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JP2008205428A Optical apparatus having moving member for manipulating and/or determining position 有权
标题翻译：具有移动部件用于操纵和/或确定位置的光学装置
公开(公告)号：JP2008205428A
公开(公告)日：2008-09-04
申请号：JP2007289768
申请日：2007-11-07
申请人： Carl Zeiss Smt Ag , カール・ツァイス・エスエムティー・アーゲー
发明人： WEBER JOCHEN , KLAUS RIEF , CLAUDIA MATANO , SIGEL BENJAMIN , SIEGEL JOACHIM
IPC分类号： H01L21/027 , G02B7/00 , G02B7/04
CPC分类号： G02B7/003 , G02B7/023
摘要： PROBLEM TO BE SOLVED: To provide an optical apparatus having at least one optical element and a plurality of moving members the number of which exceeds the number of degrees of freedom n with which the optical element can be manipulated.
SOLUTION: Levers 2a, 2b of two piezo-actuators 1a, 1b are linked with each other via linking parts 3a, 3b and a connecting rod 6. When the piezo-actuator 1a is in operation, the lever 2a moves in the direction of a two-way arrow 7a. When the piezo-actuator 1a is in operation and the piezo-actuator 1b is not in operation, the connecting rod 6 moves around the linking part 3b. As a result, an optical element 5 linked to the connecting rod 6 via linking parts 9, 10 and a control lever 4 moves in the direction of a two-way arrow 8. When the piezo-actuator 1a is not in operation, that the operation of the piezo-actuator 1b moves in linkage with the lever 2b in a two-way arrow 7b is explained similarly. As a result, the connecting rod 6 moves around the linking part 3a.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有至少一个光学元件和多个移动构件的光学装置，其数量超过可以操纵光学元件的自由度n数量。解决方案：两个压电致动器1a，1b的杠杆2a，2b通过连接部分3a，3b和连杆6彼此连接。当压电致动器1a处于运行状态时，杠杆2a在双向箭头7a的方向。当压电致动器1a工作并且压电致动器1b不工作时，连杆6围绕连接部分3b移动。结果，通过连接部分9,10和控制杆4连接到连接杆6的光学元件5沿双向箭头8的方向移动。当压电致动器1a不工作时，类似地说明压电致动器1b与双向箭头7b中的杠杆2b联动的动作。结果，连杆6在连接部3a周围移动。版权所有（C）2008，JPO＆INPIT

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