专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JP2012221958A Distortion-free astigmatism correction of tem 有权
标题翻译： TEM的无畸变校正
公开(公告)号：JP2012221958A
公开(公告)日：2012-11-12
申请号：JP2012088781
申请日：2012-04-09
申请人： Fei Co , エフイーアイカンパニFei Company
发明人： MAARTEN BISCHOFF , ALEXANDER HENSTRA , UWE LUKON , PETER CHRISTIAAN TIEMEIJIER
IPC分类号： H01J37/153
CPC分类号： H01J37/26 , H01J37/153 , H01J2237/1532
摘要： PROBLEM TO BE SOLVED: To correct astigmatism and also LD in two planes, without drift caused by different excitation of two astigmatism correctors.SOLUTION: A charged particle beam device includes, along an optical axis, a charged particle source 202, a convergent optical system 208, an objective lens 214, an imaging optical system 216, and a detection systems 218 and 224. In the device, between the objective lens 214 and the detector systems 218 and 224, a first astigmatism corrector 250 is provided for reducing astigmatism when imaging a sample 210, and a second astigmatism corrector 252 is provided for reducing astigmatism when a diffraction plane is imaged. In the apparatus, a third astigmatism corrector 254 is provided between the objective lens 214 and the detector systems 218 and 224, so that a third degree of freedom is created for reducing linear distortion. The device relates to a method of using the first astigmatism corrector 250, the second astigmatism corrector 252, and the third astigmatism corrector 254.
摘要翻译：要解决的问题：在两个平面上纠正散光和LD，没有两个散光校正器的不同激发引起的漂移。解决方案：带电粒子束装置沿光轴包括带电粒子源202，会聚光学系统208，物镜214，成像光学系统216和检测系统218和224.在器件，在物镜214和检测器系统218和224之间，提供第一像散校正器250，用于在对样品210进行成像时减少散光，并且提供第二像散校正器252用于当成像衍射平面时减少散光。在该装置中，第三像散校正器254设置在物镜214和检测器系统218和224之间，使得产生第三自由度以减少线性失真。该装置涉及使用第一散光校正器250，第二散光校正器252和第三散光校正器254的方法。版权所有（C）2013，JPO和INPIT

2. 发明专利

JP2013089599A Adjustment method of stem including aberration corrector 有权
标题翻译：干涉校正方法包括异常校正
公开(公告)号：JP2013089599A
公开(公告)日：2013-05-13
申请号：JP2012229984
申请日：2012-10-17
申请人： Fei Co , エフイーアイカンパニFei Company
发明人： MAARTEN BISCHOFF , BURND REHEL
IPC分类号： H01J37/153
CPC分类号： H01J37/22 , G01N23/20 , H01J37/153 , H01J37/20 , H01J37/265 , H01J37/28 , H01J2237/1532 , H01J2237/1534 , H01J2237/216 , H01J2237/221 , H01J2237/2802
摘要： PROBLEM TO BE SOLVED: To provide a method of always adjusting the STEM, preferable automatically, to a level sufficient for setting to obtain an HR image.SOLUTION: The method of adjusting the Cs corrector of STEM by using crystal samples comprises steps for recording a series by a through focus method, for converting an image thus obtained to the Fourier space, and for forming a set of images such as diffraction images. Symmetry can be improved by determining the symmetry of a Fourier image and tuning the corrector. The transmission limit can be determined by determining the maximum distance of a spot from the center. The corrector can be tuned to the optimum performance by carrying out these steps repeatedly.
摘要翻译：要解决的问题：提供一种始终将STEM调整的方法，优选地自动地调整到足以设置以获得HR图像的水平。解决方案：通过使用晶体样品调整STEM的Cs校正器的方法包括通过聚焦方法记录一系列的步骤，用于将所获得的图像转换成傅立叶空间，并形成一组图像，例如衍射图像。可以通过确定傅里叶图像的对称性并调整校正器来改善对称性。可以通过确定点与中心的最大距离来确定传输限制。可以通过重复执行这些步骤来调整校正器的最佳性能。版权所有（C）2013，JPO＆INPIT

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式