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1. 发明专利

JP5265475B2 Room type vacuum furnace 有权
公开(公告)号：JP5265475B2
公开(公告)日：2013-08-14
申请号：JP2009168786
申请日：2009-07-17
申请人：株式会社トウネツ
发明人：憲明川崎
IPC分类号： F27B5/05 , B22F3/10 , F27D7/06
摘要： PROBLEM TO BE SOLVED: To provide a one chamber type vacuum furnace securing cleanliness of the atmosphere in a heating chamber even in a sintering process after a degreasing process, improving durability of the heating chamber itself, and uniformly cooling a material in a short period of time during a cooling process. SOLUTION: An auxiliary exhaust pipe 4 is arranged coaxially with a furnace body 1 so as to communicate with the inside of the heating chamber 20, and consists of a movable exhaust pipe 4a and a fixed exhaust pipe 4b. The fixed pipe 4b has an outside diameter smaller than the inside diameter of the movable exhaust pipe 4a, and is communicated with the inside of the heating chamber 20 through a lower heating chamber part 20b. The movable exhaust pipe 4a has an outside diameter smaller than the inside diameter of a main exhaust pipe 5 communicated and connected with the inside of the furnace body 1, and is externally fitted to the fixed exhaust pipe 4b, and is supported in such a manner of being freely lifted and lowered between a rising position and a lowering position. The main exhaust pipe 5 has the inside diameter larger than the outside diameter of the movable exhaust pipe 4a, and is externally fitted to the movable exhaust pipe 4a with a prescribed gap. In the rising position of the movable exhaust pipe 4a, a lower end of the movable exhaust pipe 4a is loosely fitted in the main exhaust pipe 5, and a lower end of the fixed exhaust pipe 4b is loosely fitted in the movable exhaust pipe 4a. COPYRIGHT: (C)2011,JPO&INPIT

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