined state and a stopper surface 22 provided facing the first stopper surface 21 to the lever 13 oscillated in the flow passage opening direction in a second inclined state. The distance between a lever reception-abutting surface 13a of the lever 13 stopped in the second inclined state and the axis of a horizontal shaft 12 is set to be larger than the distance between an abutting surface 13b on a lever receiver 13 of the lever 13 stopped in a first inclined state and the axis of the horizontal shaft 12. COPYRIGHT: (C)2004,JPO

4. 发明专利

JP2013036584A Fluid control device 有权
标题翻译：流体控制装置
公开(公告)号：JP2013036584A
公开(公告)日：2013-02-21
申请号：JP2011175042
申请日：2011-08-10
申请人： Fujikin Inc , 株式会社フジキン
发明人： KURISHIRO HARUHIKO , MATSUDA TAKAHIRO , KOGAI MUTSUNORI , MAKINO MEGUMI
IPC分类号： F16K27/00
CPC分类号： F16K27/003 , Y10T137/87249
摘要： PROBLEM TO BE SOLVED: To provide a fluid control device capable of preventing impurities caused by reaction products from infiltrating into a chamber.SOLUTION: The fluid control device includes two opening and closing valves 2, 3 disposed symmetrical to each other and having an identical shape. Fluid discharge passages 6, 7, 11, 12 having an equal length are provided in parallel with each other are provided in the outlets of the opening and closing valves 2, 3. A connection member 10 attachable to a chamber and having fluid passages 25, 26 formed in an equal length and communicating with each of the fluid discharge passages 6, 7, 11, 12, is mounted in the outlets of two fluid discharge passages 6, 7, 11, 12.
摘要翻译：解决的问题：提供一种流体控制装置，其能够防止由反应产物引起的杂质渗透到室中。解决方案：流体控制装置包括彼此对称并具有相同形状的两个开闭阀2,3。设置在开关阀2,3的出口中的具有相同长度的流体排放通道6,7,11,12彼此平行地设置。连接构件10可连接到腔室并具有流体通道25， 26形成为相同的长度并与每个流体排出通道6,7,11,12连通，安装在两个流体排放通道6,7,11,12的出口中。（C）2013 ，JPO＆INPIT

5. 发明专利

JP2009068664A Fluid controlling device 审中-公开
标题翻译：流体控制装置
公开(公告)号：JP2009068664A
公开(公告)日：2009-04-02
申请号：JP2007240472
申请日：2007-09-18
申请人： Fujikin Inc , 株式会社フジキン
发明人： KOGAI MUTSUNORI , MAKINO MEGUMI , INADA TOSHIYUKI
IPC分类号： F16K31/44 , F16K31/524 , F16K31/60 , F16K35/00 , F16K35/02
摘要： PROBLEM TO BE SOLVED: To provide a fluid controlling device having an improved misoperation preventing function and further, having advantages of reducing installation space when the plurality of fluid controlling devices are installed.
SOLUTION: The fluid controlling device 1 can close a flow passage in a valve main body as a lever 13 protruded above a casing 3 is brought into a first inclined state and can open the flow passage as the lever 13 is brought into a second inclined state. A misoperation preventing fixture 41 comprises a cylindrical part 43 fixed detachably on the top end part of the casing 3, and a pair of raised parts 44, 45 facing via a moving region of the lever 13 provided on the top face of the cylindrical part 43, and can be used in combination with a cylindrical misoperation preventing cover 42 detachably covered on the outer peripheral surface of the raised parts 44, 45.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有改进的误操作防止功能的流体控制装置，并且还具有当安装多个流体控制装置时减小安装空间的优点。解决方案：当控制杆13突出在壳体3上方的杆13处于第一倾斜状态时，流体控制装置1可以关闭阀主体中的流动通道，并且当杆13被引入时可以打开流动通道第二倾斜状态。防误动装置41包括可拆卸地固定在壳体3的顶端部上的圆筒部43，以及设置在圆筒部43的上面的杠杆13的移动区域的一对凸起部44,45 并且可以与可拆卸地覆盖在凸起部分44,45的外周表面上的圆柱形误操作防护罩42组合使用。（C）2009年，JPO和INPIT

6. 发明专利

JP2009068665A Fluid controlling device 审中-公开
标题翻译：流体控制装置
公开(公告)号：JP2009068665A
公开(公告)日：2009-04-02
申请号：JP2007240473
申请日：2007-09-18
申请人： Fujikin Inc , 株式会社フジキン
发明人： KOGAI MUTSUNORI , MAKINO MEGUMI , INADA TOSHIYUKI
IPC分类号： F16K35/00 , F16K31/44 , F16K31/524 , F16K35/02
摘要： PROBLEM TO BE SOLVED: To provide a fluid controlling device having an improved misoperation preventing function and further, having more advantages of reducing the installation space when setting a plurality of fluid controlling devices.
SOLUTION: The fluid controlling device 1 can close a flow passage in a valve main body as a lever 13 protruded above a casing 3 is brought into a first inclined state and open the flow passage as the lever 13 is brought into a second inclined state. A misoperation preventing fixture 51 comprises a cylindrical part 52 detachably fixed to the upper end part of the casing 3, a raised part 53 provided on the top face of the cylindrical part 52, and a top part 54 provided on the upper end part of the raised part 53 to cover the lever 13.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有改进的误操作防止功能的流体控制装置，并且还具有在设置多个流体控制装置时具有减少安装空间的更多优点。解决方案：当控制杆13突出在壳体3上方的杆13处于第一倾斜状态时，流体控制装置1可以关闭阀主体中的流动通道，并且当杆13进入第二状态时打开流动通道倾斜状态防误操作固定件51包括可拆卸地固定在壳体3的上端部的圆筒部52，设置在圆筒部52的上表面的凸部53，以及设置在筒状部52的上端部的顶部54。凸起部分53覆盖杠杆13.版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2007198788A Pressure sensor unit and fluid control apparatus with built-in pressure sensor 有权
标题翻译：压力传感器和流体控制装置与内置压力传感器
公开(公告)号：JP2007198788A
公开(公告)日：2007-08-09
申请号：JP2006015021
申请日：2006-01-24
申请人： Fujikin Inc , Tem-Tech Kenkyusho:Kk , 株式会社テムテック研究所 , 株式会社フジキン
发明人： YOMO IZURU , MAKINO MEGUMI , KOGAI MUTSUNORI , TSUKADA MASAMORI , AIZAWA JIYUUBEE
IPC分类号： G01L19/00 , F16L41/03 , G05D16/20
CPC分类号： F16L41/008 , G01L19/0007
摘要： PROBLEM TO BE SOLVED: To provide a pressure sensor unit, capable of achieving further compactness and enabling an integrated fluid control device in which a pressure sensor is replaced separately and easily, and to provide a fluid control apparatus with a built-in pressure sensor. SOLUTION: The pressure sensor unit 21 comprises a first passage block 22 formed in a prescribed passage 22a is formed; a second passage block 23, in which a prescribed passage 23a is formed and which is opposed to the first passage block 22 at a prescribed interval; and a pressure sensor 24 provided for an opposing surface of either the first passage block 22 or the second passage block 23 for detecting the fluid pressure of an internal passage 23b. The pressure sensor unit 21 is integrated with a pressure regulator 16. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种压力传感器单元，能够实现进一步的紧凑性并且能够分别容易地更换压力传感器的集成流体控制装置，并且提供具有内置的流体控制装置压力传感器。解决方案：压力传感器单元21包括形成在规定通道22a中的第一通道块22; 第二通道块23，其中形成有规定通道23a并且以规定间隔与第一通道块22相对; 以及为第一通道块22或第二通道块23的相对表面设置的用于检测内部通道23b的流体压力的压力传感器24。压力传感器单元21与压力调节器16集成。版权所有（C）2007，JPO＆INPIT

8. 发明专利

JP2004183743A Fluid control device 有权
公开(公告)号：JP2004183743A
公开(公告)日：2004-07-02
申请号：JP2002349850
申请日：2002-12-02
申请人： Fujikin Inc , 株式会社フジキン
发明人： MOCHIZUKI SEITETSU , MAKINO MEGUMI , KOGAI MUTSUNORI
IPC分类号： F16K11/22 , F16K27/00
CPC分类号： F16K27/003
摘要： PROBLEM TO BE SOLVED: To provide a fluid control device improved in its repairing performance and stably and instantaneously switching the kind of gas without accompanying the variation of pressure.
SOLUTION: A main body 2 is composed of a central passage block 11 and side passage blocks 12, 13. Each of switching valves 5, 6 is detachably mounted over the central passage block and one of the side passage blocks. Y-shaped passages 22 composed of one common passage 22a and two branch passages 22b, 22c are formed by the number same as the number of sub-gas inlets 23. An opening of the common passage 22a of the Y-shaped passage 22 is applied as the sub-gas inlet 23, and the branch passages 22b, 22c of the Y-shaped passage 22 are respectively communicated to inlet ports of the switch valves 5, 6 to form the sub-gas flowing-in passage. A main gas passage 18 and a main passage-side communication passage 19 are formed on one of the side passage block 12, and a vent gas passage 20 and a vent passage side communication passage 21 are formed on the other side passage block 13.
COPYRIGHT: (C)2004,JPO&NCIPI

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