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    • 3. 发明专利
    • Solder bonding method
    • 焊接方法
    • JP2007048787A
    • 2007-02-22
    • JP2005228840
    • 2005-08-05
    • Fuji Electric Device Technology Co Ltd富士電機デバイステクノロジー株式会社
    • MAKITA KAZUYUKIICHINOSE MASAKIWATAJIMA TOSHIHITOSAOTOME MASANORIYAMASHITA MITSUO
    • H01L21/02B23K1/00B23K1/008B23K31/02B23K35/14B23K35/26B23K101/40C22C13/00
    • PROBLEM TO BE SOLVED: To perform solder bonding having solder heat resistance which is equal to a conventional case using a solder material comprising lead or beyond it by using a lead-free solder material in a thin sheet shape.
      SOLUTION: Ingot obtained by rolling an alloy comprising tin, 10 to 20 weight% of silver, and 3 to 5 weight% or less of cooper as main components and comprising no lead is rolled and is made into the sheet shape. A wafer surface is pressurized with pressure of 1 to 10 MPa from a vertical direction, in a state where the solder material in the sheet shape and a wafer are alternately laminated. The solder material is melted at a temperature from a temperature higher than a solidus line temperature of the solder material by 30°C to a temperature lower than a liquidus line temperature by 30°C in vacuum atmosphere. A low melting point component in the melted solder material is pushed outside from the bonding part of the wafers.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:通过使用薄片形状的无铅焊料,进行与使用包含铅或超过铅的焊料材料的常规情况相同的焊料耐热性的焊料接合。 解决方案:轧制含有锡,10〜20重量%的银和3〜5重量%以下的作为主要成分并且不包含铅的铜的合金的锭被轧制并制成片状。 在片状形状的焊料材料和晶片交替层叠的状态下,从垂直方向以1〜10MPa的压力对晶片表面进行加压。 在真空气氛中,焊料材料在高于焊料材料的固相线温度30℃的温度下熔融至低于液相线温度30℃的温度。 熔融的焊料中的低熔点成分被从晶片的接合部分推出。 版权所有(C)2007,JPO&INPIT