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1. 发明专利

JP2013161485A System, method and computer program product for cad-based registration 有权
标题翻译：用于基于CAD的注册的系统，方法和计算机程序产品
公开(公告)号：JP2013161485A
公开(公告)日：2013-08-19
申请号：JP2013036386
申请日：2013-02-07
申请人： Applied Materials Israel Ltd , アプライドマテリアルズイスラエルリミテッド
发明人： ZVI GOREN , NIR BEN-DAVID
IPC分类号： G06T1/00 , G01N21/88 , G01N21/956
CPC分类号： G06T7/0008 , G01B11/14 , G01N21/9501 , G01N2201/10 , G01N2201/125 , G01N2201/127 , G06T7/32 , G06T2207/30148
摘要： PROBLEM TO BE SOLVED: To provide a system, method and computer program product for CAD-based registration.SOLUTION: A system for location-based wafer analysis comprises (i) a first input interface, (ii) a second input interface, (iii) a correlator, and (iv) a processor, and is configured to generate inspection results for the inspected wafer, with the help of at least one frame run-time displacement.
摘要翻译：要解决的问题：提供一种用于基于CAD的注册的系统，方法和计算机程序产品。解决方案：用于基于位置的晶片分析的系统包括（i）第一输入接口，（ii）第二输入接口，（iii ）相关器，以及（iv）处理器，并且被配置为通过至少一个帧运行时位移来产生被检查晶片的检查结果。

2. 发明专利

JP2013162134A System, method, and computer program product for cad-based alignment 有权
标题翻译：用于基于CAD的对齐的系统，方法和计算机程序产品
公开(公告)号：JP2013162134A
公开(公告)日：2013-08-19
申请号：JP2013036387
申请日：2013-02-07
申请人： Applied Materials Israel Ltd , アプライドマテリアルズイスラエルリミテッド
发明人： ZVI GOREN , NIR BEN-DAVID
IPC分类号： H01L21/66 , G06F17/50
CPC分类号： G01N21/9501 , G01N2021/95615
摘要： PROBLEM TO BE SOLVED: To provide a system, method, and computer program product for cad-based alignment.SOLUTION: There is provided a system for generating calibration information usable for wafer inspection that includes: (I) a displacement analysis module configured to (a) calculate, on the basis of a correlation of (i) an image associated with the respective target that was obtained during a scanning of the wafer, and (ii) design data corresponding to the image, a displacement for each target out of multiple targets selected in multiple scanned frames that are included in a scanned area of the wafer, and (b) determine a displacement for each of the multiple scanned frames on the basis of the displacements calculated for multiple targets in the respective scanned frame; and (II) a subsequent processing module configured to generate calibration information including the displacements determined for the multiple scanned frames, and a target database that includes a target image and location information of each target of a group of database targets.
摘要翻译：要解决的问题：提供一种用于基于cad的对准的系统，方法和计算机程序产品。解决方案：提供一种用于生成可用于晶片检查的校准信息的系统，其包括：（I）位移分析模块，其被配置为 a）基于（i）与在晶片扫描期间获得的相应目标相关联的图像和（ii）与图像相对应的设计数据的相关性，计算出多个目标中的每个目标的位移基于对各扫描帧中的多个目标计算的位移，确定多个扫描帧中的每一个的位移;以及（b）以及（II）后续处理模块，被配置为生成包括针对多个扫描帧确定的位移的校准信息，以及包括目标图像的目标数据库和一组数据库目标的每个目标的位置信息。

3. 发明专利

JP2013162133A Method of defect classification based on design and system for the same 有权
标题翻译：基于设计和系统的缺陷分类方法
公开(公告)号：JP2013162133A
公开(公告)日：2013-08-19
申请号：JP2013032553
申请日：2013-02-04
申请人： Applied Materials Israel Ltd , アプライドマテリアルズイスラエルリミテッド
发明人： MARK GESHEL , ZVI GOREN , EFRAT ROSENMAN
IPC分类号： H01L21/66 , G06F17/50
CPC分类号： Y02P90/02
摘要： PROBLEM TO BE SOLVED: To provide an inspection system for classifying defects detected on a generation layer of a sample, a classification unit which can operate with the inspection system, and a computer execution method for classifying defects.SOLUTION: A classification method includes the steps of: acquiring input data relevant to detected defects; processing the input data by using determination algorithm associated with a generation layer to specify two or more classification operations and an order of them; and screening the processed defects by advance definition bins. Each bin is associated with at least one classification operation, in the at least one classification operation, at least a part of the processed defects is screened to one or more classification bins to bring the finally classified defects; and in each classification operation, at least a part of the processed defects is screened so as to be processed by one or more subsequent classification operations except the last classification operation.
摘要翻译：要解决的问题：提供一种用于分类在样本的生成层上检测到的缺陷的检查系统，能够与检查系统一起操作的分类单元，以及用于对缺陷进行分类的计算机执行方法。解决方案：分类方法包括步骤获取与检测到的缺陷相关的输入数据; 通过使用与生成层相关联的确定算法来处理输入数据以指定两个或更多个分类操作及其顺序; 并通过提前定义的箱子筛选加工的缺陷。每个箱体与至少一个分类操作相关联，在该至少一个分类操作中，至少一部分经处理的缺陷被筛选到一个或多个分类箱以产生最终分类的缺陷; 并且在每个分类操作中，对所处理的缺陷的至少一部分进行筛选，以便通过除最后的分类操作之外的一个或多个后续分类操作进行处理。

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