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    • 1. 发明专利
    • Deformable mirror
    • JP5312409B2
    • 2013-10-09
    • JP2010155472
    • 2010-07-08
    • 三菱電機株式会社
    • 真毅 田畑豊 江崎靖暁 加藤憲明 宮永孝久 實野孝治 椿本
    • G02B26/06G02B5/10
    • PROBLEM TO BE SOLVED: To provide a deformable mirror which can control displacement of mirror surface in high resolution while being able to prevent a breakage of the mirror due to excessive stress when the mirror surface is distorted. SOLUTION: A deformable mirror includes a transformable elastic mirror 1 and multiple drive mechanism units 2 which are connected to the rear face of the mirror and transform the mirror. Each of the drive mechanism unit includes a unit movement end 4, a unit fixed end 5, an actuator 3, a primary elastic body 6 and a secondary elastic body 7. As for the primary elastic body, the one end is connected to the unit movement end, and another end is connected to the unit fixed end. As for the secondary elastic body, the one end is connected to the movable end of the actuator, and another end is connected to the unit movement end. The rigidity of the primary elastic body is higher than that of the secondary elastic body. The elastic mirror is transformed by the movement of the unit movement end decided by the tripartite rigid combination with the primary elastic body, secondary elastic body and elastic mirror. COPYRIGHT: (C)2012,JPO&INPIT