专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JPS63228611A SEMICONDUCTOR JIG AND MANUFACTURE THEREOF 失效
公开(公告)号：JPS63228611A
公开(公告)日：1988-09-22
申请号：JP6318187
申请日：1987-03-17
申请人： FUJITSU LTD , IBIDEN CO LTD
发明人： KOBAYASHI MASANORI , OGAWA TSUTOMU , WADA KUNIHIKO , FURUKAWA MASAKAZU , YOKOYAMA TAKAO
IPC分类号： C30B31/14 , C30B35/00 , H01L21/22
摘要： PURPOSE:To decrease the yield of dust due to friction and abrasion, by controlling the surface roughness of a silicon carbide material. CONSTITUTION:This semiconductor jig is a process pipe, a handle having a size and a configuration, which can be inserted into said process pipe, a jig for inputting and taking out said handle or a semiconductor mounting jig. The jig is constituted with a silicon carbide material having a part, whose surface roughness is Rmax

2. 发明专利

JPS6414914A JIG FOR MANUFACTURE OF SEMICONDUCTOR 失效
公开(公告)号：JPS6414914A
公开(公告)日：1989-01-19
申请号：JP17079187
申请日：1987-07-08
申请人： FUJITSU LTD , IBIDEN CO LTD
发明人： KOBAYASHI MASANORI , OGAWA TSUTOMU , WADA KUNIHIKO , YOKOYAMA TAKAO
IPC分类号： H01L21/673 , C04B41/88 , C30B35/00 , H01L21/22 , H01L21/68
摘要： PURPOSE:To provide excellent thermal conductivity and to improve thermal unlformity and responsiveness by forming a coating layer made of silicon on a silicon carblde surface and effectively ntilizing the property of silicon. CONSTITUTION:A silicon carbide member 11 for forming a jig 10 for manufacture of semiconductor is composed of a composlte material made of silicon carbide and silicon in such a manner that the member 11 mainly contains the silicon carbide. when it has 3-dimensional matrix structure, a 3-dimenslonal matrix-like skeleton is formed of silicon carbide crystal having loym or less of mean grain size in such a manner that the mean grain size of the crystal is preferably 5mum or less and 30wt.% or more a beta-type crystal silicon carbide is preferably contained. A coating layer to be formed on the member 11 is composed of silicon, and its thickness is preferably 1-100mum.

3. 发明专利

JPH037755B2 失效
公开(公告)号：JPH037755B2
公开(公告)日：1991-02-04
申请号：JP20972183
申请日：1983-11-07
申请人： IBIDEN CO LTD
发明人： YAMAUCHI HIDETOSHI , YOKOYAMA TAKAO , TANIGAWA SHOJI
IPC分类号： C23C20/02 , C04B41/88 , C23C18/12

4. 发明专利

JPH0229638B2 失效
公开(公告)号：JPH0229638B2
公开(公告)日：1990-07-02
申请号：JP18696884
申请日：1984-09-06
申请人： IBIDEN CO LTD
发明人： YAMAUCHI HIDETOSHI , YOKOYAMA TAKAO , NOMURA TADAHIRO
IPC分类号： C04B41/87 , C04B35/56 , C04B35/565 , C04B41/89 , F24C15/24 , H05B3/14

5. 发明专利

JPS62226882A MANUFACTURE OF SILICON CARBIDE BASE COMPOSITE MATERIAL 失效
公开(公告)号：JPS62226882A
公开(公告)日：1987-10-05
申请号：JP6959686
申请日：1986-03-27
申请人： IBIDEN CO LTD
发明人： YOKOYAMA TAKAO
IPC分类号： C04B41/88

6. 发明专利

JPS61190080A FAR INFRARED RADIATOR OF METALLIC BASE MATERIAL AND ITS PRODUCTION 失效
公开(公告)号：JPS61190080A
公开(公告)日：1986-08-23
申请号：JP3080285
申请日：1985-02-19
申请人： IBIDEN CO LTD
发明人： KOMORI TERUO , YOKOYAMA TAKAO , KUWAYAMA YOICHI
IPC分类号： C23D5/00 , C03C8/14 , C03C14/00 , H05B3/10
摘要： PURPOSE:To produce inexpensively a far IR radiator having excellent thermal impact resistance, mechanical strength, etc. by coating a specific ratio of oxide ceramic magnetic material powder and inorg. compd. having a low m.p. on the surface of a metallic base material and calcining the same. CONSTITUTION:A viscous material such as vehicle is mixed with the compsn. composed of 10-90pts.wt. oxide ceramic magnetic material powder and 90-10pts. inorg. compd. having the low m.p. to form a paint. On the other hand, the surface of the metallic base material consisting of a stainless steel, aluminum, etc. is subjected to a treatment such as cleaning up or activation, the above-mentioned paint is coated on the surface. >=1 kinds among silimanite, steatite, forsterite, cordierite, mullite, alumina, zirconia, titania, zircon and periclase are suitable as the above-mentioned magnetic material powder and low melting high expansion glass such as alumina silicate glass is suitable as the inorg. compd. The base material coated in the above-mentioned manner is calcined at a heating temp. of 300-1,000 deg.C, by which the composite film composed of the far IR radiator and the low melting inorg. compd. is formed on the surface of the metallic base material.

7. 发明专利

JPS61179881A INFRARED RADIATOR WITH METALLIC BASE MATERIAL AND ITS PRODUCTION 失效
公开(公告)号：JPS61179881A
公开(公告)日：1986-08-12
申请号：JP2076485
申请日：1985-02-04
申请人： IBIDEN CO LTD
发明人： KOMORI TERUO , YOKOYAMA TAKAO , KUWAYAMA YOICHI
IPC分类号： C23D5/00 , H05B3/00 , H05B3/10
摘要： PURPOSE:To improve the radiation rate, thermal shock resistance, and workability by coating the surface of a metallic base material with a composition consisting of an infrared radiator mainly composed of oxides of transition metals and low-m.p. inorganic compounds. CONSTITUTION:The film of an infrared blackbody paint composition consisting of an infrared radiator mainly composed of oxides of transition metals and low-m.p. high expansion glass is formed on the metallic base material surface. The above oxides are selected from >=1 kind among manganese dioxide, iron oxide, cobalt oxide, copper oxide, and chromium oxide ; the above glass is selected from >=1 kind among alumina-silica glass, potash-lead glass, soda-lead glass, and soda-zinc glass. The above infrared radiator has a high rate of radiation and excels in thermal shock resistance and workability.

8. 发明专利

JPS6121965A Alumina sintered body and manufacture 失效
标题翻译：氧化铝烧结体和制造
公开(公告)号：JPS6121965A
公开(公告)日：1986-01-30
申请号：JP14479684
申请日：1984-07-11
申请人： Ibiden Co Ltd
发明人： YAMAUCHI HIDETOSHI , YOKOYAMA TAKAO , INUI TAKASHI
IPC分类号： C04B35/111 , C04B35/10 , C04B35/56 , C04B35/565

9. 发明专利

JPS6168380A Ceramic infrared radiator and manufacture 失效
标题翻译：陶瓷红外辐射器和制造
公开(公告)号：JPS6168380A
公开(公告)日：1986-04-08
申请号：JP18696884
申请日：1984-09-06
申请人： Ibiden Co Ltd
发明人： YAMAUCHI HIDETOSHI , YOKOYAMA TAKAO , NOMURA TADAHIRO
IPC分类号： C04B41/87 , C04B35/56 , C04B35/565 , C04B41/89 , F24C15/24 , H05B3/14

10. 发明专利

JPS6121964A Alumina sintered body and manufacture 失效
公开(公告)号：JPS6121964A
公开(公告)日：1986-01-30
申请号：JP14479584
申请日：1984-07-11
申请人： Ibiden Co Ltd
发明人： YAMAUCHI HIDETOSHI , YOKOYAMA TAKAO , INUI TAKASHI
IPC分类号： C04B35/111 , C04B35/10 , C04B35/56 , C04B35/565

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式