会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明专利
    • Cvd equipment having vertical coating plane and power source-controlled hot filament
    • 具有垂直涂层平面和电源控制的热丝的CVD设备
    • JP2008038244A
    • 2008-02-21
    • JP2006286361
    • 2006-10-20
    • Chugoku Sarin Kigyo Kofun Yugenkoshi中國砂輪企業股▲ふぇん▼有限公司
    • WANG MING-HUICHANG HSIAO-KUOLIN KUAN-HUNG
    • C23C16/44C23C16/52
    • C23C16/44
    • PROBLEM TO BE SOLVED: To provide a CVD (chemical vapor deposition) equipment having a vertical coating plane and power source-controlled hot filaments.
      SOLUTION: A CVD reactor mainly has a chamber, one or a number of rotating electrodes provided inside the chamber, hot filaments whose at least one end is connected to the surfaces of the rotating electrodes, and a rotating power source. A substrate as an object for coating is placed inside the chamber in a vertical position, and further, the substrate is subjected to coating in at least one side coating plane through the hot filaments. When the hot filaments expand due to a temperature change, the rotating power source rotates the rotating electrode(s) to stretch the hot filaments and to further maintain the predetermined tension of the hot filaments, thereby preventing loosing and vibration of the hot filaments so as not to interfere with the performance of the coating work and not to touch and damage the substrate upon flowing of a gas in the chamber.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供具有垂直涂层平面和电源控制的热丝的CVD(化学气相沉积)设备。 解决方案:CVD反应器主要具有室,设置在室内的一个或多个旋转电极,其至少一端连接到旋转电极的表面的热丝和旋转电源。 将作为涂布对象的基板在垂直位置放置在室内,此外,基板通过热丝在至少一个侧面涂层平面上进行涂布。 当热丝由于温度变化而膨胀时,旋转电源使旋转电极旋转以拉伸热丝,并进一步保持热丝的预定张力,从而防止热丝的松动和振动,从而 不会干扰涂层工作的性能,并且不会在气体在腔室中流动时接触和损坏基板。 版权所有(C)2008,JPO&INPIT
    • 4. 发明专利
    • Polishing tool
    • 抛光工具
    • JP2009297879A
    • 2009-12-24
    • JP2008157885
    • 2008-06-17
    • Chugoku Sarin Kigyo Kofun Yugenkoshi中國砂輪企業股▲ふぇん▼有限公司
    • CHOU JUILINLIAO DONG-LIANGCHIN YUZEN
    • B24D11/00B24D3/00B24D15/02
    • PROBLEM TO BE SOLVED: To provide a polishing tool capable of enhancing total accuracy, extending use life, reducing manufacturing cost and raising processing efficiency, and to provide its manufacturing method.
      SOLUTION: The manufacturing method for a polishing tool includes a step (A) of preparing a polishing sheet having a processing surface and a non-processing surface, a die having a control surface, and a back plate; a step (B) of connecting between the processing surface of the polishing sheet and control surface of the die, and fixing both surfaces with a connecting agent; a step (C) of forming an adhesive layer on the non-processing surface of the polishing sheet; a step (D) of fixing the back plate on the surface of adhesive layer; and a step (E) of removing the connecting agent and separating the die and the polishing sheet.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种能够提高总精度,延长使用寿命,降低制造成本和提高加工效率的抛光工具,并提供其制造方法。 < P>解决方案:抛光工具的制造方法包括制备具有处理表面和非处理表面的抛光片,具有控制表面的模具和背板的步骤(A) 在所述研磨片的处理面与所述模具的控制面之间进行连接的工序(B),以及将连接剂固定的两面; 在所述研磨片的非处理面上形成粘合剂层的工序(C); 将背板固定在粘合剂层的表面上的步骤(D); 以及去除连接剂并分离模具和抛光片的步骤(E)。 版权所有(C)2010,JPO&INPIT
    • 5. 发明专利
    • Cvd equipment
    • CVD设备
    • JP2008050683A
    • 2008-03-06
    • JP2006286173
    • 2006-10-20
    • Chugoku Sarin Kigyo Kofun Yugenkoshi中國砂輪企業股▲ふぇん▼有限公司
    • CHUNG CHIH-HSIENCHANG HSIAO-KUOLIN KUAN-HUNG
    • C23C16/44C23C16/452H01L21/205
    • C23C16/509C23C16/4557
    • PROBLEM TO BE SOLVED: To provide a CVD (chemical vapor deposition) equipment provided with a control mechanism of gas pre-heating, substrate heating, and electric field and magnetic field. SOLUTION: A CVD (chemical vapor deposition) reactor is provided with a reaction chamber, a gas tube heater, a substrate holder, a holder heater, a plurality of hot filaments, an electric field generator, and a magnetic field generator. The gas tube heater preheats the gas, the substrate holder and a plurality of the hot filaments heats the substrate, and the gas and substrate heating speed is accelerated by variously different heating systems, thereby saving much deposition time and greatly improving deposition efficiency. Matching with the electric field generator and the magnetic field generator, the ionization of applied gas in the reaction chamber is enhanced and the uniformity of the thickness of the deposited film on the surface of the substrate is increased. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供具有气体预热,基板加热,电场和磁场的控制机构的CVD(化学气相沉积)设备。 解决方案:CVD(化学气相沉积)反应器设置有反应室,气体管加热器,基板保持器,保持器加热器,多个热丝,电场发生器和磁场发生器。 燃气管加热器预热气体,基板保持器和多个热丝加热基板,气体和基板加热速度通过各种不同的加热系统加速,从而节省大量的沉积时间并大大提高沉积效率。 与电场发生器和磁场发生器匹配,反应室中施加气体的电离增强,并且衬底表面上沉积膜的厚度均匀性增加。 版权所有(C)2008,JPO&INPIT