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    • 4. 发明专利
    • JPH05304229A
    • 1993-11-16
    • JP910293
    • 1993-01-22
    • FURUKAWA ELECTRIC CO LTD
    • MURATA HIDEAKIOHASHI YASUKAZUOZAKI MASANORI
    • H01L23/32H01R33/76
    • PURPOSE:To stabilize contact resistance over a long term by forming a conductive film, in which transition of Sn or Pb to be applied on an IC lead is retarded, on the end face of a terminal. CONSTITUTION:IC socket terminal 3 made of beryllium copper has a terminal end face 3a contacting with an IC wherein the terminal end face 3a is applied with a conductive film composed of one or more of Ru, Rh, Pt, Ir, Re, W, Mo, Cr, Ta, Nb, V, Al or alloys thereof or nitride, carbide, silicide, or aluminium compound of transition metal. The film is deposited by 50nm-20mum through normal film deposition technology, e.g. thermal CVD method or plasma method. The film is conductive in any case and also hard except in case of Al. The film has such properties as diffusion is suppressed with respect to Cu, Sn, or Pb, wettability is low, and transition of Sn or Pb is retarded. When such conductive film is employed in the terminal of IC socket, oxide film is not formed on the end face and initial conditions are sustained for a long term resulting in a prolonged service life.