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    • 3. 发明专利
    • METHOD AND DEVICE FOR DETECTING PATTERN DEFECT
    • JP2002207996A
    • 2002-07-26
    • JP2001002495
    • 2001-01-10
    • KOKUSAI GIJUTSU KAIHATSU KK
    • CRAIG HICKS
    • G01B11/30G01N21/956G06T1/00G06T7/00G06T7/60
    • PROBLEM TO BE SOLVED: To surely detect a defect without depending on the direction of a test pattern. SOLUTION: In a defect detector 10, a line sensor 12 picks up a test object 14, a binarizing circuit 18 prepares binary image data on the basis of a video signal of the line sensor 12. A contour extracting part 22 obtains the test contour of a test pattern formed on the test object 14 from the binary image and writes the test contour in the sample contour storing part 28 of a sample data storing means 26. A concave and convex extracting part 24 extracts concave and convex parts of the test contour and writes the concave and convex parts in sample concave and convex storing part. The comprising part 42 of a comparison deciding part 40 reads the test concave and convex parts stored in the sample concave and convex storing part 30, reads a master contour corresponding to the test concave and convex parts from the master contour storing part 34 of a master data storing means 32 and compares both of them. A deciding part 44 discriminates whether or not the test concave and convex parts are a defect on the basis of the comparison results of the comparing part 42.
    • 10. 发明专利
    • CARRIER SYSTEM
    • JP2000114278A
    • 2000-04-21
    • JP28835498
    • 1998-10-09
    • KOKUSAI GIJUTSU KAIHATSU KK
    • SAKASHITA SHIGEJI
    • H01L21/50
    • PROBLEM TO BE SOLVED: To carrying a CSP tape provided with a plurality of patterns, while ensuring planarity of a region to be read out by carrying the CSP tape and bending in the region to be read out along the direction intersecting the carrying direction. SOLUTION: A defect inspection system comprises a feeding side reel handler 20 for winding both a CSP tape 12 provided with a large number of package patterns repetitively and a spacer tape 14 to form a CSP roll 10a being held therein. A carrying passage formed of first, second, third, fourth and fith rollers 22, 24, 26, 28, 30 respectively is provided with a CCD camera 40 for picking up the image of the pattern on the CSP tape 12, and a suction drum 60 for bending the CSP tape along the direction intersecting the carrying direction, by winding the CSP tape onto the circumferential surface at the reading position of the CCD camera 40.