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    • 2. 发明专利
    • PLATE THICKNESS MEASUREMENT METHOD FOR PLATE TRANSPARENT BODY
    • JPH06213627A
    • 1994-08-05
    • JP26106593
    • 1993-10-19
    • ASAHI GLASS CO LTD
    • YAMAUCHI HIDEOTANI HIDETOSANO YOSHIHIKO
    • G01B11/06
    • PURPOSE:To measure a plate thickness precisely even when the position of transparent plate is displaced or it is inclined by correcting an apparent plate thickness of the transparent plate to be measured by a correction value found by using the transparent plate whose plate thickness is previously known. CONSTITUTION:In the first place, the transparent plate 1, whose plate thickness is previously known, is set in the predetermined position, and a reflecting mirror 3 is rotated so as to scan a light beam from a light source 2. An apparent plate thickness is found by an operation device 7 on the basis of a time leg between the arrival of a light beam reflected on the front face of the transparent plate 1 and the arrival of a light beam reflected on the back face of the transparent plate 1 in the first light receiving device 6, and a difference between the apparent plate thickness and an actual plate thickness, in other words, a correction value is found. In the second place, the time lag between a light beam reflected on the front face of the transparent plate to be measured 1 and a light beam reflected on the back face of that is found by the operation device 7 in the light receiving device 6, and an apparent plate thickness is found. Then, arrival times of light beams to the light receiving device 6 and to the second light receiving device 10 are found. And consequently, the apparent plate thickness is corrected by finding the previously stored correction value on the basis of these two times by the operation device 7, so that plate thickness without any error is found.
    • 4. 发明专利
    • DETECTION OF SURFACE DEFECT
    • JPH03115844A
    • 1991-05-16
    • JP25213989
    • 1989-09-29
    • ASAHI GLASS CO LTD
    • YAMAUCHI HIDEO
    • G01B11/30G01N21/88G01N21/89G01N21/892G01N21/958
    • PURPOSE:To discriminate between the flaw and inherent defect on the surface of an object to be inspected in a comparatively easy manner by detecting a part of the mirror surface reflected beam from the surface of the object to be inspected by a detector along with the scattering beam component due to the defect. CONSTITUTION:The laser beam 2 emitted from a laser beam source 1 irradiates the surface 5 of an object to be inspected by a mirror 3 and a condensing lens 4. A visual field limiting element 11 excludes a part of the mirror surface reflected beam 6 from the surface 5 of the object to be inspected and the remaining mirror surface reflected beam 7 is detected by a detector 10 along with the scattering beam 9 due to the defect 8 present on the surface 5 of the object to be inspected. The position of the visual field limiting element 11 is controlled so that 20 - 80% of the quantity of the mirror surface reflected beam from the surface 5 of the object to be inspected is detected by the detector 10. By this constitution, the flaw and protruding defect 8 on the surface 5 of the object to be inspected can be discriminated in a relatively easy manner without applying fast operational processing to the output waveform obtained by the detector 10.