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1. 发明专利

JP2009270161A Apparatus for producing thin film 审中-公开
标题翻译：生产薄膜的装置
公开(公告)号：JP2009270161A
公开(公告)日：2009-11-19
申请号：JP2008121972
申请日：2008-05-08
申请人： Fuji Electric Advanced Technology Co Ltd , 富士電機アドバンストテクノロジー株式会社
发明人： MATSUYAMA HIDEAKI
IPC分类号： C23C16/509 , C23C16/24 , H01L31/04
CPC分类号： Y02B10/12 , Y02E10/50
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for producing a thin film, which can inhibit a malfunction such as waving from occurring on a substrate by fixing a distance between parallel plate electrodes and improve the uniformity of the thin film, when forming the thin film on the substrate in a plasma CVD chamber having the two parallel plate electrodes arranged therein. SOLUTION: The apparatus for producing the thin film by using a plasma CVD process, which has the two parallel plate electrodes 7 and 8 arranged in the plasma CVD chamber 3 into which a source gas is introduced, supplies a high-frequency power to the parallel plate electrodes 7 and 8 to decompose the source gas, and thereby forms the thin film on the substrate 10 placed between the parallel plate electrodes 7 and 8, has a plurality of spacers 13 made of an insulative material provided on at least one of the two parallel plate electrodes 7 and 8. The spacers 13 are arranged between the parallel plate electrodes 7 and 8 so that the distance between the parallel plate electrodes 7 and 8 is constant. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种薄膜制造装置，其可以通过固定平行板电极之间的距离并且提高薄膜的均匀性来抑制诸如波动发生在基板上的故障，当形成时在其中布置有两个平行板电极的等离子体CVD室中的基板上的薄膜。解决方案：通过使用等离子体CVD工艺制造薄膜的装置，其具有布置在引入源气体的等离子体CVD室3中的两个平行板电极7和8，其提供高频功率到平行板电极7和8分解源气体，从而在放置在平行板电极7和8之间的基板10上形成薄膜，具有多个由绝缘材料制成的间隔件13，该间隔件设置在至少一个两个平行板电极7和8之间的间隔件13布置在平行板电极7和8之间，使得平行板电极7和8之间的距离是恒定的。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2004115825A Method for producing separator for water electrolyzer 审中-公开
公开(公告)号：JP2004115825A
公开(公告)日：2004-04-15
申请号：JP2002276665
申请日：2002-09-24
申请人： Fuji Electric Advanced Technology Co Ltd , 富士電機アドバンストテクノロジー株式会社
发明人： HORIGUCHI MICHIKO , HARADA TAKASHI
IPC分类号： C25B13/02 , C25B1/10
CPC分类号： Y02E60/366
摘要： PROBLEM TO BE SOLVED: To provide a method for producing a separator for a water electrolyzer in which the formation of grooves or holes can easily be performed compared with the conventional one, and material cost and working cost can be reduced as the whole. SOLUTION: The water electrolyzer is provided with a water electrolyzing cell whose inside is divided into an anode chamber and a cathode chamber by an electrolyte membrane of a solid polymer or the like, and a separator made of a metallic material at least provided with grooves for an emitted gas passage and/or holes for a cooling water passage. In the production method for the same separator, the parts other than the grooves 33 and/or holes 34 are formed by diffusely joining a plurality of thin sheets 32 made of a metallic material with each other. At this time, the grooves and/or holes are formed so as to be surrounded by each one side in at least a part among the plurality of the diffusedly joined thin sheets. COPYRIGHT: (C)2004,JPO

3. 发明专利

JP2005097644A Water electrolytic cell 审中-公开
标题翻译：水电解槽
公开(公告)号：JP2005097644A
公开(公告)日：2005-04-14
申请号：JP2003329843
申请日：2003-09-22
申请人： Fuji Electric Advanced Technology Co Ltd , 富士電機アドバンストテクノロジー株式会社
发明人： NAKANORI TAKAHIRO
IPC分类号： C25B9/00
摘要： PROBLEM TO BE SOLVED: To retain the force with which clamping plates are pressed against the inside of a water electrolytic cell to an almost fixed value by a simple method without depending on the internal pressure of a stacked body while evading the upsizing of the whole water electrolytic cell and cost increase. SOLUTION: A stacked body obtained by alternately stacking a plurality of solid polymer type electrode binding films 2 via separators 3, and clamping plates 8 arranged on both the sides of the stacked body are provided at a water electrolytic cell. Each vessel 9 for pressing the clamping plate 8 to the inside is arranged at the outside of the clamping plate 8, a fixing plate 10 is arranged at the outside of each vessel 9 as well, and the spacing between the fixing plates 10 is retained to a prescribed distance. Further, the space in the stacked body and that in the vessel 9 are communicated, by which the internal pressure of the stacked body and the internal pressure of the vessel 9 are made equal. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过简单的方法将夹紧板压在水电解槽内部的力保持为几乎不变，而不依赖于堆叠体的内部压力，同时避开全水电解池成本增加。解决方案：在水电解池中设置通过隔板3交替层叠多个固体聚合物型电极接合膜2和布置在层叠体两侧的夹持板8而获得的层叠体。用于将夹板8压向内侧的每个容器9布置在夹板8的外侧，固定板10也布置在每个容器9的外部，并且固定板10之间的间隔保持规定的距离。此外，堆叠体中的空间和容器9中的空间连通，由此堆叠体的内部压力和容器9的内部压力相等。版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JP2004277870A Method for operating water electrolyzer 审中-公开
公开(公告)号：JP2004277870A
公开(公告)日：2004-10-07
申请号：JP2003074945
申请日：2003-03-19
申请人： Fuji Electric Advanced Technology Co Ltd , 富士電機アドバンストテクノロジー株式会社
发明人： NAKANORI TAKAHIRO
IPC分类号： C25B1/10 , C25B15/02
CPC分类号： Y02E60/366
摘要： PROBLEM TO BE SOLVED: To provide a method for operating a water electrolyzer wherein the adhesion and buildup of impurity ions on a solid polyelectrolyte membrane is inhibited to keep electrolytic performances stable and satisfactory, and a long-term continuous operation is possible without using an expensive heat-resistant ion-exchange resin or a special apparatus such as a regenerator using an acid. SOLUTION: A measuring object correlated with water electrolysis performance and serving as an index therefor is predetermined. When the measured value reaches a specified value corresponding to a specified lower limit of water electrolysis performance, electrolysis is performed at a specified current higher than the rated current. When the water electrolysis performance is restored and the measured value reaches the specified upper limit of the water electrolysis, the electrolysis is continued at the rated current. Alternatively, the electrolysis is performed at a specified current higher than the rated current after a lapse of a predetermined operation time and is continued at a current reset at the rated current after a lapse of a specified time. COPYRIGHT: (C)2005,JPO&NCIPI

5. 发明专利

JP2004250736A Water electrolysis unit 审中-公开
标题翻译：水电解单元
公开(公告)号：JP2004250736A
公开(公告)日：2004-09-09
申请号：JP2003040572
申请日：2003-02-19
申请人： Fuji Electric Advanced Technology Co Ltd , 富士電機アドバンストテクノロジー株式会社
发明人： HORIGUCHI MICHIKO
IPC分类号： C25B9/04 , C25B9/00 , C25B9/10
摘要： PROBLEM TO BE SOLVED: To provide a water electrolysis unit which reduces a manufacturing cost such as a material cost for a bipolar electrode (a separator) and a machining cost in comparison with a conventional unit, improves electrical contact resistance, and as a whole, reduces a cost. SOLUTION: In the electrochemical apparatus provided with a membrane electrode junction body 11 having catalytic layers on both sides of a solid polymer electrolyte membrane, feeding bodies 5 and 10 arranged on both sides of the membrane electrode junction body 11, and the separators 1 and 6 having a duct for a supplied water and a generated gas, this water electrolysis unit is provided with terminals 2 and 7 for electrifying feeding bodies, which directly electrifying each of the feeding bodies 5 and 10; wherein as a preferred aspect, the separators 1 and 6 are resin molded. COPYRIGHT: (C)2004,JPO&NCIPI
摘要翻译：要解决的问题：与常规单元相比，提供降低双极电极（隔膜）的材料成本和制造成本的制造成本的水电解单元，提高了电接触电阻，并且如一个整体，降低成本。解决方案：在具有在固体聚合物电解质膜两侧具有催化层的膜电极接合体11的电化学装置中，设置在膜电极接合体11的两侧的供给体5和10以及隔膜 1和6具有用于供水和产生气体的管道，该水电解单元设置有用于对馈送体5和10进行直接充电的馈送体带电的端子2和7; 其中作为优选的方面，分离器1和6是树脂模制的。版权所有（C）2004，JPO＆NCIPI

6. 发明专利

JP2005259393A Manufacturing method of dielectric 审中-公开
标题翻译：电介质的制造方法
公开(公告)号：JP2005259393A
公开(公告)日：2005-09-22
申请号：JP2004066423
申请日：2004-03-09
申请人： Fuji Electric Advanced Technology Co Ltd , 富士電機アドバンストテクノロジー株式会社
发明人： KOINUMA HIDEOMI , YONEZAWA YOSHIYUKI , KONISHI YOSHINORI
IPC分类号： C04B41/87 , C23C14/08 , H01B3/12 , H01B19/00
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing SnTiO
3 dielectric effectively and easily as a non-leaded, non-bismuth system ferroelectric having a property not inferior to a lead system ferroelectric without affecting adversely a human body.
SOLUTION: This is a method of manufacturing a SnTiO
3 dielectric having a perovskite type structure expressed by a chemical formula ABO
3 and the target of A atom is made SnO or SnO
2 , and the target of B atom is made TiO
2 , and the target of A atom and target of B atom are formed alternately by a pulse laser deposition method so that they may be a half of the unit lattice of the perovskite type structure.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种具有不劣于铅系铁电体的性能的非铅非铋体系铁电体，有效且容易地提供制造SnTiO 3 SBR的电介质，而不影响不利于人体。解决方案：这是一种制备具有由化学式ABO 3 表示的钙钛矿型结构的SnTiO 3 SB 3电介质的方法，并且将A原子的靶制成SnO 或SnO 2 ，并且B原子的靶被制成TiO 2 ，并且通过脉冲激光沉积方法交替地形成A原子和B原子的靶的目标它们可以是钙钛矿型结构的单位晶格的一半。版权所有（C）2005，JPO＆NCIPI

7. 发明专利

JP2005200699A Manufacturing method of transparent electrode thin film 审中-公开
标题翻译：透明电极薄膜的制造方法
公开(公告)号：JP2005200699A
公开(公告)日：2005-07-28
申请号：JP2004007798
申请日：2004-01-15
申请人： Fuji Electric Advanced Technology Co Ltd , 富士電機アドバンストテクノロジー株式会社
发明人： TAKANO AKIHIRO
IPC分类号： C23C14/54 , C23C14/08
摘要： PROBLEM TO BE SOLVED: To provide a transparent electrode thin film manufacturing method capable of manufacturing a transparent electrode thin film having consistent film thickness without any limitation to the configuration of an optical system or a film deposition apparatus by a simple device.
SOLUTION: When the transparent electrode thin film 2 is deposited in a transparent electrode thin film deposition chamber 10, the deposited transparent electrode thin film 2 is transferred to a film thickness measurement chamber 20, a surface of the transparent electrode thin film 2 is irradiated with monochromatic light in the film thickness measurement chamber 20, the reflecting intensity of the monochromatic light is measured to calculate the film thickness of the transparent electrode thin film 2, and the calculated film thickness is fed back to the film deposition condition of the transparent electrode thin film 2.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：解决问题：提供一种透明电极薄膜制造方法，其能够通过简单的装置制造具有一致膜厚度的透明电极薄膜，而不受光学系统或成膜装置的构造的限制。解决方案：当透明电极薄膜沉积室10中沉积透明电极薄膜2时，将沉积的透明电极薄膜2转移到膜厚度测量室20，透明电极薄膜2的表面在膜厚测量室20中用单色光照射，测量单色光的反射强度以计算透明电极薄膜2的膜厚度，并将计算出的膜厚反馈到膜厚沉积条件透明电极薄膜2.版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2004289023A Inspecting method and apparatus for silicon carbide semiconductor device, and manufacturing method for silicon carbide semiconductor device 有权
公开(公告)号：JP2004289023A
公开(公告)日：2004-10-14
申请号：JP2003081539
申请日：2003-03-24
申请人： Central Res Inst Of Electric Power Ind , Fuji Electric Advanced Technology Co Ltd , 富士電機アドバンストテクノロジー株式会社 , 財団法人電力中央研究所
发明人： TAWARA TAKESHI , IZUMI SHUNSUKE , TSUCHIDA SHUICHI , KAMATA ISAO
IPC分类号： H01L21/66
摘要： PROBLEM TO BE SOLVED: To inspect in a short time whether or not a lamination fault of a semiconductor device comprising a silicon carbide semiconductor or to manufacture the silicon carbide semiconductor device in a short time including its inspection time.
SOLUTION: An SiC wafer 9 having a pn junction comprising a p type silicon carbide semiconductor and an n type silicon carbide semiconductor is irradiated with laser light 2 having larger energy than a band gap of the silicon carbide semiconductor. Light 6 emitted from the SiC wafer 9 by the laser irradiation is analyzed with the aid of a spectroscope 4, and the intensity of a specific wavelength light is observed with a photomultiplier tube 5. The deterioration of the characteristics of the semiconductor device comprising the pn junction is determined on the basis of measured light intensity.
COPYRIGHT: (C)2005,JPO&NCIPI

9. 发明专利

JP2010037624A Non-integrated type cathode electrode and plasma cvd apparatus 有权
标题翻译：非集成型阴极电极和等离子体CVD装置
公开(公告)号：JP2010037624A
公开(公告)日：2010-02-18
申请号：JP2008204076
申请日：2008-08-07
申请人： Fuji Electric Advanced Technology Co Ltd , National Institute Of Advanced Industrial & Technology , 富士電機アドバンストテクノロジー株式会社 , 独立行政法人産業技術総合研究所
发明人： TAKENAKA KENSUKE , KONDO MICHIO
IPC分类号： C23C16/509 , C23C16/24 , C23C16/455 , H01L21/205 , H05H1/46
摘要： PROBLEM TO BE SOLVED: To provide a non-integrated cathode electrode which is easily manufactured, is easily made large in the area, is easily attached to and detached from a plasma CVD apparatus, is excellent in maintainability and has low cost, and to provide the plasma CVD apparatus. SOLUTION: The non-integrated type cathode electrode 1 is used when a thin film is deposited on the surface of a substrate by a plasma CVD process, and includes: a shower head type flat plate electrode 3 freely removably fitted to a gas dispersion space forming part 2 into which a raw material gas G is introduced and causing the raw material gas G in the gas dispersion space forming part 2 to flow out form the surface; and an outer frame-fitted partition plate 5 having a shape with the outer circumference as an outer frame part 5a and in which a plurality of gas circulation holes 4 are formed, and the outer frame-fitted partition plate 5 is freely removably fixed to the shower head type flat plate electrode 3. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题为了提供容易制造的易于制造的非一体化的阴极电极，容易在该区域中变大，容易地与等离子体CVD装置连接和分离，具有优异的可维护性并且成本低，并提供等离子体CVD装置。解决方案：当通过等离子体CVD工艺在衬底的表面上沉积薄膜时，使用非集成型阴极电极1，并且包括：淋浴头型平板电极3，可自由拆卸地装配到气体分散空间形成部分2，其中引入原料气体G并使气体分散空间形成部分2中的原料气体G从表面流出; 外框架嵌合隔板5具有作为外框部5a的外周的形状，并且形成有多个气体循环孔4，外框架嵌合隔离板5自由地可拆卸地固定到淋浴头型平板电极3.版权所有（C）2010，JPO＆INPIT

10. 发明专利

JP2009195072A Controller for power supply apparatus 有权
标题翻译：电源控制器
公开(公告)号：JP2009195072A
公开(公告)日：2009-08-27
申请号：JP2008035456
申请日：2008-02-18
申请人： Fuji Electric Advanced Technology Co Ltd , Yokohama National Univ , 国立大学法人横浜国立大学 , 富士電機アドバンストテクノロジー株式会社
发明人： YOSHIOKA KOYA , MATSUMOTO YASUSHI , KAWAMURA TOKUO , OIKAWA RYOTA
IPC分类号： H02M7/493
摘要： PROBLEM TO BE SOLVED: To provide a controller for a power supply apparatus, which simply suppresses the fluctuation of output frequencies caused by frequency droop characteristics without determining an operating state nor a transverse current amount or without using a detection circuit of the output frequency nor a frequency controller when a plurality of power supply apparatuses are connected in parallel using frequency droop characteristics. SOLUTION: The controller for the power supply apparatus supplying an alternating current to a load is provided with: a phase adjuster 3 for adjusting the phase of own output voltage in accordance with the effective portion of the own output power or output current of the power supply apparatus. It is further provided with an amplitude adjuster 5 for adjusting the amount of the output of the phase adjuster 3, a subtractor 6 for reducing the output of the amplitude adjuster 5 from the difference between the reference value of the effective portion and the actual value of the own output power of the power supply apparatus, and an adder 2 for adding the output of the phase adjuster 3 to the reference phase of the output voltage. The output of the subtractor 6 is input into the phase adjuster 3. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于电力供应装置的控制器，其简单地抑制由频率下降特性引起的输出频率的波动，而不确定操作状态或横向电流量，或者不使用输出的检测电路当使用频率下降特性并行连接多个电源装置时，频率也不是频率控制器。解决方案：向负载提供交流电的电源装置的控制器设置有：相位调节器3，用于根据自身输出功率或输出电流的有效部分来调节自身输出电压的相位电源装置。还设置有用于调整相位调整器3的输出量的幅度调整器5，减法器6，用于根据有效部分的基准值与实际值的差值来减小幅度调节器5的输出电源装置的自身输出功率，以及将相位调整器3的输出与输出电压的基准相位相加的加法器2。减法器6的输出被输入到相位调节器3中。（C）2009，JPO＆INPIT

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