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    • 2. 发明专利
    • Method for polishing surface and polishing element
    • 抛光表面和抛光元件的方法
    • JP2005322926A
    • 2005-11-17
    • JP2005135036
    • 2005-05-06
    • Soc Europeenne De Systemes Optiquesソシエテ・ウロペエンヌ・ド・システム・オプティクSociete Europeenne De Systemes Optiques
    • FERME JEAN-JACQUES
    • B24B37/04H01L21/304H01L21/306
    • B24B37/042B24B37/26
    • PROBLEM TO BE SOLVED: To provide a method for polishing a surface, capable of avoiding the effects of the excess polishing of the edge of a body to be polished, when one surface or two surfaces are to be polished. SOLUTION: In the method for polishing the surface, the body which is to be polished 113 with at least one surface to be polished 115 is rotated, in a state in which the surface to be polished 115 is pushed against a polishing element 103 rotated or displaced in parallel. In such a method, the effect of the excess polishing, generated at the edge of the body to be polished 113 on a first orbit section T' P2 is reduced, because a point P2, existing on the surface to be polished 115 positioned outside the circumference 114 of a set radius centered about the center O C of the rotation of the body to be polished 113, is moved along an orbit composed while including the first orbit section T' P2 , and a second orbit section T" P2 , in which the degree of the polishing is made smaller than that on the first orbit section T' P2 , while the time the body to be polished 113 is turned. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种用于抛光表面的方法,当要抛光一个表面或两个表面时,能够避免抛光物体的边缘的多余抛光的影响。 解决方案:在抛光表面的方法中,要被抛光的表面115被抛光的状态被旋转,待抛光的被抛光体113的主体被旋转, 103平行旋转或移位。 在这种方法中,由于存在于表面上的点P2,因此在第一轨道部分T' P2 上在被抛光体113的边缘处产生的多余的抛光的影响减小了 待被抛光体113的旋转中心O C 为中心的设定半径的圆周114外侧被抛光115沿包括第一轨道部T的轨道移动 “SB”P2 和第二轨道部分T“ P2 ,其中抛光度小于第一轨道部分T' P2 < / SB>,而被抛光的身体113转动的时间。版权所有(C)2006,JPO&NCIPI
    • 3. 发明专利
    • Finish grinding method
    • 精细研磨方法
    • JP2005144621A
    • 2005-06-09
    • JP2003387928
    • 2003-11-18
    • Soc Europeenne De Systemes Optiquesソシエテ・ウロペエンヌ・ド・システム・オプティクSociete Europeenne De Systemes Optiques
    • FERME JEAN JACQUES
    • B24B1/00
    • PROBLEM TO BE SOLVED: To provide a proper finish grinding method regarding a method for applying the finish grinding to the surface by using a grinding element and an abrasive.
      SOLUTION: The finish grinding method for grinding the surface by using the grinding element and the abrasive comprises (a) a process for permanently depositing the grinding element to a support made of a deformable material before grinding, (b) a process, in which the grinding element is formed so as to be adaptable to the outer shape of the surface by applying pressure to the deformable support in a state that the grinding element is in contact with the surface to be ground, and (c) a process for executing the finish grinding by using the grinding element formed in the forming process.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了通过使用研磨元件和磨料将精磨削施加到表面的方法提供适当的精磨方法。 解决方案:通过使用研磨元件和磨料研磨表面的精磨方法包括(a)在研磨之前将研磨元件永久性地沉积到由可变形材料制成的支撑件上的工艺,(b) 其中通过在研磨元件与被研磨表面接触的状态下通过向可变形支撑件施加压力来形成磨削元件以便适应于表面的外部形状,以及(c) 通过使用在成形过程中形成的研磨元件进行精磨。 版权所有(C)2005,JPO&NCIPI