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1. 发明专利

JP2009001885A Film thickness detection device and vapor deposition method 审中-公开
标题翻译：薄膜厚度检测装置和蒸发沉积方法
公开(公告)号：JP2009001885A
公开(公告)日：2009-01-08
申请号：JP2007165773
申请日：2007-06-25
申请人： Canon Inc , キヤノン株式会社
发明人： YOSHIKAWA TOSHIAKI , MASHITA SEIJI , FUKUDA NAOTO
IPC分类号： C23C14/24 , H01L51/50 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To improve the operation efficiency of a vapor deposition apparatus by regenerating a resonator of a film thickness detection device provided in a vapor deposition chamber in such a state that the resonator is placed in the vapor deposition chamber.
SOLUTION: A plurality of resonators 5 are installed in a resonator holder 4. When a vapor deposited film having a certain degree of thickness is stacked on the surface of the resonator 5 for measuring the film thickness in an operative position A, the resonator 5 is moved to an inoperative position B capable of being heated with a heater block 8 and covered with a wall face of a shield 1 whose periphery is cooled, and then the vapor deposited film on the surface of the resonator 5 is removed to regenerate the resonator 5. During this time, measuring of the film thickness is continued by using other resonator 5 in the operative position A. It becomes possible to continue vapor deposition for a long period of time without releasing the vapor deposition chamber to the atmospheric air by repeating these processes.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：为了提高气相沉积装置的操作效率，通过在谐振器被放置在蒸镀室中的状态下再生设置在气相沉积室中的膜厚度检测装置的谐振器来提高其工作效率。解决方案：多个谐振器5安装在谐振器保持器4中。当在谐振器5的表面上层叠具有一定厚度的蒸镀膜以测量操作位置A的膜厚时，谐振器5移动到能够用加热器块8加热并被周围被冷却的屏蔽件1的壁面覆盖的非工作位置B，然后去除谐振器5的表面上的气相沉积膜以再生在此期间，通过在操作位置A中使用其它谐振器5继续测量膜厚度。可以长时间地继续气相沉积，而不会通过以下方式将气相沉积室释放到大气中：重复这些过程。版权所有（C）2009，JPO＆INPIT

2. 发明专利

JP2008115410A Vapor deposition apparatus 审中-公开
标题翻译：蒸气沉积装置
公开(公告)号：JP2008115410A
公开(公告)日：2008-05-22
申请号：JP2006297375
申请日：2006-11-01
申请人： Canon Inc , キヤノン株式会社
发明人： YOSHIKAWA TOSHIAKI , MASHITA SEIJI , FUKUDA NAOTO
IPC分类号： C23C14/24 , H01L51/50
摘要： PROBLEM TO BE SOLVED: To provide a vapor deposition apparatus which extends the usable life of a film thickness monitor and makes the tact time, the product yield rate, and the manufacturing cost appropriate.
SOLUTION: This vapor deposition apparatus includes a vapor deposition source having an opening 5 for vapor deposition, and an opening 6 for a film thickness monitor. The opening 5 for vapor deposition is placed so as to face a quartz glass substrate which is a substrate to be vapor-deposited. The opening 6 for the film thickness monitor is placed towards a direction except the direction towards the quartz glass substrate which is the substrate to be vapor-deposited. The film thickness monitor 7 is placed at a position directly facing the opening 6 for the film thickness monitor.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种延长膜厚监测器的使用寿命的蒸镀装置，使得生产时间，产品成品率和制造成本适合。解决方案：该蒸镀装置包括：蒸镀源，具有蒸镀用的开口部5和膜厚监视器的开口部6。放置用于气相沉积的开口5以面对作为气相沉积基板的石英玻璃基板。膜厚监视器的开口6朝向除了作为要气相沉积的基板的石英玻璃基板的方向以外的方向。膜厚监视器7被放置在与膜厚监视器的开口6正对的位置处。版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2008024998A Vacuum deposition source and vacuum deposition device 审中-公开
标题翻译：真空沉积源和真空沉积装置
公开(公告)号：JP2008024998A
公开(公告)日：2008-02-07
申请号：JP2006200190
申请日：2006-07-24
申请人： Canon Inc , キヤノン株式会社
发明人： MASHITA SEIJI , YOSHIKAWA TOSHIAKI , FUKUDA NAOTO
IPC分类号： C23C14/24 , H01L51/50 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To provide a vacuum deposition source which can prevent the generation of clogging at the opening of a crucible and enables stable film deposition for a long time.
SOLUTION: The growth of a vapor deposition material 5 associated with the redeposition of the evaporated vapor deposition material 5 in the crucible is thermally suppressed by arranging an inner cap 3 having a good thermal conductivity at the inside of the crucible body 1 in such a constitution that the position of each opening part 3a of the inner cap 3 is different from the position of a crucible opening 1a formed in an upper cap in the vertical direction. That is to say, the heat from a heater 4 is transferred through the inner cap 3 to the central part of the vapor deposition material 5, and the local lowering of the temperature of the vapor deposition material 5 is prevented. Clogging can be further effectively prevented by additionally providing a columnar support or a partition having a good thermal conductivity between the inner cap 3 and the bottom wall of the crucible.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种可以防止在坩埚开口处产生堵塞的真空沉积源，并且能够长期稳定地进行膜沉积。解决方案：通过在坩埚体1的内部布置具有良好导热性的内盖3，与坩埚中蒸发的蒸镀材料5的再沉积相关的蒸镀材料5的生长被热抑制内盖3的各开口部3a的位置与在上下方向上形成的坩埚开口1a的位置不同的构成。也就是说，来自加热器4的热量通过内盖3传递到蒸镀材料5的中心部分，并且防止蒸镀材料5的温度的局部降低。通过在内盖3和坩埚的底壁之间另外提供具有良好导热性的柱状支撑件或隔板，可以进一步有效地防止堵塞。版权所有（C）2008，JPO＆INPIT

4. 发明专利

JP2008019477A Vacuum vapor deposition apparatus 审中-公开
标题翻译：真空蒸发器沉积装置
公开(公告)号：JP2008019477A
公开(公告)日：2008-01-31
申请号：JP2006192294
申请日：2006-07-13
申请人： Canon Inc , キヤノン株式会社
发明人： FUKUDA NAOTO , YOSHIKAWA TOSHIAKI , MASHITA SEIJI
IPC分类号： C23C14/24 , H01L51/50 , H05B33/10
CPC分类号： C23C14/26 , C23C14/243 , C23C14/545 , C23C14/56 , H01L51/001 , H01L51/56
摘要： PROBLEM TO BE SOLVED: To provide a vacuum vapor deposition apparatus capable of enhancing the productivity of an organic electroluminescence element. SOLUTION: A connection pipe 21 is connected to a vapor deposition source 10 for evaporating an organic electroluminescence material 1, and two branch pipes 22a, 22b are directed two objects for film deposition comprising substrates 31a, 31b and masks 32a, 32b to deposit an organic vapor deposition film. The film deposition time is shortened and a vacuum vapor deposition apparatus is miniaturized by performing the film deposition by simultaneously emitting vapors from the vapor deposition source 10 on a plurality of objects on different planes. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：提供能够提高有机电致发光元件的生产率的真空蒸镀装置。解决方案：连接管21连接到用于蒸发有机电致发光材料1的气相沉积源10，并且两个分支管22a，22b被引导成两个用于成膜的物体，包括基板31a，31b和掩模32a，32b至沉积有机气相沉积膜。通过在不同平面上的多个物体上同时从气相沉积源10中排出蒸气进行成膜，使成膜时间缩短，真空蒸镀装置小型化。版权所有（C）2008，JPO＆INPIT

5. 发明专利

JP2013108182A Vapor deposition apparatus 审中-公开
标题翻译：蒸气沉积装置
公开(公告)号：JP2013108182A
公开(公告)日：2013-06-06
申请号：JP2013007327
申请日：2013-01-18
申请人： Canon Inc , キヤノン株式会社
发明人： MASHITA SEIJI , TOKUNAGA YUZO , OTSUKA MANABU , YOSHIKAWA TOSHIAKI , FUKUDA NAOTO
IPC分类号： C23C14/24 , H01L51/50 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To provide a vapor deposition apparatus to be used when using a method of manufacturing an organic light emitting device which has high electron injection efficiency and can be driven at low voltage.SOLUTION: A vapor deposition apparatus includes: a housing container 23 for housing a vapor deposition material 25; and a heater (heat source 22) for changing the vapor deposition material 5 housed in the housing container 23 into a gas state. A medium 21 is provided in a position between the housing container 23 and a base material to be deposited, through which the gaseous vapor deposition material passes, wherein a shielding member for shielding heat generated by the medium 21 is provided between the medium 21 and the base material to be deposited.
摘要翻译：要解决的问题：提供一种当使用具有高电子注入效率并可在低电压下驱动的有机发光器件的制造方法时使用的气相沉积设备。解决方案：气相沉积设备包括：用于容纳气相沉积材料25的容纳容器23; 以及用于将容纳在容纳容器23中的蒸镀材料5变更为气体状态的加热器（热源22）。介质21设置在容纳容器23和待沉积的基底材料之间的位置，气相沉积材料通过该基底材料通过，其中用于屏蔽由介质21产生的热的屏蔽构件设置在介质21和要沉积的基材。版权所有（C）2013，JPO＆INPIT

6. 发明专利

JP2000077184A Exposure device and image forming device 有权
标题翻译：曝光装置和图像形成装置
公开(公告)号：JP2000077184A
公开(公告)日：2000-03-14
申请号：JP24494798
申请日：1998-08-31
申请人： Canon Inc , キヤノン株式会社
发明人： MASHITA SEIJI , UENO KAZUNORI , HASHIMOTO YUICHI , SENOO AKIHIRO , NAGASE YUKIO , YUKIMURA NOBORU
IPC分类号： B41J2/44 , B41J2/45 , B41J2/455 , G03B27/32 , H01L33/08 , H01L33/26 , H01L33/42 , H01L33/58 , H01L33/60 , H01L51/50 , H05B33/12 , H05B33/14 , H05B33/22 , H05B33/24 , H01L33/00
摘要： PROBLEM TO BE SOLVED: To provide a highly speedy and compact photo sensitive writing device having a low cost and high definition and capable of efficiently utilize the quantity of light emitted by a luminescent element.
SOLUTION: This exposure device has at least an anode layer 3 and a cathode layer 6, and a luminescent element array formed by a layer or plural layers of organic compound layers 7 sandwiched between them, on a substrate 1. In this exposure device, the luminescent element array has a translucent reflecting layer 2, a microscopic optical resonating structure formed between the translucent reflecting layer 2 and the cathode layer 6, and has a luminescence peak within the half width range of sensitivity to a wavelength of a photo sensitive body exposed by the exposure device.
COPYRIGHT: (C)2000,JPO
摘要翻译：要解决的问题：提供一种具有低成本和高清晰度并且能够有效地利用由发光元件发射的光量的高速，紧凑的光敏写入装置。解决方案：该曝光装置至少具有阳极层3和阴极层6以及由夹在它们之间的层或多层有机化合物层7形成的发光元件阵列。在该曝光装置中，发光元件阵列具有半透明反射层2，在半透明反射层2和阴极层6之间形成的微观光学谐振结构，并且具有在对通过曝光的感光体的波长的敏感度的半个宽度范围内的发光峰值曝光装置。

7. 发明专利

JP2012124128A Method for manufacturing organic el display device 审中-公开
标题翻译：制造有机EL显示装置的方法
公开(公告)号：JP2012124128A
公开(公告)日：2012-06-28
申请号：JP2010276176
申请日：2010-12-10
申请人： Canon Inc , キヤノン株式会社
发明人： MASHITA SEIJI
IPC分类号： H05B33/10 , H01L51/50
摘要： PROBLEM TO BE SOLVED: To solve such a problem that, when a sublimation material is formed by coating, an organic compound layer cannot be deposited in a consecutive vacuum, so that a manufacturing cost and a tact time is increased, in a method for manufacturing an organic EL display device, the method using a release layer comprising the sublimation material for patterning a luminous layer.SOLUTION: An organic EL display device is formed by a manufacturing method including the steps of: forming a release layer having a sublimation temperature lower than an evaporation temperature of a luminous layer on a predetermined pixel by vacuum deposition; forming the luminous layer over a substrate entirely by vacuum deposition; and heating the substrate at a temperature higher than the sublimation temperature of the release layer and lower than the evaporation temperature of the luminous layer to remove the release layer and the luminous layer formed on the predetermined pixel.
摘要翻译：解决的问题为了解决这样的问题，当通过涂布形成升华材料时，有机化合物层不能在连续的真空中沉积，从而增加制造成本和节拍时间制造有机EL显示装置的方法，使用包括用于使发光层图案化的升华材料的剥离层的方法。解决方案：通过包括以下步骤的制造方法形成有机EL显示装置：通过真空沉积形成具有比预定像素上的发光层的蒸发温度低的升华温度的剥离层; 通过真空沉积在基底上形成发光层; 在高于脱模层的升华温度的温度下加热基板，低于发光层的蒸发温度，除去形成在规定像素上的剥离层和发光层。版权所有（C）2012，JPO＆INPIT

8. 发明专利

JP2007284788A Vapor deposition source and vapor deposition apparatus 有权
标题翻译：蒸气沉积源和蒸气沉积装置
公开(公告)号：JP2007284788A
公开(公告)日：2007-11-01
申请号：JP2007043094
申请日：2007-02-23
申请人： Canon Inc , キヤノン株式会社
发明人： YOSHIKAWA TOSHIAKI , MASHITA SEIJI , FUKUDA NAOTO
IPC分类号： C23C14/24 , H01L51/50 , H05B33/10
CPC分类号： C23C14/243 , C23C14/12
摘要： PROBLEM TO BE SOLVED: To reduce the occurrence of splash in a vapor deposition source and to perform vapor deposition at a stable, high deposition speed. SOLUTION: A plurality of doughnut-shaped flat plates 2 is vertically stacked in a crucible 1, and a vapor deposition material 3 is thinly mounted on each of the doughnut-shaped flat plates 2. The vapor deposition material 3 on the doughnut-shaped flat plate 2 on each layer is heated by heaters 12 surrounding the crucible 1 to generate vapor from the vapor deposition material 3, and the vapor is made to flow through a flow space A on each layer into a vertical flow path B and discharged from an opening 10a at the top of the flow path B toward a substrate to be deposited. The conductance of the flow space A is smaller than the conductance of the flow path B. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了减少气相沉积源中飞溅的发生并以稳定的高沉积速度进行气相沉积。解决方案：将多个环形平板2垂直堆叠在坩埚1中，并且将蒸镀材料3薄薄地安装在每个环形平板2上。在圆环上的气相沉积材料3 形状的平板2由坩埚1周围的加热器12加热，以从蒸镀材料3产生蒸气，使蒸气流过各层的流动空间A成为垂直流路B而排出从流路B顶部的开口10a朝向待沉积的基板。流动空间A的电导小于流路B的电导。版权所有：（C）2008，JPO＆INPIT

9. 发明专利

JP2007188870A Method of manufacturing organic light emitting device and vapor deposition system 有权
标题翻译：制造有机发光装置和蒸发沉积系统的方法
公开(公告)号：JP2007188870A
公开(公告)日：2007-07-26
申请号：JP2006325113
申请日：2006-12-01
申请人： Canon Inc , キヤノン株式会社
发明人： MASHITA SEIJI , TOKUNAGA YUZO , OTSUKA MANABU , YOSHIKAWA TOSHIAKI , FUKUDA NAOTO
IPC分类号： H05B33/10 , C23C14/12 , C23C14/24 , H01L51/50
CPC分类号： H01L51/001 , C23C14/24 , C23C14/243 , H01L51/002 , H01L51/5092 , H01L51/56
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing an organic light emitting device which has high electron injection efficiency and can be driven at a low voltage. SOLUTION: A process to form an electron injection layer has a process to vaporize a dopant material 5 which is the raw material of a dopant in a housing container 3, a process to pass the vaporized dopant material through a medium 1 heated in between the housing container 3 and a substrate, and a process to form an organic compound as the electron injection layer. COPYRIGHT: (C)2007,JPO&INPIT

10. 发明专利

JP2005183200A Organic light-emitting device 有权
标题翻译：有机发光装置
公开(公告)号：JP2005183200A
公开(公告)日：2005-07-07
申请号：JP2003422927
申请日：2003-12-19
申请人： Canon Inc , キヤノン株式会社
发明人： MASHITA SEIJI
IPC分类号： H05B33/28 , C23C14/34 , H01L51/50 , H05B33/14
摘要： PROBLEM TO BE SOLVED: To provide an organic light-emitting device having a cathode high in light transmissivity and high in electron injection performance.
SOLUTION: The organic light-emitting device has a cathode containing a transparent conductive material as a main component and at least one kind of alkali metals or alkaline earth metals as an auxiliary component.
COPYRIGHT: (C)2005,JPO&NCIPI

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