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1. 发明专利

JP2005340403A Substrate rotation mechanism for film forming apparatus 有权
标题翻译：薄膜成型装置的基板旋转机构
公开(公告)号：JP2005340403A
公开(公告)日：2005-12-08
申请号：JP2004155468
申请日：2004-05-26
申请人： Denki Kagaku Kogyo Kk , 電気化学工業株式会社
发明人： YAMADA SUZUYA , KAWAGOE YOSHIMITSU , YAMAZAKI SEIICHI
IPC分类号： C04B35/584 , C23C16/44 , H01L21/205 , H01L21/68 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a substrate rotation mechanism applicable to a film forming apparatus using NH 3 under a high temperature at film forming. SOLUTION: The substrate rotation mechanism comprises a substrate tray for supporting a substrate to which a film is formed while rotating the substrate, a substrate tray support unit for freely rotatably supporting the substrate tray, and a slide unit existing between the substrate tray and the substrate tray support unit. Preferably, the substrate tray is made of a silicon nitride sintered body containing 5 to 50 mass% of boron nitride, and the substrate tray support unit is made of a silicon nitride sintered body containing 5 to 50 mass% of boron nitride in the substrate rotation mechanism wherein the slide unit is made of a silicon nitride sintered body. More preferably, the film forming apparatus forms nitride at a temperature of 900°C or over. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种在成膜时在高温下适用于使用NH 3 SB的成膜装置的基板旋转机构。解决方案：基板旋转机构包括用于在旋转基板的同时支撑形成有薄膜的基板的基板托盘，用于可自由旋转地支撑基板托盘的基板托盘支撑单元和存在于基板托盘之间的滑动单元和基板托盘支撑单元。优选地，基板托盘由含有5〜50质量％的氮化硼的氮化硅烧结体构成，基板托盘支撑单元由在基板旋转中含有5〜50质量％的氮化硼的氮化硅烧结体机构，其中滑动单元由氮化硅烧结体制成。更优选地，成膜装置在900℃以上的温度下形成氮化物。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JPH02164432A PRESSURE MEDIUM FOR GENERATING HIGH TEMPERATURE, EXTRA-HIGH PRESSURE 失效
公开(公告)号：JPH02164432A
公开(公告)日：1990-06-25
申请号：JP31857288
申请日：1988-12-19
申请人： DENKI KAGAKU KOGYO KK
发明人： KAWASAKI TAKU , KAWAGOE YOSHIMITSU , NOMURA KENJI
IPC分类号： B01J3/06
摘要： PURPOSE:To obtain pressure medium easily when avoids deformation and fracture in a high temperature, high pressure treatment and which eliminates the possibility of being included into products by using a laminated body comprising a hard solid material which exhibits a compressive stress of 10kg/mm or more when fracture or permanent set thereof begins and a soft material exhibiting a stress of less than 10kg/mm . CONSTITUTION:A solid material which exhibits a compressive stress of 10kg/mm or more when fracture or permanent set thereof begins and a solid material which exhibits such stress of less than 10kg/mm are combined with each other and then placed in a cell. The laminated body formed by application of high-temperature, extra-high-pressure treatment is used as a pressure medium for generating high temperature, extra-high pressure. As hard materials having compressive stress of 10kg/mm or more, for example, metal such as Mo, Ta, etc., diamond sintered ceramics of Al2O3, ZnO2, etc., are used, while as soft materials having stress of less than 10kg/mm , for example, molded bodies of NaCl, hBN, pyrophyllite, etc., are used. This pressure medium is useful in manufacturing diamond of high quality, etc., in large quality and at low cost.

3. 发明专利

JPS6445792A PRODUCTION OF ARTICLE COATED WITH PYROLYTIC BORON NITRIDE 失效
公开(公告)号：JPS6445792A
公开(公告)日：1989-02-20
申请号：JP20082487
申请日：1987-08-13
申请人： DENKI KAGAKU KOGYO KK
发明人： KADOTA KENJI , KAWAGOE YOSHIMITSU , TANJI HIROAKI
IPC分类号： C04B41/87
摘要： PURPOSE:To contrive prevention of a coating layer from cracking or peeling by repeated heating cooling, by specifying bulk density and surface roughness of a graphite substrate and thickness of the coating layer in producing the titled article using graphite as the substrate. CONSTITUTION:The surface of a graphite substrate is coated with boron nitride by a chemical vapor pyrolytic method using a boron halide gas and ammonia gas as raw materials. In the process, a graphite substrate having 1.70-1.95g/cm bulk density and >=10mu surface roughness (Rmax) is used as the graphite substrate and the thickness of the pyrolytic boron nitride coating layer is 10-300mu. In this case, if the bulk density of the graphite substrate is beyond the afore- mentioned range, adhesive force of the above-mentioned coating layer to the graphite substrate is reduced to =2.0MPa, possibly resulting in natural peeling. Furthermore, the thickness of the afore-mentioned coating layer is

4. 发明专利

JPS6328858A THERMALLY DECOMPOSED BORON NITRIDE CRUCIBLE FOR EVAPORATING METAL AND ITS PRODUCTION 失效
公开(公告)号：JPS6328858A
公开(公告)日：1988-02-06
申请号：JP17094186
申请日：1986-07-22
申请人： DENKI KAGAKU KOGYO KK
发明人： WATANABE SHOJIRO , NOMURA KENJI , KAWAGOE YOSHIMITSU
IPC分类号： C23C14/24
摘要： PURPOSE:To prevent the damage of a crucible having a multilayered structure due to a shrinkage strain produced between a metal to be evaporated and the crucible during cooling by forming one or more layers so that they are hot bonded to other constituent layers of the crucible. CONSTITUTION:A thermally decomposed boron nitride crucible consisting of weakly joined two or more layers is produced. External force is applied to the crucible to separate the layers from the weakly joined parts and surface treatment is carried out by ultrasonic cleaning with an org. solvent such as ethanol and drying. After the surface treatment, the layers are combined to obtain a multilayered crucible. When the resulting crucible is used to evaporate a metal, it withstands force applied by the difference in coefft. of thermal expansion between the crucible and the metal during cooling. In case where the inner layer is damaged, the crucible is not entirely damaged, so the service life is prolonged.

5. 发明专利

JP2729125B2 失效
公开(公告)号：JP2729125B2
公开(公告)日：1998-03-18
申请号：JP5927492
申请日：1992-02-14
申请人： DENKI KAGAKU KOGYO KK
发明人： ISHIDA TSUMORU , KAWAGOE YOSHIMITSU
IPC分类号： B01J3/06 , C01B21/064 , C04B35/583

6. 发明专利

JPH05220378A PRODUCTION OF HIGH TEMPERATURE AND PRESSURE GENERATOR AND CUBIC BORON NITRIDE SINTERED COMPACT 失效
公开(公告)号：JPH05220378A
公开(公告)日：1993-08-31
申请号：JP5927492
申请日：1992-02-14
申请人： DENKI KAGAKU KOGYO KK
发明人： ISHIDA TSUMORU , KAWAGOE YOSHIMITSU
IPC分类号： B01J3/06 , C01B21/064 , C04B35/583
摘要： PURPOSE:To generate an extra-high pressure with good reproducibility by inserting gaskets between a cylinder and an anvil and using agalmatolite consisting essentially of pyrophyllite having a specified content of free water as the inner gasket and paper having a specified content of water as the outer gasket. CONSTITUTION:A cylinder is provided between a couple of anvils having different inner and outer inclined surfaces, a gasket corresponding to the inner and outer inclined surfaces is inserted between the cylinder and anvil, and hence a reaction chamber is formed in the space between the anvil and cylinder. Agalmatolite contg.

7. 发明专利

JP2007326981A Method for producing phosphor, phosphor and lighting equipment 有权
标题翻译：生产磷光体，磷光体和照明设备的方法
公开(公告)号：JP2007326981A
公开(公告)日：2007-12-20
申请号：JP2006160408
申请日：2006-06-09
申请人： Denki Kagaku Kogyo Kk , 電気化学工業株式会社
发明人： KAWASAKI TAKU , KAWAGOE YOSHIMITSU
IPC分类号： C09K11/64 , C09K11/08 , H01L33/50 , H01L33/56 , H01L33/62
CPC分类号： C09K11/0883 , C09K11/7734 , H01L33/502 , H01L2224/48091 , H01L2224/48247 , H01L2924/00014
摘要： PROBLEM TO BE SOLVED: To obtain a β sialon phosphor having a slight reduction in emission intensity.
SOLUTION: The phosphor is powder comprising a β sialon represented by general formula Si
6-Z Al
Z O
Z N
8-Z as a matrix material which forms a solid solution of Eu as a luminescence center and has a particle diameter distribution by a laser diffraction scattering method in which 10% diameter (D
10 ) in a cumulative fraction is 7-20μm and 90% diameter (D
90 ) is 50-90μm and is obtained by mixing silicon nitride powder with aluminum nitride and, if necessary, an aluminum-containing compound and an Eu-containing compound to give raw material powder and maintaining the raw material powder in a nitrogen atmosphere or in a nonoxidizing atmosphere at 1,850-2,050°C for ≥9 hours.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：获得发光强度略有降低的β赛隆荧光体。解决方案：荧光体是包含由通式Si-SB-6-Z所示的β赛隆的粉末， 8-Z 作为形成Eu作为发光中心的固溶体的基质材料，并且通过激光衍射散射法具有10％直径（D 10 ）的粒径分布累积分数为7-20μm，直径90％（D 90 ）为50〜90μm，是通过将氮化硅粉末与氮化铝混合而得到的，如果需要，可以使用含铝化合物和含有Eu的化合物，得到原料粉末，并将原料粉末在氮气气氛中或在非氧化气氛中于1,850-250℃维持≥9小时。版权所有（C）2008，JPO＆INPIT

8. 发明专利

JP2721525B2 失效
公开(公告)号：JP2721525B2
公开(公告)日：1998-03-04
申请号：JP31857388
申请日：1988-12-19
申请人： DENKI KAGAKU KOGYO KK
发明人： KAWASAKI TAKU , KAWAGOE YOSHIMITSU
IPC分类号： C04B35/583 , B23B27/14 , C04B35/58 , H01L23/373

9. 发明专利

JPH02164774A CUBIC BORON NITRIDE SINTERED BODY AND PRODUCTION THEREOF 失效
公开(公告)号：JPH02164774A
公开(公告)日：1990-06-25
申请号：JP31857388
申请日：1988-12-19
申请人： DENKI KAGAKU KOGYO KK
发明人： KAWASAKI TAKU , KAWAGOE YOSHIMITSU
IPC分类号： C04B35/583 , B23B27/14 , C04B35/58 , H01L23/373
摘要： PURPOSE:To obtain a cubic BN sintered body which is high in thermal conductivity and large in particle diameter by specifying the conditions in the case of diffusing and incorporating nitride or boron nitride of alkali (alkaline earth) metal into pyrolytic molded BN body and treating it at high temp. and high pressure. CONSTITUTION:This cubic BN sintered body is made of cubic BN particles having >=100mum mean particle diameter and >=100W/cm deg.K thermal conductivity at normal temp. Therefore when it is utilized for the superprecision cutting tools, a sharp-edged tool is obtained and high-precision cutting performance is held in a range over a long period. Further when it is utilized for a heat sink for a high-output semiconductor laser, the large heat release characteristics are stably continued in a long period. In the production of the above-mentioned sintered body, 0.1-5mol% nitride or boron nitride of alkali metal or alkaline earth metal is diffused and incorporated into pyrotic molded BN body. Then this is converted into cubic BN at >=50,000atm and 1500 deg.C in the thermodynamic stable conditions. The temp. rise velocity at >=1300 deg.C is regulated to >=500 deg.C/min.

10. 发明专利

JPS6210590A BORON NITRIDE CRUCIBLE AND MANUFACTURE THEREOF 失效
公开(公告)号：JPS6210590A
公开(公告)日：1987-01-19
申请号：JP14840985
申请日：1985-07-08
申请人： DENKI KAGAKU KOGYO KK
发明人： TANJI HIROAKI , SUZUKI MASAHARU , KAWASAKI TAKU , KAWAGOE YOSHIMITSU , NOMURA KENJI
IPC分类号： C23C16/34 , C23C16/01 , F27B14/10

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