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1. 发明专利

JP2007010675A Temperature compensating mechanism of micromechanical ring vibrator 有权
标题翻译：微电子振荡器温度补偿机理
公开(公告)号：JP2007010675A
公开(公告)日：2007-01-18
申请号：JP2006201892
申请日：2006-07-25
申请人： Eta Sa Manufacture Horlogere Suisse , ウーテーアー・エス・アー・マニファクチュール・オロロジェール・スイス
发明人： GIOUSOUF METIN , KUECK HEINZ , PLATZ RAINER
IPC分类号： G04F5/04 , G04G3/00 , B81B3/00 , G01C19/56 , G01C19/5684 , G01C19/5712 , G04G3/04 , H03B5/30 , H03B5/32 , H03H9/24
CPC分类号： G01C19/5712 , H03B5/30
摘要： PROBLEM TO BE SOLVED: To provide temperature compensating mechanism for micromechanical ring vibrator. SOLUTION: This vibrator is an integral micromechanical ring vibrator configured so that it is supported on a substrate 2 to vibrate nearly perpendicular to the substrate centered on a rotary shaft O, in accordance with the first vibration mode. The vibrator comprises a central strut 5, extending from the substrate 2 along the rotary shaft O, a self-supported vibrating structure 6 having an outer ring 60 co-axial with the rotary shaft O, while being connected to the central strut 5 via two or more spring elements 62, and an electrode structure, arranged around the outer ring 60 to be connected with an integrated electronic circuit. In the vibrator, electrodes 100, 120; 130, 150 are located at the bottom of the self-supported vibrating structure to drive and sense the second vibration mode which has resonance frequency different from that of the first vibration mode on the surface that is nearly perpendicular to the substrate 2, and then utilize difference in resonance frequency between both vibration modes and compensates for the effects of the temperature on the frequency of signal generated by time reference section. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供微机械振动器的温度补偿机构。解决方案：该振动器是一体的微型机械振动振动器，其被构造成使得其被支撑在基板2上，以便根据第一振动模式几乎垂直于基于旋转轴O的基板垂直。该振动器包括一个中心支柱5，它从基体2沿旋转轴O延伸，一个自支撑的振动结构6，它具有与旋转轴O同轴的外环60，同时通过两个连接到中心支柱5 或多个弹簧元件62和电极结构，其布置在外环60周围以与集成电子电路连接。在振动器中，电极100,120; 130,150位于自支撑振动结构的底部，以驱动和感测在与基板2几乎垂直的表面上具有与第一振动模式不同的共振频率的第二振动模式，然后利用两种振动模式之间的谐振频率差异，并补偿温度对时间基准部分产生的信号频率的影响。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2007024901A Temperature compensation mechanism for micromechanical ring vibrator 有权
标题翻译：微型振动振动器温度补偿机理
公开(公告)号：JP2007024901A
公开(公告)日：2007-02-01
申请号：JP2006201886
申请日：2006-07-25
申请人： Eta Sa Manufacture Horlogere Suisse , ウーテーアー・エス・アー・マニファクチュール・オロロジェール・スイス
发明人： GIOUSOUF METIN , KUECK HEINZ , PLATZ RAINER
IPC分类号： G04F5/04 , G04G3/00 , B81B3/00 , G01C19/56 , G01C19/5684 , G01C19/5712 , H03B5/30 , H03B5/32 , H03H9/24
CPC分类号： G01C19/5712 , H03B5/30
摘要： PROBLEM TO BE SOLVED: To provide a micromechanical ring vibrator having a temperature compensation mechanism.
SOLUTION: The resonator is an integrated micromechanical ring vibrator supported above a substrate and adapted to oscillate around an axis of rotation substantially perpendicular to the substrate. The ring vibrator comprises a central post extending from the substrate along the axis of rotation, a free-standing oscillating structure connected to the central post, including an outer ring 60 coaxial with the axis of rotation, and connected to the central post by means of a plurality of spring elements, and electrode structures disposed around the outer ring 60 and connected to the integrated electronic circuit. The free-standing oscillating structure further comprises a plurality of thermally compensating members 65 which are adapted to alter a mass moment of inertia of the free-standing oscillating structure as a function of temperature so as to compensate for the effect of temperature on the resonant frequency of the ring vibrator and are arranged around the outer ring 60.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有温度补偿机构的微机械振动器。解决方案：谐振器是支撑在衬底上并适于围绕基本垂直于衬底的旋转轴线振荡的集成微机械振荡器。环形振动器包括从基板沿着旋转轴线延伸的中心柱，连接到中心柱的独立摆动结构，包括与旋转轴线同轴的外环60，并且通过以下方式连接到中心柱多个弹簧元件和设置在外圈60周围并连接到集成电子电路的电极结构。自立式振荡结构还包括多个热补偿构件65，其适于改变作为温度的函数的自立式振荡结构的质量惯性矩，以便补偿温度对共振频率的影响环形振动器的周围，并且布置在外圈60周围。（C）2007年，JPO和INPIT

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