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    • 4. 发明专利
    • Substrate coating apparatus
    • JP5290025B2
    • 2013-09-18
    • JP2009086138
    • 2009-03-31
    • 大日本スクリーン製造株式会社
    • 雅敏 上野正幸 村井
    • B05C5/00B05C11/00H05B33/10
    • PROBLEM TO BE SOLVED: To provide a substrate coating device capable of distinguishing a state wherein coating liquid is discharged from a nozzle in a liquid column shape from a state wherein a liquid reservoir is formed in the discharge hole of the nozzle and recognizing it, and preventing coating treatment in an abnormal state. SOLUTION: The substrate coating device 1 monitors light receiving signals output from the light receiving device 71b of a laser sensor 71. Then, on the basis of the time during which the light receiving signals are lowered, the substrate coating device 1 distinguishes the "first state" wherein an organic EL liquid is discharged from the nozzle in the liquid column shape from the "second state" wherein the liquid reservoir is formed at the lower end part of the nozzle. Thus, the substrate coating device 1 distinguishes the "first state" which is a normal state from the "second state" which is the abnormal state and recognizes it, and the coating treatment in the abnormal state is appropriately prevented. COPYRIGHT: (C)2011,JPO&INPIT