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    • 1. 发明专利
    • Indoor gas exchange method and apparatus
    • 室内气体交换方法和装置
    • JP2006042968A
    • 2006-02-16
    • JP2004225316
    • 2004-08-02
    • Air Water Incエア・ウォーター株式会社
    • TSUCHIDA YASUHIROYASUDA TAKAHIKO
    • A62B11/00B01D53/22B65B31/00
    • PROBLEM TO BE SOLVED: To provide an indoor gas exchange method and apparatus preventing oxygen deficiency in a room.
      SOLUTION: This indoor gas exchange method is so formed as to prepare a gas packaging machine 1 using nitrogen gas and a nitrogen gas supply device 3 which extracts nitrogen gas having nitrogen as a main component from raw material air, supplies the nitrogen gas to the gas packaging machine 1 and discharges exhaust gas including oxygen; and introduce the exhaust gas from the nitrogen gas supply device 3 to a nitrogen filling chamber 5 where the gas packaging machine 1 is installed and nitrogen gas is emitted from the gas packaging machine 1.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种室内气体交换方法和装置,用于防止室内缺氧。 解决方案:这种室内气体交换方法形成为制备使用氮气的气体包装机1和从原料空气中提取氮气作为主要成分的氮气的氮气供给装置3,将氮气 送到气体包装机1并排出包括氧的废气; 并且将来自氮气供给装置3的废气引入到安装有气体包装机1的氮气充填室5,从气体包装机1排出氮气。(C)2006,JPO&NCIPI
    • 2. 发明专利
    • Radial type adsorption container
    • 径向型吸附容器
    • JP2013169491A
    • 2013-09-02
    • JP2012033493
    • 2012-02-20
    • Air Water Incエア・ウォーター株式会社
    • TANAKA MASAKOYASUDA TAKAHIKO
    • B01D53/04C01B13/02
    • C01B13/0259B01D53/0431B01D53/047B01D2256/12B01D2257/102
    • PROBLEM TO BE SOLVED: To provide a radial type adsorption container capable of improving separation performance, reducing power consumption and achieving easy production and maintenance by suppressing gas drift and reducing pressure loss by a simple structure.SOLUTION: A radial type adsorption container includes a material gas passage 2 annularly arranged on an inner peripheral part of a cylindrical container 1, a product gas passage 3 arranged on a center part of the cylindrical container 1 and an adsorbent layer 4 formed between the material gas passage 2 and the product gas passage 3. An inlet 5 for introducing material gas into the cylindrical container 1 is connected to the material gas passage 2 on the one-end side of the cylindrical container 1 in an axial direction, an exhaust port 6 for exhausting product gas from the cylindrical container 1 is connected to the product gas passage 3 on the one-end side of the cylindrical container 1, and the ratio of the passage cross section of the material gas passage 2 to the passage cross section of the product gas passage 3 is set to 1.2 to 3.3. Consequently drift can be effectively suppressed without using a complicated structure such as a taper-shaped or conical structure, and the uniformity of gas flow can be enhanced.
    • 要解决的问题:提供一种能够通过简单的结构抑制气体漂移和减少压力损失来提高分离性能,降低功耗并实现容易的生产和维护的径向型吸附容器。解决方案:径向型吸附容器包括材料 气体通道2环形地布置在圆筒形容器1的内周部分上,产品气体通道3设置在圆筒形容器1的中心部分,吸附剂层4形成在材料气体通道2和产物气体通道3之间。 用于将材料气体引入圆筒形容器1的入口5在圆筒形容器1的一端侧的材料气体通道2沿轴向连接,用于从圆筒形容器1排出产物气体的排气口6 连接到圆筒形容器1的一端侧的产品气体通道3和通道横截面的比率 的物质气体通道2相对于产品气体通道3的通道横截面设置为1.2至3.3。 因此,可以在不使用诸如锥形或锥形结构的复杂结构的情况下有效地抑制漂移,并且可以提高气流的均匀性。
    • 4. 发明专利
    • Method and device for removing nitrogen in gas essentially composed of methane
    • 用于在甲烷组成的气体中去除氮气的方法和装置
    • JP2012144628A
    • 2012-08-02
    • JP2011003511
    • 2011-01-12
    • Air Water Incエア・ウォーター株式会社
    • OKUMURA SHINYAYASUDA TAKAHIKO
    • C10L3/10B01D53/04
    • PROBLEM TO BE SOLVED: To provide a method for removing nitrogen in gas essentially composed of methane which removes nitrogen in a gas essentially composed of methane, and achieves the efficiency improvement of reliquefaction.SOLUTION: The method for removing nitrogen from gas essentially composed of methane is achieved by implementing: an adsorption stage of preparing three or more adsorption columns filled with adsorbent adsorbing and separating nitrogen and making the adsorbent adsorb nitrogen in a state where pressurizing is performed to prescribed adsorption pressure; a reproduction stage of desorbing nitrogen from the adsorbent in a state where pressure is more reduced than the above adsorption pressure so as to be reproduced; and a pressure recovery stage of reverting the adsorption column in the pressure-reduced state to the adsorption pressure in parallel by the respective adsorption columns. In the meantime, in the respective adsorption columns, the respective stages are implemented by being changed-over in succession. A recovery operation of introducing the gas discharged from the adsorption column in the pressure reduction step upon transfer from the adsorption stage to the reproduction stage, into the adsorption column in the pressure reverting stage, is implemented. In the recovery operation, a first step of recovering the gas of relatively high pressure after the adsorption and a second step of recovering the subsequent relatively low pressure gas thereafter are implemented.
    • 要解决的问题:提供一种除去主要由甲烷组成的气体中的氮气的方法,其除去基本上由甲烷组成的气体中的氮气,并且实现再液化的效率提高。 解决方案:通过实施以下方式实现了从基本上由甲烷组成的气体中除氮的方法:制备三个或更多个填充吸附和分离氮气的吸附塔的吸附阶段,并使吸附剂在加压状态下吸附氮气 执行规定的吸附压力; 在压力比上述吸附压力更低的状态下从吸附剂中脱氮以便再现的再生阶段; 以及通过各吸附塔平行地将减压状态的吸附塔还原为吸附压力的压力恢复阶段。 同时,在相应的吸附塔中,通过连续地转换来实现各个阶段。 实现了在从吸附阶段到再生阶段转移到压力还原阶段的吸附塔中时,将从吸附塔排出的气体引入减压步骤的回收操作。 在回收操作中,实现了在吸附之后回收相对较高压力的气体的第一步骤,以及随后回收随后的相对低压气体的第二步骤。 版权所有(C)2012,JPO&INPIT
    • 5. 发明专利
    • Method for recovering ammonia, method for reutilizing ammonia, ammonia recovery system and ammonia reutilization system
    • 用于恢复氨的方法,用于再生氨的方法,氨基酸回收系统和氨基酸回收系统
    • JP2008013406A
    • 2008-01-24
    • JP2006186821
    • 2006-07-06
    • Air Water Incエア・ウォーター株式会社
    • YASUDA TAKAHIKOSUENAGA JUNYAMATSUBAYASHI RYOSUKEOKU HIDEHIKOOMORI NOBUNORI
    • C01C1/12B01D3/14B01D53/58H01L21/205
    • Y02A50/2346
    • PROBLEM TO BE SOLVED: To provide a method for recovering ammonia where high purity ammonia is recovered from an exhaust gas exhausted from nitride semiconductor fabrication equipment in such a manner that the concentration of impurities is reduced at most to ≤50 ppb, to provide a method for reutilizing ammonia, to provide an ammonia recovery system, and to provide an ammonia reutilization system. SOLUTION: The method for recovering ammonia is provided with: a stage where a reaction product of ammonia and organic metals, and organic metals are removed from an ammonia-containing exhaust gas exhausted from nitride semiconductor fabrication equipment 11, so as to obtain a gaseous mixture; a stage where crude gaseous ammonia is separated from the gaseous mixture; a stage where the crude gaseous ammonia is liquified, so as to obtain liquified crude ammonia; and a stage where the liquified crude ammonia is distilled, thus impurities are removed from the liquified crude ammonia, so as to obtain high purity ammonia. COPYRIGHT: (C)2008,JPO&INPIT
    • 待解决的问题:提供一种从氮化物半导体制造装置排出的废气中回收高纯度氨的方法,其中杂质的浓度最多降低至≤50ppb,以至 提供一种再利用氨的方法,提供氨回收系统,并提供一种氨回收系统。 解决方案:回收氨的方法具有:从氮化物半导体制造设备11排出的含氨废气中除去氨和有机金属的反应产物和有机金属的阶段,以获得 气体混合物; 从气态混合物中分离粗气态氨的阶段; 使粗气态氨液化的阶段,以获得液化的粗氨; 将液化的粗氨蒸馏的阶段,从液化的粗氨中除去杂质,得到高纯度的氨。 版权所有(C)2008,JPO&INPIT
    • 6. 发明专利
    • Method for purifying perfluorocarbon gas and apparatus therefor
    • 净化全氟碳气及其设备的方法
    • JP2009062295A
    • 2009-03-26
    • JP2007229746
    • 2007-09-05
    • Air Water Incエア・ウォーター株式会社
    • EDASAWA KATSUTOYASUDA TAKAHIKOKOTANI YOSHINOBU
    • C07C17/389B01D53/04B01D53/68C07C19/08
    • Y02C20/30
    • PROBLEM TO BE SOLVED: To provide a method for purifying a perfluorocarbon gas, by which the perfluorocarbon gas can be recycled after used in a semiconductor or liquid crystal production process. SOLUTION: This method for purifying the perfluorocarbon gas is characterized by adsorbing the nitrogen gas as the impurity using zeolite 4A from a gas to be treated containing the nitrogen gas as the impurity for the perfluorocarbon gas, to purify the perfluorocarbon gas. The nitrogen as the impurity can effectively be adsorbed off, and the perfluorocarbon gas having high purity of ≥99.999% can be separated and purified. Thereby, the perfluorocarbon gas exhausted from, for example, a semiconductor or liquid crystal production process can highly be purified and effectively recycled. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种全氟化碳气体的纯化方法,通过该方法可以在半导体或液晶生产过程中使用全氟烃气体之后再循环。 解决方案:这种纯化全氟化碳气体的方法的特征在于,使用沸石4A从含有作为全氟化碳气体的杂质的氮气的待处理气体吸附氮气作为杂质,以净化全氟化碳气体。 作为杂质的氮气可以被有效地吸附,可以分离和纯化纯度高达99.999%的全氟化碳气体。 由此,从半导体或液晶制造工序排出的全氟碳化合物气体能够被高效地纯化,有效地再循环。 版权所有(C)2009,JPO&INPIT
    • 7. 发明专利
    • Pressure swing adsorption type gas separating method and apparatus used for it
    • 压力释放吸附式气体分离方法和装置
    • JP2006043589A
    • 2006-02-16
    • JP2004228284
    • 2004-08-04
    • Air Water Incエア・ウォーター株式会社
    • YOSHINO AKIRAYASUDA TAKAHIKOMIYAMOTO ATSUSHI
    • B01D53/04
    • PROBLEM TO BE SOLVED: To provide a pressure swing adsorption type gas separating method which can aim at a low consumption motorization and miniaturization of a vacuum blower. SOLUTION: In an adsorption separating process, an adsorption column 4, 5 holding an adsorbent 6, 7 adsorbing selectively a specific gas is provided, in a decompression-regeneration process, an evacuation inside the adsorption column 4, 5 is carried out from a lower part of the adsorption column 4, 5 by the vacuum blower, and at the same time, the evacuation from an upper side portion compared to the lower part of the adsorption column 4, 5 is also carried out to desorb the specific gas adsorbed by the adsorbent 6, 7 in the adsorption separating process. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种可以针对低功率电动化和真空鼓风机的小型化的变压吸附式气体分离方法。 解吸方法:在吸附分离过程中,在减压再生过程中,设置吸附有选择性地吸附特定气体的吸附剂6,7的吸附柱4,5,在吸附塔4,5内进行抽真空 通过真空鼓风机从吸附塔4,5的下部排出,同时,与吸附塔4,5的下部相比,从上侧排出的排气也被进行以解吸特定的气体 在吸附分离过程中被吸附剂6,7吸附。 版权所有(C)2006,JPO&NCIPI
    • 8. 发明专利
    • Gas separation method and apparatus used for it
    • 气体分离方法和用于其的装置
    • JP2006272325A
    • 2006-10-12
    • JP2006056252
    • 2006-03-02
    • Air Water Incエア・ウォーター株式会社
    • MIYAMOTO ATSUSHIIKEDA MASARUYASUDA TAKAHIKO
    • B01D53/04
    • PROBLEM TO BE SOLVED: To provide a gas separation method that can reduce electricity consumption and enhance the effective adsorption capacity of an adsorbent by enhancing its adsorption separation efficiency and the efficiency of its regeneration under a reduced pressure. SOLUTION: The gas separation method is based on a pressure-vacuum swing adsorption method and comprises an adsorption separation step and a regeneration step under a reduced pressure, wherein two blowers 1 and 2 each functioning as a raw material gas feeding blower as well as a blower for regenerating the adsorbent under a reduced pressure are used in such a manner that the blowers 1 and 2 are run in parallel if their compression ratios become lower than a predetermined value or are run in series if their compression ratios become higher than the above predetermined value. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种气体分离方法,其可以通过提高其吸附分离效率和减压下的再生效率来降低耗电量并提高吸附剂的有效吸附能力。 气体分离方法是基于压力 - 真空变压吸附方法,并且包括吸附分离步骤和减压下的再生步骤,其中两个鼓风机1和2各自作为原料气体供给鼓风机起作用 以及如果压缩比低于预定值,鼓风机1和2平行地运行,则减压下再生吸附剂的鼓风机,如果它们的压缩比变得高于 上述预定值。 版权所有(C)2007,JPO&INPIT