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    • 1. 发明专利
    • Piezoelectric/electrostrictive actuator and its manufacturing method
    • 压电/电致动器及其制造方法
    • JP2003069106A
    • 2003-03-07
    • JP2001256300
    • 2001-08-27
    • Asahi Glass Co Ltd旭硝子株式会社
    • NEGISHI SUKEYOSHIWATANABE KAZUNARIAOKI YUMIKOIRISAWA NAOSHIMANABE TSUNEO
    • B41J2/16B41J2/14H01L41/09H01L41/187H01L41/22H01L41/314H01L41/337H02N2/00
    • PROBLEM TO BE SOLVED: To provide a piezoelectric/electrostrictive actuator using a piezoelectric/electrostrictive film that is excellent in accuracy of dimension and accuracy of worked shape. SOLUTION: This piezoelectric/electrostrictive actuator 10 is manufactured by forming a lower electrode 20 on the upper surface of a substrate 50 (B) and the piezoelectric/electrostrictive film 30 on the upper surface of the substrate 50 by applying or transferring piezoelectric/electrostrictive paste to the whole upper surface of the substrate 50 so as to cover the electrode 20 (C). Then a photoresist 100 is adhered to the upper surface of the film 30 (D) and exposed to light by photolithography by masking the photoresist 100 with a light shielding mask having a prescribed pattern. After the photoresist 100 is exposed, the unnecessary portion of the photoresist 100 is removed (E) and the unnecessary portion of the piezoelectric/electrostrictive film 30 is removed by sand blasting by using an abrasive (F). Finally, the remaining photoresist is removed (G) and an upper electrode 40 is formed on the remaining piezoelectric/ electrostrictive film 30 (H).
    • 要解决的问题:提供一种压电/电致伸缩膜的压电/电致伸缩致动器,该压电/电致伸缩膜具有优异的加工形状尺寸和精度。 解决方案:该压电/电致伸缩致动器10通过在基板50(B)的上表面上形成下电极20和在基板50的上表面上的压电/电致伸缩膜30,通过施加或转移压电/电致伸缩膏 到基板50的整个上表面以覆盖电极20(C)。 然后,通过用具有规定图案的遮光掩模掩模光致抗蚀剂100,将光致抗蚀剂100粘附到膜30(D)的上表面并通过光刻曝光。 在曝光光致抗蚀剂100之后,除去光致抗蚀剂100的不需要部分(E),通过使用研磨剂(F)通过喷砂除去压电/电致伸缩膜30的不需要部分。 最后,除去剩余的光致抗蚀剂(G),在剩余的压电/电致伸缩膜30(H)上形成上电极40。