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1. 发明专利

JP2006111487A Method for recovering hydrofluoric acid 有权
标题翻译：回收氢氟酸的方法
公开(公告)号：JP2006111487A
公开(公告)日：2006-04-27
申请号：JP2004300350
申请日：2004-10-14
申请人： Mitsubishi Chemical Engineering Corp , Nippon Refine Kk , Ryoka Forward Kk , 三菱化学エンジニアリング株式会社 , 日本リファイン株式会社 , 菱化フォワード株式会社
发明人： MIYATA KENYO , KAMEYAMA KAORU , KAWASE YASUHITO
IPC分类号： C01B7/19 , B01D1/00 , B01D3/14 , C02F1/04
摘要： PROBLEM TO BE SOLVED: To provide a method for recovering hydrofluoric acid, which is a batch-type hydrofluoric acid recovery method for recovering purified hydrofluoric acid from a hydrofluoric acid waste solution discharged from the etching process of a glass substrate, or the like by a distillation method, and by which production of scales is completely suppressed and the purified hydrofluoric acid containing further reduced impurities can be recovered in a high yield, and with which it is possible to simplify an apparatus.
SOLUTION: In the method for recovering the hydrofluoric acid, crude hydrofluoric acid is taken out as vapor by heating a hydrofluoric acid waste solution in an evaporation pot (1), and at the same time, in recovery operations for recovering distillates by distilling the crude hydrofluoric acid with a distillation tower (2), the distillate is recovered as recovery water when the concentration of hydrogen fluoride in the distillate is not higher than the upper limit of the concentration of hydrogen fluoride in the recovery water, the distillate is recovered as an intermediate solution when the concentration of hydrogen fluoride in the distillate is not lower than the upper limit of the concentration of hydrogen fluoride in the recovery water and lower than the concentration of hydrogen fluoride in the hydrofluoric acid to be recovered, and the distillate is recovered as the purified hydrofluoric acid when the concentration of hydrogen fluoride in the distillate is not lower than the concentration of hydrogen fluoride in the hydrofluoric acid to be recovered. Further, in the method, sulfuric acid is added to the hydrofluoric acid waste solution of the distillation tower (2) in an amount sufficient to suppress the deposition of metal components.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种回收氢氟酸的方法，该方法是从由玻璃基板的蚀刻工艺排出的氢氟酸废液中回收纯化氢氟酸的间歇式氢氟酸回收方法，或者通过蒸馏法，通过其完全抑制氧化皮的生成，可以高收率地回收含有进一步还原的杂质的纯化氢氟酸，并且可以简化装置。解决方案：在回收氢氟酸的方法中，通过加热蒸发罐（1）中的氢氟酸废液，蒸馏除去粗氢氟酸，同时在回收馏出物的回收操作中用蒸馏塔（2）蒸馏粗制氢氟酸，当馏出物中的氟化氢浓度不高于回收水中氟化氢浓度的上限时，馏出物作为回收水回收，馏出物为当馏出物中的氟化氢浓度不低于回收水中的氟化氢浓度的上限并且低于待回收的氢氟酸中的氟化氢浓度时，作为中间溶液回收，馏出物当馏出物中的氟化氢浓度不低于c时，作为纯化氢氟酸回收在待回收的氢氟酸中氟化氢的浓度。此外，在该方法中，将硫酸以足以抑制金属成分沉积的量添加到蒸馏塔（2）的氢氟酸废液中。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2005238220A Apparatus and method for recovering n-methyl-2-pyrrolidone 有权
标题翻译：用于回收N-甲基-2-吡咯烷酮的装置和方法
公开(公告)号：JP2005238220A
公开(公告)日：2005-09-08
申请号：JP2004373056
申请日：2004-12-24
申请人： Ryoka Forward Kk , 菱化フォワード株式会社
发明人： KAMEYAMA KAORU , HIROSE EIICHI , SHIRAISHI ATSUSHI
IPC分类号： C07D207/267 , B01D53/14 , B01D53/72 , B01D53/77 , H01M10/54
CPC分类号： Y02W30/84
摘要： PROBLEM TO BE SOLVED: To reduce the amount of N-methyl-2-pyrrolidone remaining in waste gas much more by efficiently recovering N-methyl-2-pyrrolidone in waste gas.
SOLUTION: This apparatus for recovering N-methyl-2-pyrrolidone is provided with a plurality of absorption parts to each of which the waste gas accompanied with N-methyl-2-pyrrolidone and water or a water-based liquid are fed to bring them into contact with each other so that N-methyl-2-pyrrolidone is absorbed into the water or the water-based liquid. A packing material is packed in each of the absorption parts. The absorption parts are arranged in series.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过有效地回收废气中的N-甲基-2-吡咯烷酮来减少废气中剩余的N-甲基-2-吡咯烷酮的量更多。解决方案：这种用于回收N-甲基-2-吡咯烷酮的装置设置有多个吸收部分，其中每个吸收部分伴随着N-甲基-2-吡咯烷酮和水或水基液体的废气被进料使它们彼此接触，使得N-甲基-2-吡咯烷酮被吸收到水或水基液体中。包装材料被包装在每个吸收部分中。吸收部分串联排列。版权所有（C）2005，JPO＆NCIPI

3. 发明专利

JP2006076811A Method for recovering hydrofluoric acid 有权
标题翻译：回收氢氟酸的方法
公开(公告)号：JP2006076811A
公开(公告)日：2006-03-23
申请号：JP2004260516
申请日：2004-09-08
申请人： Mitsubishi Chemical Engineering Corp , Nippon Refine Kk , Ryoka Forward Kk , 三菱化学エンジニアリング株式会社 , 日本リファイン株式会社 , 菱化フォワード株式会社
发明人： MIYATA KENYO , KAMEYAMA KAORU , KAWASE YASUHITO
IPC分类号： C01B7/19
摘要： PROBLEM TO BE SOLVED: To provide a method for recovering hydrofluoric acid from a hydrofluoric acid waste solution exhausted, e.g., from an etching stage for a glass substrate where scaling is not generated, and refined hydrofluoric acid in which impurities are further reduced can be recovered at a high yield.
SOLUTION: The method for recovering hydrofluoric acid in which hydrofluoric acid is recovered from a metal component-containing hydrofluoric acid waste solution by a distillation method is provided with: a crude hydrofluoric acid evaporation stage where a hydrofluoric acid waste solution is fed to an evaporation kiln (1) and is heated, thus the crude hydrofluoric acid is recovered as a vapor and further the concentrated waste solution is separated; a first distillation stage where the crude hydrofluoric acid is distilled in a first distillation column (21), and is separated into concentrated hydrofluoric acid and recycled water; and a second distillation stage where the concentrated hydrofluoric acid is further distilled in a second distillation column (22), and is separated into refined hydrofluoric acid and the waste solution. Then, sulfuric acid by an amount sufficient for suppressing the precipitation of metal components is added to the hydrofluoric acid waste solution in the crude hydrofluoric acid evaporation stage.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：待解决的问题：提供一种从不产生结垢的玻璃基板的蚀刻阶段排出的氢氟酸废液中回收氢氟酸的方法以及进一步减少杂质的精制氢氟酸可以高产率回收。解决方案：通过蒸馏法从含金属成分的氢氟酸废液中回收氢氟酸的氢氟酸的回收方法为：将氢氟酸废液进料到粗氢氟酸蒸馏阶段蒸发窑（1），被加热，因此原油氢氟酸作为蒸气回收，并进一步分离浓缩的废液; 在第一蒸馏塔（21）中蒸馏粗氢氟酸并分离成浓氢氟酸和再循环水的第一蒸馏阶段; 和第二蒸馏阶段，其中在第二蒸馏塔（22）中进一步蒸馏浓缩的氢氟酸，并将其分离成精制氢氟酸和废溶液。然后，在粗氢氟酸蒸发阶段向氢氟酸废液中加入足以抑制金属成分析出量的硫酸。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP3869533B2 Liquid dispensing apparatus for material and / or heat exchange column 失效
公开(公告)号：JP3869533B2
公开(公告)日：2007-01-17
申请号：JP24398397
申请日：1997-09-09
申请人：菱化フォワード株式会社
发明人：豊前田
IPC分类号： F28F25/04 , B01D3/32 , B01J4/00

5. 发明专利

JP3538223B2 The wall-flow collector fluid device for material and / or heat exchange column 失效
公开(公告)号：JP3538223B2
公开(公告)日：2004-06-14
申请号：JP14142994
申请日：1994-06-23
申请人：豊前田 , 菱化フォワード株式会社
发明人：豊前田
IPC分类号： F28F25/00 , B01D3/32 , B01J10/00 , B01J10/02 , B01J19/32
CPC分类号： B01J19/325 , B01J19/32

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