专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JP2007315763A Electromagnetic flow measuring apparatus 有权
标题翻译：电磁流量测量装置
公开(公告)号：JP2007315763A
公开(公告)日：2007-12-06
申请号：JP2006142417
申请日：2006-05-23
申请人： Aichi Tokei Denki Co Ltd , 愛知時計電機株式会社
发明人： AMADA YOSHITAKA , MORI KAZUHISA , YASUI FUMITOSHI
IPC分类号： G01F1/58
摘要： PROBLEM TO BE SOLVED: To provide an electromagnetic flow measuring apparatus capable of highly accurately measuring a very small quantity of flow of a fluid to be measured and being efficiently mass-produced at low costs.
SOLUTION: The electromagnetic flow measuring apparatus is provided with an exciting device 30 including an exciting coil 32 for generating a magnetic field to a fluid to be measured flowing through a channel; a sensing part 10 comprising a pair of detection electrodes 16 and 18 arranged in contact with the fluid to be measured in a channel; and a measurement processing circuit for computing the quantity of flow of the fluid to be measured on the basis of detection signals output from the detection electrodes of the sensing part 10. The sensing part 10 is provided with a channel chip 11 in which a fine channel 11a is formed inside. The channel chip 11 is formed by overlaying a silicon substrate 12 and a glass substrate 13 on each other, and the detection electrodes 16 and 18 made of an electrically conductive material are formed in inner walls of the fine channel 11a by deposition.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种电磁流量测量装置，其能够以低成本高精度地测量待测流体的流量非常小的量并有效地批量生产。解决方案：电磁流量测量装置设置有激励装置30，激励装置30包括用于向流过通道的待测流体产生磁场的励磁线圈32; 感测部分10，包括在通道中与待测量的流体接触地布置的一对检测电极16和18; 以及测量处理电路，用于根据从检测部分10的检测电极输出的检测信号计算待测流体的流量。感测部分10设置有通道芯片11，其中精细通道 11a形成在内部。沟道芯片11通过将硅衬底12和玻璃衬底13彼此叠置而形成，并且由导电材料制成的检测电极16和18通过沉积形成在细沟道11a的内壁中。版权所有（C）2008，JPO＆INPIT

IPRDB

热门服务

关于我们

友情链接

联系方式