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1. 发明专利

JPWO2009119504A1 荷電粒子線用静電レンズ有权
公开(公告)号：JPWO2009119504A1
公开(公告)日：2011-07-21
申请号：JP2009513498
申请日：2009-03-23
申请人：株式会社堀場製作所
发明人：彰小野口 , 彰小野口 , 大堀　謙一 , 謙一大堀 , 松本　浩一 , 浩一松本 , 粟田　正吾 , 正吾粟田 , 聡史大橋 , 聡史大橋
IPC分类号： H01J37/12
CPC分类号： H01J37/12 , H01J2237/121 , H01J2237/28
摘要：磁界型レンズと比べて比較的遜色のないレンズ性能を有する荷電粒子線用静電レンズを提供するために、荷電粒子の入射側に設けた複数の電極V1、V4によって、荷電粒子の軌道半径を入射時の軌道半径である初期軌道半径を途中で越えることなく縮小させる第1電界領域AR1と、この第1電界領域AR1を通過した荷電粒子に対して、前記中心軸と平行に進む向きに力を与える第2電界領域AR2と、を形成するとともに、出射側に設けた複数の電極V2、V3によって、荷電粒子の軌道半径が前記初期軌道半径を途中で越えることなく、かつ、荷電粒子の軌道を曲げて、前記第2電界領域AR2から該荷電粒子が出たときの中心軸mに対する軌道角度よりも大きい角度で中心軸mと交わらせる第3電界領域AR3を形成するようにした。

2. 发明专利

JP3971975B2 Cathodoluminescence analysis apparatus 有权
公开(公告)号：JP3971975B2
公开(公告)日：2007-09-05
申请号：JP2002258588
申请日：2002-09-04
申请人：株式会社堀場製作所
发明人：謙一大堀 , 俊正石田 , 正吾粟田 , 慎太郎駒谷
IPC分类号： G01N21/62 , H01J37/147 , H01J37/252

3. 发明专利

JP4884949B2 Vacuum valve unit 有权
公开(公告)号：JP4884949B2
公开(公告)日：2012-02-29
申请号：JP2006334680
申请日：2006-12-12
申请人：株式会社堀場製作所
发明人：正吾粟田
IPC分类号： F16K51/02 , F16K11/22 , F16K31/50
摘要： PROBLEM TO BE SOLVED: To provide a vacuum valve unit 1 superior in work efficiency and in view of costs to a user, and to facilitate miniaturization and a designing of a vacuum device including the vacuum valve unit 1. SOLUTION: The vacuum valve unit is provided with: a housing 2 having a container connection port P1, a raw exhaust port P2, and a main exhaust port P3; a raw exhaust valve element 3 carrying out opening and closing of the raw exhaust port P2; a planar sealing type main exhaust valve element 4 carrying out opening and closing of the main exhaust port P3; a raw exhaust valve element operation part for operating movement of the raw exhaust valve element 3; and a main exhaust valve element operation part for operating movement of the main exhaust valve element 4. By operating the raw exhaust valve element operation part and the main exhaust valve element operation part, the raw exhaust valve element 3 and the main exhaust valve element 4 are moved from fully closed states to a raw exhaust state wherein the raw exhaust port P2 is opened and the main exhaust port P3 is closed, or to a main exhaust state wherein the raw exhaust port P2 is closed and the main exhaust port P3 is opened. COPYRIGHT: (C)2008,JPO&INPIT

4. 发明专利

JP4920539B2 Cathode luminescence measurement device and an electronic microscope 有权
公开(公告)号：JP4920539B2
公开(公告)日：2012-04-18
申请号：JP2007249887
申请日：2007-09-26
申请人：株式会社堀場製作所
发明人：正吾粟田
IPC分类号： G01N21/62 , H01J37/141 , H01J37/252 , H01J37/28

5. 发明专利

JP5677777B2 集光器装置有权
公开(公告)号：JP5677777B2
公开(公告)日：2015-02-25
申请号：JP2010162715
申请日：2010-07-20
申请人：株式会社堀場製作所
发明人：粟田　正吾 , 正吾粟田 , 重俊新井 , 重俊新井
IPC分类号： H01J37/252 , G01N21/62
CPC分类号： G02B19/0023 , G01N2223/08 , H01J37/023 , H01J37/228 , H01J37/28 , H01J2237/0458 , H01J2237/24485

6. 发明专利

JP5306186B2 Electrostatic lens for charged particle beam 有权
公开(公告)号：JP5306186B2
公开(公告)日：2013-10-02
申请号：JP2009513498
申请日：2009-03-23
申请人：株式会社堀場製作所
发明人：彰小野口 , 謙一大堀 , 浩一松本 , 正吾粟田 , 聡史大橋
IPC分类号： H01J37/12 , H01J37/153
CPC分类号： H01J37/12 , H01J2237/121 , H01J2237/28
摘要： Provided is an electrostatic lens for charged particle radiation with a lens performance relatively comparable to that of a magnetic type lens. A plurality of electrodes arranged on the incident side of charged particles form a first electric field area, wherein orbit radii of the charged particles are reduced without exceeding, on the way, the initial orbit radii that are orbit radii at the incident time, and a second electric field area, wherein force in the direction advancing in parallel with a central axis is applied to the charged particles that have passed through the first electric field area. A plurality of electrodes arranged on the projection side form a third electric field area, wherein the orbit radii of the charged particles do not exceed the initial orbit radii on the way and are curved to intersect with a central axis at angles larger than orbit angles defined with respect to the central axis of when the charged particles are projected from the second electric field area.

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