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1. 发明专利

JP2001293576A JOINING ELECTRODE AND RESISTANT MEMBER FOR DEVICE USING HIGH ENERGY DENSITY 失效
公开(公告)号：JP2001293576A
公开(公告)日：2001-10-23
申请号：JP2000051670
申请日：2000-02-28
申请人： ALLIED MATERIAL CORP , JAPAN ATOMIC ENERGY RES INST
发明人： TAKAOKA SHIGEHIKO , AKIBA MASATO , NAKAMURA KAZUYUKI , SATO KAZUYOSHI
IPC分类号： H05H1/26 , B23K9/24 , B23P11/02 , H01J35/08
摘要： PROBLEM TO BE SOLVED: To provide a joining member having an excellent adhesion in which a defect harmful to the heat conductivity is eliminated and a practically sufficient joining strength is provided at the joined zone where such different kind of material as W and Cu or Ni whose heat expansion coefficients are largely different are joined. SOLUTION: The joining electrode or a resistant member for using a high energy density is provided with a joining body 1 where a tungsten member 3 is directly press fitted into a base material 2 whose thermal expansion coefficient is larger than that of tungsten without an intermediate layer.

2. 发明专利

JPH08106871A ION SOURCE ELECTRODE STRUCTURE 失效
公开(公告)号：JPH08106871A
公开(公告)日：1996-04-23
申请号：JP23988594
申请日：1994-10-04
申请人： JAPAN ATOMIC ENERGY RES INST
发明人： OKUMURA YOSHIKAZU , NAKAMURA KAZUYUKI
IPC分类号： H01J27/02 , H01J37/08
摘要： PURPOSE: To provide an ion beam of large current by providing an ion source electrode having an extremely small electrode-to-electrode space and easy to manufacture. CONSTITUTION: A number of ion drawing slit holes (11) are provided on a metal plate (10) by photoetching, and a spring mechanism having corrugated slit holes (12) for absorbing thermal expansion is arranged on the metal plate (10) having the slit holes (11).

3. 发明专利

JPH02248496A LUBRICATING GREASE 失效
公开(公告)号：JPH02248496A
公开(公告)日：1990-10-04
申请号：JP7147389
申请日：1989-03-23
申请人： JAPAN ATOMIC ENERGY RES INST , MATSUMURA SEKIYU KENKYUSHO
发明人： OBARA KENJIRO , NAKAMURA KAZUYUKI , MURAKAMI YOSHIO , SODA TAKAO , KANIE TOSHIHIRO , AKATA TAMIO
IPC分类号： C10M169/02 , C10M169/00 , C10N10/12 , C10N30/00 , C10N30/08 , C10N40/02 , C10N40/04 , C10N50/10
摘要： PURPOSE:To obtain the title grease improved in lubricity under high-temperature and high-vacuum conditions by mixing a specified base oil, a bentonite-base thickening agent, and a solid lubricant comprising molybdenum disulfide and/or tungsten disulfide. CONSTITUTION:55-90wt.% base oil comprising an alkyl-substituted tetraphenyl ether having one to four 6-20C substituents, if necessary, containing an antioxidant, is mixed with 5-25wt.% bentonite-base thickening agent and 5-20wt.% solid lubricant comprising molybdenum disulfide and/or tungsten disulfide, having a particle diameter of 0.1-20mum, at room temperature to 100 deg.C, preferably at 70-100 deg.C, for 1 to 3hr and then at 50-120 deg.C for 10 to 60min to form a uniform mixture.

4. 发明专利

JPH0575797B2 失效
公开(公告)号：JPH0575797B2
公开(公告)日：1993-10-21
申请号：JP7147389
申请日：1989-03-23
申请人： JAPAN ATOMIC ENERGY RES INST , MATSUMURA SEKIYU KENKYUSHO
发明人： OBARA KENJIRO , NAKAMURA KAZUYUKI , MURAKAMI YOSHIO , SODA TAKAO , KANIE TOSHIHIRO , AKATA TAMIO
IPC分类号： C10M169/02 , C10M169/00 , C10N10/12 , C10N30/00 , C10N30/08 , C10N40/02 , C10N40/04 , C10N50/10

5. 发明专利

JPH07228976A PLASMA CONFRONTING MATERIAL 失效
公开(公告)号：JPH07228976A
公开(公告)日：1995-08-29
申请号：JP3925694
申请日：1994-02-15
申请人： JAPAN ATOMIC ENERGY RES INST , TOKYO TUNGSTEN KK
发明人： AKIBA MASATO , NAKAMURA KAZUYUKI , ICHIDA AKIRA , HAYASHI TAKEHIKO
IPC分类号： C23C16/14 , C23C16/08 , C23C16/44 , C23C16/50 , G21B1/11 , G21B1/13 , G21B1/17
摘要： PURPOSE:To develop a plasma confronting material having high thermal impact resitstance, high m.p., low vapor pressure, high thermal conductivity and high strength and excellent irradiation errosion resistance by using W formed by chemical vapor deposition method as a material to be used in ultra-high-temp. plasma. CONSTITUTION:After an Mo substrate 13 is placed in a CVD reaction chamber 11, the inside of this chamber 11 is evacuated to a reduced pressure. Gaseous H2 is supplied by a nozzle 18 into the reaction chamber 11 by opening a valve 15 of a cylinder 16 and the Mo substrate 13 is heated by a heater 20 by using a high-frequency power source 19. Next, gaseous WF6 is supplied from a cylinder 22 by opening a valve 21 to mix the gaseous H2 and the gaseous WF6 at a ratio of 5:1. The gaseous mixture is supplied from a nozzle 18 to the reaction chamber 11. A stage 12 of the Mo substrate 13 is rotated by a revolving shaft 23 and the W layer as the plasma confronting material at the ultra-high temp. having the total content of the gases, such as O2, H2, F and Co, of =500mum thickness is formed on the Mo substrate 13.

6. 发明专利

JPS60166887A FIRST WALL MEMBER FOR NUCLEAR FUSION DEVICE AND MANUFACTURE 失效
公开(公告)号：JPS60166887A
公开(公告)日：1985-08-30
申请号：JP20348683
申请日：1983-10-28
申请人： JAPAN ATOMIC ENERGY RES INST , HITACHI LTD , HITACHI ENG CO LTD , SUMITOMO ELECTRIC INDUSTRIES
发明人： MURAKAMI YOSHIO , ABE TETSUYA , NAKAMURA KAZUYUKI , MIZOGUCHI TADANORI , SAGAWA NORIKI , ITOU YUTAKA , FUJIMORI NAOHARU , YASHIKI TETSUO
IPC分类号： C23C16/32 , G21B1/00 , G21B1/11 , G21B1/17

7. 发明专利

JPH0231097A VACUUM FLANGE 失效
公开(公告)号：JPH0231097A
公开(公告)日：1990-02-01
申请号：JP17817188
申请日：1988-07-19
申请人： JAPAN ATOMIC ENERGY RES INST , TOSHIBA CORP
发明人： OBARA KENJIRO , NAKAMURA KAZUYUKI , MURAKAMI YOSHIO , NAGANUMA MASAMITSU , KITAMURA KAZUNORI , UCHIDA TAKAO
IPC分类号： F16L23/02 , F16L23/16 , F16L23/20 , F16L55/10
摘要： PURPOSE:To make the plate thickness of a flange part thinner and to reduce the number of bolts as compared with one heretofore by obtaining the thickness of a metal seal flange part and the number of bolts required for jointing the flange as the functions of a bolt pitch circle. CONSTITUTION:In the knife edge type metal seal flange, a copper gasket 4 is inserted between a pair of metal seal flange parts comprising austenite stainless steel material, the inner end sides of whose flange junction planes are formed in a knife edge part 3 with a blade tip angle ranging from 70 deg. to 100 deg.. The thickness of flange parts 1a, 1b and the number N of bolt 2 are so arranged to fall into the range of values as obtained from Formula I.

8. 发明专利

JPS61246644A DETECTION OF LEAK POINT OF CONTAINER BY GAS INTRODUCTION SYSTEM 失效
公开(公告)号：JPS61246644A
公开(公告)日：1986-11-01
申请号：JP8794085
申请日：1985-04-24
申请人： JAPAN ATOMIC ENERGY RES INST
发明人： NAKAMURA KAZUYUKI
IPC分类号： G01M3/20
摘要： PURPOSE:To facilitate detection of a fine leak point, by a method wherein the inside of a container to be detected is exhausted, a gas B different from a container ambient gas A is fed into a container simultaneously with the stoppage of the exhaustion and after it is allowed to stand for a while, the concentration distribution of the gas A contained in the introduced gas B is measured. CONSTITUTION:The inside of a container 4 to be detected is exhausted with an exhauster 7 down to the molecular flow condition (condition of average free stroke of gas molecules more than doubling the max. length of the container 4), for example, below 1X10 Torr. Simultaneously with the stoppage of the exhaustion, a gas B different from the ambient gas A of the container 4 is fed into the container via a valve 6 at the pressure of 200Torr, after the container is allowed to stand for 30min on the condition of restricting the diffusion of the gas A, a tubule 2 mounted a manipulator 3 is operated with a driving source 12 to introduce the gas sampled with the tubule 2 into a mass spectrograph 9. This facilitates the detection of a leak point utilizing that a higher concentration of the gas A is given closer to the leak point 1. Especially, this method is ideal for the detection of a fine leak point of a large and complicated container such as semiconductor manufacturing equipment and spacer ships.

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