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    • 10. 发明专利
    • Image recording device, a piezoelectric actuator, and, the liquid jet head
    • JP4831051B2
    • 2011-12-07
    • JP2007286871
    • 2007-11-05
    • セイコーエプソン株式会社
    • 俊華 張孝浩 片倉
    • H01L41/09B41J2/045B41J2/055B41J2/135B41J2/14B41J2/145H01L41/187H01L41/22H01L41/29H01L41/39
    • PROBLEM TO BE SOLVED: To enhance the efficiency of deforming a piezoelectric element of a multi-layer structure in relation to an image recorder equipped with a liquid jet head which ejects liquid droplets from nozzle openings by generating a pressure change to a liquid in pressure chambers through deformation of the piezoelectric elements as a driving source, a piezoelectric actuator with the piezoelectric elements formed on a diaphragm surface, and a liquid jet head which has the piezoelectric elements set on a diaphragm surface of the opposite side to pressure chambers and changes a pressure chamber volume by the piezoelectric elements. SOLUTION: The piezoelectric element 17 formed on the diaphragm surface of the opposite side to the pressure chamber 12 includes a piezoelectric layer 31 comprised of mutually stacked upper layer piezoelectric body 34 and lower layer piezoelectric body 35, and electrode layers 33, 36 and 37 which generate an electric field given to the piezoelectric layer 31. Each of the common lower electrode 37, lower layer piezoelectric body 35, driving electrode 33, upper layer piezoelectric body 34 and common upper electrode 36 sequentially overlie from the diaphragm 14 side, whereby the piezoelectric element 17 is formed. The common upper electrode is continuously formed from one end in a width direction of the upper layer piezoelectric body to the other end. Moreover, the common upper electrode is set wider than the common lower electrode. COPYRIGHT: (C)2008,JPO&INPIT