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    • 4. 发明专利
    • Radiation-sensitive resin composition, and interlayer insulation film, microlens, and method for producing those
    • 辐射敏感性树脂组合物和中间层绝缘膜,微生物及其生产方法
    • JP2009053667A
    • 2009-03-12
    • JP2008159870
    • 2008-06-19
    • Jsr CorpJsr株式会社
    • UCHIIKE KAZUHIROHANAMURA MASAAKIHAMADA KENICHIIIJIMA TAKAHIRO
    • G03F7/023C08F2/38C08F220/02C08F222/00G02B1/04G02B3/00G03F7/40
    • PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition having high radiation sensitivity and enabling a patterned thin film excellent in heat resistance to be easily formed. SOLUTION: The radiation-sensitive resin composition includes [A] a polymer having at least one group selected from the group consisting of a carboxyl group and a carboxylic acid anhydride group, at least one group selected from the group consisting of an oxiranyl group and an oxetanyl group, and an n-valent group represented by formula (1) (wherein R 1 is a methylene group or a 2-10C alkylene group or alkylmethylene group; Y is a single bond, -CO-, -O-CO- * (provided that a bonding radical with "*" bonds to R 1 ) or -NHCO- * (provided that a bonding radical with "*" bonds to R 1 ); n is an integer of 2-10; X is a 2-70C n-valent hydrocarbon group which may have one or more ether bonds; and "+" is a bonding radical), and [B] a 1,2-quinonediazide compound. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供具有高辐射灵敏度的辐射敏感性树脂组合物,并且能够容易地形成耐热性优异的图案化薄膜。 解决方案:辐射敏感性树脂组合物包括[A]具有至少一个选自羧基和羧酸酐基团的基团的聚合物,至少一种选自环氧乙烷基 (1)表示的n价基团(式中,R“SP”是亚甲基或2-10C亚烷基或烷基亚甲基; Y是单键, -CO-,-O-CO- * (条件是具有“*”键与R 1键的键合基团)或-NHCO- (条件是具有“*”的键合基团与R 1键合); n是2-10的整数; X是2-70C n价烃基,其可以具有一个或多个 醚键;“+”是键合基团),[B]是1,2-醌二叠氮化合物。 版权所有(C)2009,JPO&INPIT
    • 6. 发明专利
    • Radiation sensitive composition for forming colored layer, color filter and color liquid crystal display panel
    • 用于形成彩色层,彩色滤光片和彩色液晶显示面板的辐射敏感组合物
    • JP2005300994A
    • 2005-10-27
    • JP2004118245
    • 2004-04-13
    • Jsr CorpJsr株式会社
    • KAMII HIDEYUKIIIJIMA TAKAHIROKOYAMA TAKAYOSHINAGATSUKA TOMIO
    • G03F7/028G02B5/20G02B5/23G02F1/13G03F7/004
    • PROBLEM TO BE SOLVED: To provide a radiation sensitive composition for forming a colored layer which gives pixels and a black matrix that produce neither undissolved matter nor scum on a pattern edge in development, cause neither chipping of a pattern edge nor undercut even under low exposure energy. SOLUTION: The radiation sensitive resin composition for forming a colored layer contains (A) a colorant, (B) an alkali-soluble resin, (C) a polyfunctional monomer and (D) a photo-radical generator containing a compound represented by formula (1) or (2) as an essential component, wherein R 1 denotes a 1-12C (cyclo)alkyl or phenyl; R 2 denotes H, a 1-12C (cyclo)alkyl or phenyl; R 3 denotes H or a 1-12C (cyclo)alkyl; and R 4 -R 6 each denotes H or a 1-6C (cyclo)alkyl. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了提供一种用于形成着色层的辐射敏感组合物,其给出像素和黑色矩阵,其在显影中在图案边缘上既不会形成未溶解的物质也不产生浮渣,也不会导致图案边缘的切割或均匀的下切 低曝光能量。 解决方案:用于形成着色层的辐射敏感性树脂组合物含有(A)着色剂,(B)碱溶性树脂,(C)多官能单体和(D)含有表示的化合物的光激发生成剂 (1)或(2)作为必需组分,其中R 1表示1-12C(环)烷基或苯基; R 2 表示H,1-12C(环)烷基或苯基; R 3表示H或1-12C(环)烷基; 且R 4各自表示H或1-6C(环)烷基。 版权所有(C)2006,JPO&NCIPI
    • 8. 发明专利
    • Radiation-sensitive resin composition, interlayer insulation film and microlens and method for forming those
    • 辐射敏感性树脂组合物,层间绝缘膜和微孔及其形成方法
    • JP2008286936A
    • 2008-11-27
    • JP2007130723
    • 2007-05-16
    • Jsr CorpJsr株式会社
    • HANAMURA MASAAKIUCHIIKE KAZUHIROIIJIMA TAKAHIROHAMADA KENICHI
    • G03F7/023C08F220/04C08F220/26G02B1/04G02B3/00G03F7/004H01L21/027
    • PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition having high radiation sensitivity, having such a development margin as to form a good pattern profile even in a developing time exceeding the optimum developing time in a developing step, and capable of easily forming a patterned thin film excellent in adhesion. SOLUTION: The radiation-sensitive resin composition comprises: [A] a copolymer of (a1) at least one compound selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic acid anhydrides, (a2) an unsaturated compound having at least one group selected from the group consisting of an oxiranyl group and an oxetanyl group, and (a3) an unsaturated compound other than the compounds (a1) and (a2); [B] a 1,2-quinonediazide compound; and [C] a compound having an alicyclic oxiranyl group but not having a carboxyl group. The radiation-sensitive resin composition is suitable for use particularly in the formation of an interlayer insulation film or microlenses. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:为了提供具有高辐射敏感性的辐射敏感性树脂组合物,具有如此的显影余量,即使在显影步骤中超过最佳显影时间的显影时间也形成良好的图案图形,并且能够 容易地形成粘附性优异的图案化薄膜。 解决方案:辐射敏感性树脂组合物包含:[A](a1)至少一种选自不饱和羧酸和不饱和羧酸酐的化合物的共聚物,(a2)至少具有不饱和羧酸 选自环氧乙烷基和氧杂环丁烷基的一个基团,和(a3)除化合物(a1)和(a2)之外的不饱和化合物; [B] 1,2-醌二叠氮化合物; 和[C]具有脂环族环氧乙烷基但不具有羧基的化合物。 辐射敏感性树脂组合物特别适用于形成层间绝缘膜或微透镜。 版权所有(C)2009,JPO&INPIT