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1. 发明专利

JP2007084925A Film forming apparatus and method of film formation 审中-公开
标题翻译：电影形成装置和电影形成方法
公开(公告)号：JP2007084925A
公开(公告)日：2007-04-05
申请号：JP2006227861
申请日：2006-08-24
申请人： Brother Ind Ltd , National Institute Of Advanced Industrial & Technology , ブラザー工業株式会社 , 独立行政法人産業技術総合研究所
发明人： YASUI MOTOHIRO , AKETO JUN
IPC分类号： C23C24/04 , B05B7/14 , B05B15/12 , B05D1/02 , B05D7/24 , H01L41/187 , H01L41/22 , H01L41/314
摘要： PROBLEM TO BE SOLVED: To provide a film forming apparatus for forming a film by an AD (aerosol deposition) method, wherein a uniform film is formed by stabilizing a flow of an aerosol. SOLUTION: The film forming apparatus 1 includes shielding plates 26 which is provided at a side of a jetting port 25 in a longitudinal direction of the jetting port 25 and covers a side of a jet flow E1 of an aerosol jetted from the jetting port 25. Accordingly, it is possible to suppress a turbulence of the jet flow E1 due to an exhaust flow F, so as to form the film uniformly. The shielding plates 26 are installed in such a manner that the flow can be shielded at a side of a jetting port 24 in a longitudinal direction at which the jet flow particularly largely flows, thus the turbulence of the jet flow E1 can be effectively suppressed. Alternatively, the shielding plate 26 is arranged in a direction of crossing the exhaust flow F which is directed toward the exhaust port 21 in a film forming chamber 20. Further alternatively, the pair of shielding plates 26 is provided such that the shielding plates 26 are opposite to each other across the jet flow E1, and the inner surface facing the jet flow E1 in the shielding plates 26 has a recessed surface 26A. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种通过AD（气溶胶沉积）方法形成膜的成膜装置，其中通过稳定气溶胶的流动形成均匀的膜。解决方案：成膜装置1包括屏蔽板26，其设置在喷射口25的沿喷射口25的纵向方向的一侧，并且覆盖从喷射口25喷射的喷雾器喷射流E1的一侧因此，可以抑制由排气流F引起的喷射流E1的紊流，从而均匀地形成膜。屏蔽板26以这样的方式安装，使得流体可以在喷射口24的沿喷射流特别大地流动的纵向方向的一侧被屏蔽，从而可以有效地抑制喷流E1的湍流。或者，屏蔽板26沿着与成膜室20中朝向排气口21的排气流F交叉的方向排列。另外，一对遮蔽板26设置成使遮蔽板26为穿过喷射流E1彼此相对，并且在屏蔽板26中面向喷射流E1的内表面具有凹入表面26A。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2005313160A Method for manufacturing film or piezoelectric film 有权
标题翻译：制造薄膜或压电薄膜的方法
公开(公告)号：JP2005313160A
公开(公告)日：2005-11-10
申请号：JP2005098899
申请日：2005-03-30
申请人： Brother Ind Ltd , National Institute Of Advanced Industrial & Technology , ブラザー工業株式会社 , 独立行政法人産業技術総合研究所
发明人： YASUI MOTOHIRO , AKETO JUN , BABA SO
IPC分类号： B05D5/12 , B05D7/24 , H01L41/18 , H01L41/187 , H01L41/314 , H01L41/39 , H01L41/24
摘要： PROBLEM TO BE SOLVED: To provide a simple method for manufacturing a film or a piezoelectric film which can improve adhesion of the film to a substrate. SOLUTION: This method for manufacturing a film comprises spraying particle-containing aerosol on a substrate to adhere the particles onto the substrate. In this method, the ratio between the Vickers hardness Hv(b) of the adhesion surface to which the particles are to be adhered in the substrate, and the Vickers hardness Hv(p) of the particles is brought to a range of 0.39≤Hv(p)/Hv(b)≤3.08. Alternatively, the ratio between the Vickers hardness Hv(b) of the adhesion surface to which the particles are to be adhered in the substrate, and the compressive breaking strength Gv(p) of the particles is brought to a range of 0.10≤äGv(p)/Hv(b)}×100≤3.08. This constitution can improve the adhesion between the particles and the substrate, and the film can be reliably formed. The present invention can be favorably applied to the formation of a piezoelectric film. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种制造薄膜或压电薄膜的简单方法，其可以改善薄膜与基底的粘合性。解决方案：这种制造薄膜的方法包括将含颗粒的气溶胶喷涂在基材上以将颗粒粘附到基材上。在该方法中，将待附着在基板上的粘合面的维氏硬度Hv（b）与颗粒的维氏硬度Hv（p）的比例设为0.39≤Hv （p）/ HV（b）≤3.08。或者，将要在基板中粘附颗粒的粘附表面的维氏硬度Hv（b）与颗粒的压缩断裂强度Gv（p）之间的比率设为0.10≤ΔGv（ p）/ HV（b）}×100≤3.08。这种结构可以改善颗粒和基材之间的粘附性，并且可以可靠地形成膜。本发明可以有利地应用于压电膜的形成。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2005286153A Manufacturing method of piezoelectric film, laminate structure of substrate and piezoelectric film, piezoelectric actuator, and manufacturing method thereof 有权
标题翻译：压电薄膜的制造方法，基板和压电薄膜的层压结构，压电致动器及其制造方法
公开(公告)号：JP2005286153A
公开(公告)日：2005-10-13
申请号：JP2004099006
申请日：2004-03-30
申请人： Brother Ind Ltd , National Institute Of Advanced Industrial & Technology , ブラザー工業株式会社 , 独立行政法人産業技術総合研究所
发明人： YASUI MOTOHIRO , AKETO JUN
IPC分类号： B41J2/16 , B41J2/14 , C23C24/04 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/314 , H01L41/43
CPC分类号： C23C24/04 , H01L41/081 , H01L41/0973 , H01L41/1876 , H01L41/314 , Y10T29/42 , Y10T29/49401
摘要： PROBLEM TO BE SOLVED: To provide a simple manufacturing method of a piezoelectric film which simultaneously satisfies various kinds of characteristics required to the piezoelectric film. SOLUTION: In an aerosol deposition method (AD method) of forming the piezoelectric film on a substrate by spraying aerosol containing particles of piezoelectric material to the substrate to stick the particles, a first piezoelectric layer is formed on the substrate (first film forming process), and a second piezoelectric layer is formed on the first piezoelectric layer by spraying the aerosol so that the collision energy of the particles with the substrate may be smaller than that in the first film forming process (second film forming process). A method like this can generate the piezoelectric film having a layer of good adhesiveness on the side of a surface opposing the substrate and a layer of good piezoelectric characteristic on outside of it, so that both of adhesiveness and a piezoelectric characteristic are realized. Since a layer with different characters can be laminated by only varying a deposit condition by the same AD method, the piezoelectric film with good characteristic is obtained without complicating a manufacturing process. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种同时满足压电膜所需的各种特性的压电膜的简单制造方法。解决方案：在通过将含有压电材料的颗粒的气溶胶喷涂到基板上以粘附颗粒的基板上形成压电膜的气溶胶沉积方法（AD方法）中，在基板上形成第一压电层（第一膜并且通过喷雾气溶胶在第一压电层上形成第二压电层，使得颗粒与衬底的碰撞能量可能小于第一成膜工艺（第二膜形成工艺）中的碰撞能。这样的方法可以产生在与基板相对的表面一侧具有良好粘合性的层和在其外侧具有良好压电特性的层的压电膜，从而实现粘合性和压电特性两者。由于通过仅通过相同的AD方法改变沉积条件可以层压具有不同字符的层，所以获得具有良好特性的压电膜而不会使制造过程复杂化。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2004149887A Method of producing layered structure 有权
公开(公告)号：JP2004149887A
公开(公告)日：2004-05-27
申请号：JP2002318472
申请日：2002-10-31
申请人： Brother Ind Ltd , National Institute Of Advanced Industrial & Technology , ブラザー工業株式会社 , 独立行政法人産業技術総合研究所
发明人： AKETO JUN , ASAI NOBUAKI , YAMADA YOSHIHARU
IPC分类号： C23C24/04
摘要： PROBLEM TO BE SOLVED: To provide a method of producing a stacked structure by which the layered structure worked through a complicated process such as a cantilever device can be produced with the reduced number of stages by an AD (Aerosol Deposition) method.
SOLUTION: An elastically transformed part 31 in a base part 3 is formed so as to mold an actuator 5. Further, the sides thereof are cut along the spraying direction of functional fine particles sprayed from a spray nozzle 74. Thus, the actuator 5 free from infiltration is formed on the elastically deformed part 31. Also, the actuator 5 subjected to patterning is formed only by placing a stencil mask 9 on a fixing part 30, and spraying the functional fine particle thereon. Thus, a cantilever device 1 can be produced more simply and with the reduced number of stages compared with the conventional method where masking is applied to the surface of an upper electrode layer 52 with an oxide film, and the once stacked electrode layer 52 or the like are subjected to etching.
COPYRIGHT: (C)2004,JPO

5. 发明专利

JP2007084924A Film forming apparatus and jetting nozzle 审中-公开
标题翻译：成膜装置和喷嘴喷嘴
公开(公告)号：JP2007084924A
公开(公告)日：2007-04-05
申请号：JP2006227860
申请日：2006-08-24
申请人： Brother Ind Ltd , National Institute Of Advanced Industrial & Technology , ブラザー工業株式会社 , 独立行政法人産業技術総合研究所
发明人： YASUI MOTOHIRO , AKETO JUN
IPC分类号： C23C24/04 , B05B1/02 , B41J2/14 , B41J2/16 , H01L41/22 , H01L41/314
摘要： PROBLEM TO BE SOLVED: To provide a film forming apparatus which performs film formation by using an AD (aerosol deposition) method, wherein a thin and uniform film can be formed.
SOLUTION: A flow velocity of an aerosol Z, which has entered into the internal passage 31 of a jetting nozzle 30, is increased while passing through a narrowed channel 34B formed by providing a block 35, and the aerosol Z collides against a tapered surface 36A provided on the downstream of the flow. At this time, among the material particles M contained in the aerosol Z, aggregated particles having a comparatively larger mass collide against the tapered portion 36A, so as to be made into fine powder. Thus, since the aggregated particles are crushed and are supplied through the jetting nozzle 30 in the form of fine particles, it is possible to form a thin and uniform film on a substrate. Further, an expanded portion 37 having a channel area wider as compared to the narrowed channel 34B is formed in the region provided with the tapered portion 36, and, in this expanded portion 37, crushed fragments of the aggregated particles generated due to the collision against the tapered potion 36A are mixed. Accordingly, it is possible to uniformize a concentration of the aerosol Z.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种通过使用AD（气溶胶沉积）方法进行成膜的成膜装置，其中可以形成薄均匀的膜。解决方案：进入喷射喷嘴30的内部通道31中的气溶胶Z的流速在通过通过设置块35形成的窄通道34B而增加，并且气溶胶Z与一个设置在流动下游的锥形表面36A。此时，在气溶胶Z所含的原料粒子M中，具有较大质量的凝集粒子与锥形部36A碰撞，成为细粉末。因此，由于聚集的颗粒被粉碎并通过喷嘴30以细颗粒的形式供给，所以可以在基板上形成薄而均匀的膜。此外，在具有锥形部36的区域中形成有与狭窄通道34B相比更大的通道面积的扩大部分37，并且在该扩张部分37中，由于碰撞而产生的聚集颗粒的碎片碎片锥形部分36A混合。因此，可以使气溶胶Z的浓度均匀化。版权所有：（C）2007，JPO＆INPIT

6. 发明专利

JP2007054734A Powder recovery device and film forming system with powder recovery device 有权
标题翻译：粉末回收装置和薄膜成型系统的粉末回收装置
公开(公告)号：JP2007054734A
公开(公告)日：2007-03-08
申请号：JP2005243135
申请日：2005-08-24
申请人： Brother Ind Ltd , National Institute Of Advanced Industrial & Technology , ブラザー工業株式会社 , 独立行政法人産業技術総合研究所
发明人： YASUI MOTOHIRO , AKETO JUN
IPC分类号： B05C19/06
摘要： PROBLEM TO BE SOLVED: To provide a powder recovery device capable of performing recovery and reuse of a material particle easily and efficiently.
SOLUTION: The film forming system is provide in which a powder recovery device 30 is connected to a system body 10, and a recovery wall portion 32 is provided in a separation tank 31, and a material particle M that is contained in an aerosol Z hits on the recovery wall portion 32 and adheres thereon, and is thereby separated from a gas, at the time when since a collision surface of the material particle M with the aerosol Z is made to be an inclined surface 33 in the recovery wall portion 32, collision energy of the material particle M on the inclined surface 33 becomes small and the material particle M adheres on the recovery wall portion 32 with weak adhesion, whereby the material particle M can be easily stripped from the recovery wall portion 32 and provided for reuse.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供能够容易且有效地进行材料粒子的回收和再利用的粉末回收装置。解决方案：提供一种成膜系统，其中粉末回收装置30连接到系统主体10，并且回收壁部分32设置在分离罐31中，并且材料颗粒M包含在气溶胶Z撞击回收壁部分32并粘附在其上，由此将材料颗粒M与气溶胶Z的碰撞表面作为回收壁中的倾斜表面33，因此与气体分离部分32中，倾斜表面33上的材料颗粒M的碰撞能量变小，并且材料颗粒M以弱的粘合力附着在回收壁部分32上，由此材料颗粒M可以容易地从回收壁部分32剥离并提供用于重用。版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2005317952A Piezoelectric actuator, ink-jet head and manufacturing method of them 审中-公开
标题翻译：压电致动器，喷墨头及其制造方法
公开(公告)号：JP2005317952A
公开(公告)日：2005-11-10
申请号：JP2005098891
申请日：2005-03-30
申请人： Brother Ind Ltd , National Institute Of Advanced Industrial & Technology , ブラザー工業株式会社 , 独立行政法人産業技術総合研究所
发明人： SUGAWARA HIROTO , KOBAYASHI KAZUO , YASUI MOTOHIRO , AKETO JUN , BABA SO
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/314 , H01L41/331
摘要： PROBLEM TO BE SOLVED: To readily form a piezoelectric material layer on a part of a substrate surface area. SOLUTION: A deposition allowable region A, that is developed to films by attaching the fine particles of the piezoelectric material in a carrier gas and a deposition inhibiting region B, that inhibits the development of films are provided by forming the pattern of a different hardness material layer 28 different from that of a substrate 26 on the substrate 26. If the carrier gas, containing the fine particles of the piezoelectric material, is sprayed onto the substrate 26 by AD method, the fine particles are attached onto the deposition allowable region A to form a film-like piezoelectric layer 27, thereby enabling easy formation of the layer 27 onto a part of the surface area of the substrate 26. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了容易地在基板表面区域的一部分上形成压电材料层。解决方案：通过将抑制膜发展的载体气体和沉积抑制区域B中的压电材料的细颗粒附着而成膜的沉积容许区域A通过形成图案与基板26上的基板26的硬度不同的不同的硬度材料层28.如果通过AD法将含有压电材料的微粒的载气喷射到基板26上，则将微粒附着到沉积允许区域A以形成膜状压电层27，从而能够容易地将层27形成到基板26的表面区域的一部分上。（C）2006年，JPO和NCIPI

8. 发明专利

JP2007186737A Film deposition system and aerosol generator 审中-公开
标题翻译：薄膜沉积系统和气溶胶发生器
公开(公告)号：JP2007186737A
公开(公告)日：2007-07-26
申请号：JP2006004065
申请日：2006-01-11
申请人： Brother Ind Ltd , National Institute Of Advanced Industrial & Technology , ブラザー工業株式会社 , 独立行政法人産業技術総合研究所
发明人： YASUI MOTOHIRO , AKETO JUN
IPC分类号： C23C24/04 , B01J19/00
摘要： PROBLEM TO BE SOLVED: To provide a film deposition system capable of stably generating an aerosol, and to provide an aerosol generator.
SOLUTION: The aerosol generator 10 in the film deposition system 1 is provided with a stirring rod 15 moving as its lower end part is buried into a deposition layer 14 of material grains stored in an aerosol chamber 11. By this constitution, the deposition layer 14 of the material grains is stirred in accordance with the movement of the stirring rod 15, and the grains are wound up. Further, since a blow-off port 12A in an introduction tube 12 opens toward the stirring rod 15, carrier gas is blown against the stirring rod 15. Owing to them, a strong vortex is generated at the downstream side of the stirring rod 15 in the flow of the carrier gas. The vortex involves the material grains, thus an aerosol is stably generated without causing failures such as flocculation and solidification.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供能够稳定地产生气溶胶并提供气溶胶发生器的成膜系统。解决方案：成膜系统1中的气溶胶发生器10设置有搅拌杆15，其搅拌杆15的下端部分被埋入存储在气溶胶室11中的原料颗粒的沉积层14中。由此，根据搅拌棒15的移动搅拌材料颗粒的沉积层14，并且将颗粒卷起。此外，由于导入管12内的吹出口12A朝向搅拌棒15开口，所以载气被吹向搅拌棒15.由于它们在搅拌棒15的下游侧产生强烈的涡流，载气的流动。涡流涉及材料颗粒，因此气溶胶稳定地产生而不引起絮凝和固化等故障。版权所有（C）2007，JPO＆INPIT

9. 发明专利

JP2007088449A Composite material film, piezoelectric actuator, and process for manufacturing inkjet head, and piezoelectric actuator 审中-公开
标题翻译：复合材料膜，压电致动器及制造喷头的方法和压电致动器
公开(公告)号：JP2007088449A
公开(公告)日：2007-04-05
申请号：JP2006227864
申请日：2006-08-24
申请人： Brother Ind Ltd , National Institute Of Advanced Industrial & Technology , ブラザー工業株式会社 , 独立行政法人産業技術総合研究所
发明人： YASUI MOTOHIRO , AKETO JUN
IPC分类号： H01L41/09 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/314
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric actuator in which adhesiveness can be improved between overlapping layers, and to provide a process for manufacturing an inkjet head.
SOLUTION: A lower electrode 3 is formed by spraying aerosol Z containing conductive material particles M1 and ceramics particles M2 toward a diaphragm 2 and sticking these particles thereto. When ceramics particles M2 having a high hardness are admixed to the conductive material particles M1 and sprayed, the ceramics particles M2 adhere to the surface of the diaphragm 2 while eating into the diaphragm by impact of collision thus enhancing adhesion between the diaphragm 2 and lower electrode 3. Furthermore, adhesiveness of the lower electrode 3 and a piezoelectric layer 4 is improved because the lower electrode 3 contains oxide ceramics of the same properties as those of the oxide ceramics composing the piezoelectric layer 4, thereby retarding stripping due to difference of thermal expansion coefficient.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够在重叠层之间提高粘合性的压电致动器，并提供一种用于制造喷墨头的工艺。解决方案：通过将含有导电材料颗粒M1和陶瓷颗粒M2的气溶胶Z喷射到隔膜2并将这些颗粒粘附到其上而形成下电极3。当具有高硬度的陶瓷颗粒M2与导电材料颗粒M1混合并喷涂时，陶瓷颗粒M2通过碰撞碰撞而进入隔膜2的表面，从而增强隔膜2和下电极之间的粘合力此外，由于下部电极3含有与构成压电体层4的氧化物陶瓷相同性能的氧化物陶瓷，所以能够提高下部电极3与压电体层4的密合性，能够延缓由于热膨胀率的差异引起的剥离系数。版权所有（C）2007，JPO＆INPIT

10. 发明专利

JP2007088448A Film and fabrication process of inkjet head 审中-公开
标题翻译：喷墨头的胶片和制造工艺
公开(公告)号：JP2007088448A
公开(公告)日：2007-04-05
申请号：JP2006227863
申请日：2006-08-24
申请人： Brother Ind Ltd , National Institute Of Advanced Industrial & Technology , ブラザー工業株式会社 , 独立行政法人産業技術総合研究所
发明人： YASUI MOTOHIRO , AKETO JUN
IPC分类号： H01L41/09 , B41J2/14 , B41J2/16 , C04B35/10 , C04B35/49 , C04B35/491 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/314 , H01L41/39 , H01L41/43
摘要： PROBLEM TO BE SOLVED: To provide a process for producing a film while avoiding the occurrence of a defect in the film or breakage of the film during annealing, and to provide ceramic particles suitable for producing such a film. SOLUTION: After material particles M are prepared and before depositing a film, the material particles M are subjected to heat treatment. Consequently, moisture and additives causing gasification in the subsequent anneal process are evaporated beforehand and removed and thereby defect and breakage of a piezoelectric film 3 can be avoided in the anneal process. Consequently, an actuator plate 1 for an inkjet head 10 having good piezoelectric characteristics can be provided. COPYRIGHT: (C)2007,JPO&INPIT

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