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1. 发明专利

JP3891190B2 The piezoelectric element, the piezo-electric device and the angular velocity sensor 有权
公开(公告)号：JP3891190B2
公开(公告)日：2007-03-14
申请号：JP2004152460
申请日：2004-05-21
申请人：ソニー株式会社
发明人：伸佐々木 , 順一本多 , 孝田村 , 輝往稲熊 , 浩二鈴木 , 和夫高橋
IPC分类号： H01L41/187 , G01C19/56 , G01C19/5656 , G01C19/5663 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/29 , H01L41/316 , H03H9/17
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric element having a high piezoelectric constant by using lead zirconate titanate (PZT) which does not satisfy a general formula: Pb 1+y (Zr x Ti 1-x )O 3+y like a composition containing excess or deficiency of oxygen, for example, and piezoelectric apparatus including this piezoelectric element like an angular velocity sensor. SOLUTION: The piezoelectric element 2, as well as the piezoelectric apparatus 1 including the element 2, comprises a substrate 5 on which a primary electrode 14, a piezoelectric oxide film 15 and a secondary electrode 16 are laminated. The composition of the piezoelectric oxide film 15 is expressed by the formula below, in which parameters are determined within a specific range. COPYRIGHT: (C)2006,JPO&NCIPI

2. 发明专利

JP3620207B2 The magnetic head and a method of manufacturing the same 失效
公开(公告)号：JP3620207B2
公开(公告)日：2005-02-16
申请号：JP7418897
申请日：1997-03-26
申请人：ソニー株式会社
发明人：輝往稲熊
IPC分类号： G11B5/31 , G11B5/127 , G11B5/23

3. 发明专利

JP5353651B2 Method of manufacturing the angular velocity sensor 有权
公开(公告)号：JP5353651B2
公开(公告)日：2013-11-27
申请号：JP2009260851
申请日：2009-11-16
申请人：ソニー株式会社
发明人：和夫高橋 , 孝田村 , 順一本多 , 輝往稲熊
IPC分类号： G01C19/5663
摘要： PROBLEM TO BE SOLVED: To enhance the resonance characteristic and sensitivity of a packaged oscillation gyro sensor element. SOLUTION: The oscillation gyro sensor element 10 which detects an angular velocity using the piezoelectric effect of a piezoelectric thin film 5 is packaged by use of a cover member 30 and an IC substrate 21 in the atmosphere. An upper electrode 6 is composed of a driving electrode 6a for applying a voltage to oscillate an oscillator 11, which is formed in the longitudinal direction of the oscillator 11; and detecting electrodes 6b and 6c for detecting Coriolis force generated in a direction vertical to an oscillating direction, which are formed in parallel without contacting with the driving electrode 6a in the longitudinal direction of the oscillator 11. A circumferential space is provided in the oscillating direction of the oscillator 11 so that the distance from the oscillator 11 without oscillation to a part opposed thereto is 2.5 times or more a maximum displacement that is a displacement quantity when the oscillator 11 is oscillated most, and a circumferential space is provided in the Coriolis force detecting direction of the oscillator 11 so that the distance from the oscillator 11 without oscillation to a part opposed thereof is 2 times or more the Coriolis detecting-directional width of the oscillator 11. COPYRIGHT: (C)2010,JPO&INPIT

4. 发明专利

JP5145637B2 The vibration type gyro sensor 有权
公开(公告)号：JP5145637B2
公开(公告)日：2013-02-20
申请号：JP2005380330
申请日：2005-12-28
申请人：ソニー株式会社
发明人：輝往稲熊 , 和夫高橋 , 学相澤 , 浩二鈴木 , 伸佐々木 , 栄治中塩
IPC分类号： G01C19/5663 , G01C19/56 , G01C19/5656 , H01L41/08 , H01L41/18 , H01L41/22 , H01L41/253
CPC分类号： G01C19/5663 , Y10T29/49002
摘要： A vibrating gyroscopic sensor including a vibrating gyroscopic sensor element including a cantilever vibrator that includes a piezoelectric film, a driving electrode, and a pair of detection electrodes on a first surface, and a support substrate on which the vibrating gyroscopic sensor element is mounted. The vibrating gyroscopic sensor element is mounted on the support substrate so that the first surface of the cantilever vibrator faces the support substrate. An area other than the first surface of the cantilever vibrator is defined as a laser processing area where a depression for adjusting the vibration characteristics of the cantilever vibrator is to be provided.

5. 发明专利

JP3781932B2 Magneto-resistance effect type magnetic head and the recording and reproducing apparatus 有权
公开(公告)号：JP3781932B2
公开(公告)日：2006-06-07
申请号：JP34137199
申请日：1999-11-30
申请人：ソニー株式会社
发明人：由喜雄今藤 , 一紀大沼 , 正斉藤 , 孝田村 , 輝往稲熊
IPC分类号： G11B5/255 , G11B5/39 , G11B5/127

6. 发明专利

JP5407250B2 Angular velocity sensor, a method of manufacturing the angular velocity sensor element, the angular velocity sensor and an electronic apparatus 有权
公开(公告)号：JP5407250B2
公开(公告)日：2014-02-05
申请号：JP2008245345
申请日：2008-09-25
申请人：ソニー株式会社
发明人：輝往稲熊 , 幸恵相澤
IPC分类号： G01C19/5628 , G01C19/56 , G01C19/5621 , H01L41/08 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/311 , H01L41/332
摘要： PROBLEM TO BE SOLVED: To provide an angular velocity sensor element, a method for manufacturing the angular velocity sensor element, an angular velocity sensor, and an electronic device, which enable prevention of a short circuit and a leak current between conductors, while attaining miniaturization of the angular velocity sensor element. SOLUTION: The conductors connected to a plurality of electrodes included in an arm part 10 are divided into a conductor layer having lower-layer conductors 3' and a conductor layer having upper-layer conductors 55 and are provided in a base part 20 on a substrate. The lower-layer conductors 3' are connected to lower-layer electrodes, while the upper-layer conductors 55 are connected to upper-layer electrodes. Therefore, a distance between the conductors in a pattern of the lower-layer conductors 3' and in a pattern of the upper-layer conductors 55, which the separate conductor layers have, is larger, compared with that in the case when the conductors connected to the electrodes in a plurality are provided on the same plane. Accordingly, the short circuit and the leak current between the conductors are prevented, while the miniaturization of the angular velocity sensor element 100 is attained. COPYRIGHT: (C)2010,JPO&INPIT

7. 发明专利

JP4123171B2 The method of producing vibrating gyroscopic sensor element, vibrating gyroscopic sensor element and a vibration direction adjusting method 有权
公开(公告)号：JP4123171B2
公开(公告)日：2008-07-23
申请号：JP2004064239
申请日：2004-03-08
申请人：ソニー株式会社
发明人：順一本多 , 孝田村 , 輝往稲熊 , 和夫高橋
IPC分类号： G01C19/56 , G01C19/5656 , G01C19/5663 , G01P15/08 , H01L41/08 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/253 , H01L41/29 , H01L41/312 , H01L41/316
CPC分类号： G01C19/5656
摘要： A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.

8. 发明专利

JP3620204B2 The magnetic head and a method of manufacturing the same 失效
公开(公告)号：JP3620204B2
公开(公告)日：2005-02-16
申请号：JP5965297
申请日：1997-03-13
申请人：ソニー株式会社
发明人：広之大森 , 正斎藤 , 輝往稲熊 , 由香門馬
IPC分类号： G11B5/31 , G11B5/17

9. 发明专利

JP5146578B2 The vibration type gyro sensor 有权
公开(公告)号：JP5146578B2
公开(公告)日：2013-02-20
申请号：JP2011177541
申请日：2011-08-15
申请人：ソニー株式会社
发明人：輝往稲熊 , 和夫高橋 , 学相澤 , 浩二鈴木 , 伸佐々木 , 栄治中塩
IPC分类号： G01C19/5663 , C23C14/34 , G01C19/5656 , H01L41/08 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/253 , H01L41/257 , H01L41/311 , H01L41/39
摘要： PROBLEM TO BE SOLVED: To adjust a vibration characteristic of a vibrator while ensuring a stable characteristic and high strength.SOLUTION: A vibration type gyro sensor includes a vibration type gyro sensor element in which a piezoelectric film, a driving electrode, a pair of detection electrodes, and a wiring connection terminal are formed on one surface thereof; and a support substrate on which a land is formed for mounting the vibration type gyro sensor element. The vibration type gyro sensor element has a cantilever shaped vibrator, is mounted on the support substrate with the one face directed to the support substrate, and includes an area other than the one face as an area to be processed in which a concave is formed for adjusting the vibration characteristic of the vibrator.

10. 发明专利

JP4640459B2 An angular velocity sensor 有权
公开(公告)号：JP4640459B2
公开(公告)日：2011-03-02
申请号：JP2008175445
申请日：2008-07-04
申请人：ソニー株式会社
发明人：順一本多 , 哲也柴山 , 輝往稲熊
IPC分类号： G01C19/56 , G01C19/5628 , H01L41/08 , H01L41/187 , H01L41/22 , H01L41/312 , H01L41/332 , H01L41/338
CPC分类号： G01C19/5628 , G01C19/5621
摘要： Disclosed is an angular velocity sensor. The angular velocity sensor includes a first layer, a piezoelectric layer, and a second layer. The first layer has a first main surface and a second main surface, and includes a vibrator portion and a base portion that supports the vibrator portion. The piezoelectric layer is formed on the first main surface of the first layer. The second layer is integrally bonded to the base portion on a side of the second main surface of the first layer.

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