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1. 发明专利

JPH01148301A DEVICE FOR LIQUEFYING OIL FUME 失效
公开(公告)号：JPH01148301A
公开(公告)日：1989-06-09
申请号：JP30790487
申请日：1987-12-04
申请人： FUJITSU LTD
发明人： KUTSUNO FUMIO , OBARA HIDEAKI , WAKABAYASHI MITSUO
IPC分类号： B01D5/00
摘要： PURPOSE:To easily and safely recover the oil fume (oil vapor) evaporated and discharged from a vacuum pump by providing a coil tube having an expansion chamber at a position of its oil compressing line in a suction path for the oil fume to condense. CONSTITUTION:A cylindrical oil pan 4 is concentrically fixed on a suction cylinder 1 having a suction port communicating with the exhaust port 2 of the vacuum pump on its bottom surface, the coil tubes 9 and 10 are provided around the oil pan 4, an exhaust cylinder 11 penetrating into the upper end of the tube 10 is provided, and the whole body is enclosed with a cover cylinder 15. The oil pan 4 is separated by a cylindrical partition 5 into the upper and lower expansion chambers 6 and 7, and a partition 8 is vertically provided on the lower chamber. The respective coil tubes 9 and 10 are inserted into the expansion chambers 6 and 7, and the oil vapor introduced through the coil tubes 9 and 10 is expanded in the expansion chambers 6 and 7 and liquefied.

2. 发明专利

JPH04370380A COLD TRAP AND CLEANING METHOD THEREOF 失效
公开(公告)号：JPH04370380A
公开(公告)日：1992-12-22
申请号：JP14769691
申请日：1991-06-20
申请人： FUJITSU LTD
发明人： WAKABAYASHI MITSUO , KUTSUNO FUMIO
IPC分类号： B01D8/00 , F04B37/08 , F04B37/16 , F04B39/16
摘要： PURPOSE:To facilitate a cleaning process by providing a double structure having a spacing part for containing cooling and heating liquid between inner/outer walls, providing a plurality of shield plates for condensing a gas component and a shower pipe for jetting washing liquor in the inner wall, and providing a heater in the outer wall for heating the spacing part. CONSTITUTION:A spacing part 10 is provided between inner/outer wall parts 8, 9. A cock 22 is closed to replace a coolant in the spacing parts 10 with heating liquid of water or the like by using cocks 11, 12, heated to a predetermined temperature by energying a heater 19. The cock 23 is opened and associated with a three-way cock 18 to perform acid cleaning, water washing, alkali cleaning and solvent cleaning by successively switching acid, alkali, water and a solvent of low boiling point. After thus ending cleaning of a cold trap 7, an exhaust system 26 is driven to emit gas, thereafter by replacing the heating liquid in the spacing part 10 with the coolant, a cleaning process ends. Thus in the above, labor hours for removing and mounting the cold trap can be eliminated.

3. 发明专利

JPS5742318A Cleaner for exhaust gas 失效
标题翻译：排气清洁剂
公开(公告)号：JPS5742318A
公开(公告)日：1982-03-09
申请号：JP11665880
申请日：1980-08-25
申请人： Fujitsu Ltd
发明人： KUTSUNO FUMIO , KANEKO YUKIO , TANABE KAORU
IPC分类号： B01D53/34 , B01D53/18 , B01D53/46 , B01D53/77
摘要： PURPOSE: To raise the efficiency of cleaning by using a system in which a nozzle injection chamber is formed inside of a cylindrical cleaner by fixing a lower end- opened inner cylinder at almost central part, and an exhaust gas pipe is introduced into the upper part of the inner cylinder.
CONSTITUTION: An outer cylinder 24 is provided to the periphery of an inner cylinder 20 in such a way as to surround the inner cylinder through a space 28, and an exhaust port 25 connected to an exhaust gas system is provided to the upper part of the outer cylinder 24. And, the bottom of the outer cylinder 24 is provided with a cleaning liquid 25 which is to be injected from above to below from a nozzle 22 provided inside the inner cylinder 20 by means of a circulating pump P. The exhaust gas system is operated, and exhaust gas 27 is introduced from an inlet 21 into the inner cylinder 20 and brought into contact with showered liquid 26 injected from the nozzle 22 for cleaning.
COPYRIGHT: (C)1982,JPO&Japio
摘要翻译：目的：通过在几乎中心部分固定下端开口的内筒，通过使用在圆筒形清洁器内部形成喷嘴注入室的系统来提高清洁效率，并且将排气管引入上部的内筒。构成：通过空间28将外筒24设置在内筒20的周围，以便通过空间28围绕内筒，并且连接到排气系统的排气口25设置在内筒24的上部并且，外筒24的底部设有清洗液25，该清洗液25通过循环泵P从设置在内筒20的内侧的喷嘴22从上到下喷射。排气系统被操作，并且废气27从入口21引入内筒20并与从喷嘴22喷射的喷淋液体26接触以进行清洁。

4. 发明专利

JPS6073184A BELLOWS VALVE 失效
公开(公告)号：JPS6073184A
公开(公告)日：1985-04-25
申请号：JP18188583
申请日：1983-09-29
申请人： FUJITSU LTD
发明人： KUTSUNO FUMIO , SHIMAUCHI YOUICHI
IPC分类号： F16K41/10 , F16K51/02
摘要： PURPOSE:To extend the life of bellows by providing a mechanism moving the bellows up and down, the first and second connecting ports, and an opening/closing valve body on a bellows valve, providing a hole communicating to a bellows inner bore section, and equalizing the inner pressure and the outer pressure. CONSTITUTION:A cover 31 and an opening/closing valve operating bar 24 are airtightly sealed with an O-ring 32 in the bellows interior B, and an upper flange section 30 and the cover 31 are closely sealed with the O-ring 33. A ventilating hole 22-1 is provided on an opening/closing valve 22 and is communicated to the bellows interior. In addition, a through hole 24-1 is likewise provided in the center of the opening/closing valve operating bar 24 and is communicated to an exhaust pipe 24-2 provided above a handle 25. Accordingly, the inner pressure and the outer pressure of the bellows are equalized, thus the long life of the bellows can be attained.

5. 发明专利

JPS6085871A GRINDING DEVICE 失效
公开(公告)号：JPS6085871A
公开(公告)日：1985-05-15
申请号：JP19457383
申请日：1983-10-17
申请人： FUJITSU LTD
发明人： KUTSUNO FUMIO , YAMANO MASAOMI
IPC分类号： B24D7/00 , B24D7/18
摘要： PURPOSE:To reduce the resistance of cutting to prevent a workpiece from splitting and cracking, by forming a plurality of cutting edges in the grinding surface of a rotary grindstone so that the workpiece is cut in several steps. CONSTITUTION:Cutting edges 12, for example, three in number, are formed in the cutting surface of a cup-shape rotary grindstone 11. With the use of these cutting edges 12, a semiconductor substrate 13 as a workpiece is cut in three steps by a predetermined thickness. With this arrangement the resistance of cutting which is concentrated into the substrate 13 may be dispersed to reduce the cutting resistance exerted to the substrate 13 so that it is possible to prevent the substrate 13 from splitting and cracking.

6. 发明专利

JPS59103358A Blanking device 失效
标题翻译：空白设备
公开(公告)号：JPS59103358A
公开(公告)日：1984-06-14
申请号：JP21246582
申请日：1982-12-03
申请人： Fujitsu Ltd
发明人： KUTSUNO FUMIO
IPC分类号： H01L23/12 , H01L21/00
CPC分类号： H01L21/67005
摘要： PURPOSE:To reduce a manufacturing cost and a reparative cost by fixing a thin film to a supporting table provided with plurality of square holes to compose a die. CONSTITUTION:A constitution wherein a punch 12 is supported on a punch pad 11 and is guided by a stripper 13, is as in the conventional. A table 14 is provided with square holes 15 corresponding to ceramic chips 7 and a film sheet 16 made of metals, hard plastics or the like is fixed to the surface of said table through O-rings 17. The punch 12 is lowered to this die to blank the sheet 16 and the punched holes are used as die holes 6a for the die. In this constitution, exchange of the sheet 16 is easy, a manufacturing cost and a reparative cost of the die are substantially reduced and clogging of the die holes 6a with die-cut wastes can be prevented.
摘要翻译：目的：通过将薄膜固定在具有多个方孔的支撑台上以构成模具来降低制造成本和修复成本。构成：其中冲头12支撑在冲压垫11上并由汽提器13引导的结构如传统的那样。工作台14设置有与陶瓷片7对应的方孔15，由金属构成的薄膜片16，硬质塑料等通过O形环17固定在台面的表面。冲头12下降至该模具以使坯料16成型，冲孔用作冲模的模孔6a。在这种构造中，片16的交换容易，模具的制造成本和修理成本显着降低，并且可以防止具有冲切废物的模孔6a的堵塞。

7. 发明专利

JPS58131753A MANUFACTURE OF MULTILAYER SHEET 失效
公开(公告)号：JPS58131753A
公开(公告)日：1983-08-05
申请号：JP1298882
申请日：1982-01-29
申请人： FUJITSU LTD
发明人： WAKABAYASHI TETSUSHI , SUGIMOTO MASAHIRO , AKASAKI HIDEHIKO , KUTSUNO FUMIO
IPC分类号： H01L23/12 , H01L21/48
摘要： PURPOSE:To reduce the damage of a sheet such as a green sheet by pasting the sheet onto a pallet for guide with a guide section and executing positioning in the next process. CONSTITUTION:The pallet 8 is made of a comparatively hard board material, and a punched section 8a is formed while guide grooves 8b, 8c are formed to an edge section. The sheets 1a-1e are fitted onto the pallet 8 through adhesive materials, the guide grooves 8b, 8c are formed in order to accurately align a mask and the pallet 8, and guide pins 9a, 9b are moved along the guide grooves 8b, 8c and the mask and the pallet are aligned. A drag 13 is disposed to a fixing base 12 so as to be extracted, the upper end of a concave section 13a in which sheets 14 cut are stacked and encased has a cutting edge 15, the punched section 8a is fitted to the outer circumference, the guide pins 9a, 9b are guided along the kerfs 8b, 8c, and the sheets are cut accurately. A cope 16 is moved vertically in a stripper 17, and the sheets 1a-1e are cut in cooperation with the edge 15 by the falling of the cope and laminated into the concave section 13a. The sheets are unified by dropping the cope under a state in which the sheets are laminated and heating and pressing the sheets, and the drag 13 is transferred to the next process.

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