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    • 7. 发明专利
    • CLEAN STOCKER
    • JP2003100857A
    • 2003-04-04
    • JP2001291740
    • 2001-09-25
    • MATSUSHITA ENV AIRCOND ENG CO
    • SUGANO KIYOSHISHIMIZU KOJIHIRATA HIROSHI
    • H01L21/673H01L21/68
    • PROBLEM TO BE SOLVED: To provide a clean stocker which enables to keep the air clean therein. SOLUTION: The clean stocker comprises a storage chamber 2 which stores an electronic component material or a processed product of it and can be essentially airtightly closed. The storage chamber 2 is provided with an air blowing chamber 3 and an air returning chamber 4. In the air blowing chamber 3, a fine particle eliminating section 10 for eliminating fine particles in the air and a chemical contaminant eliminating section 11 for eliminating a chemical contaminant in the air are disposed. The clean stocker has such a structure that the air blown from an air blower 17a circulates to the storage chamber 2 through the storage chamber 2 and the air returning chamber 4 after passing through the fine particle eliminating section 10 only or through both the chemical contaminant eliminating section 11 and the fine particle eliminating section 10; whether the air blown from the air blower 17a is passed through the fine particle eliminating section 10 only or through both the chemical contaminant eliminating section 11 and the fine particle eliminating section 10 is switched with each other. Due to this structure, the storage chamber 2 can be kept in a very clean state to suppress defects of the electronic component material and the processed product.