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    • 2. 发明专利
    • Micro-electro-machine capacitor microphone
    • 微电机电容麦克风
    • JP2011244448A
    • 2011-12-01
    • JP2011106244
    • 2011-05-11
    • National Tsing Hua Univ國立清華大學
    • FANG WEI LUNTAN CHUN-KAI
    • H04R19/04H04R19/01
    • H04R7/16B81B3/0072B81B2201/0257B81B2203/0127B81B2203/0307H04R19/005H04R19/04
    • PROBLEM TO BE SOLVED: To provide a micro-electro-machine capacitor microphone.SOLUTION: A micro-electro-machine capacitor microphone (20, 30) solves a stress residual problem and improves a microphone sensitivity. The microphone includes a support (27) and a vibrating film (22). The support (27) supports a central portion of the vibrating film (22), thereby excluding and discharging a stress that the vibrating film (22) generates during a thermal process, maintaining the vibrating film (22) flat, and improving a precision of electrostatic capacitance detection. Furthermore, the microphone may include a rigid vibrating film (32) and an elastic component (33), and the rigid vibrating film (32) is installed on the elastic component (33), so that the rigid vibrating film (32) is moved parallel in the direction of a back electrode (34) by elastic operation of the elastic component (33), an electrostatic capacitance change between the rigid vibrating film (32) and the back electrode (34) is acquired, and a relatively high detection sensitivity is provided.
    • 要解决的问题:提供微电机电容麦克风。

      解决方案:微电机电容麦克风(20,30)解决了应力残留问题,提高了麦克风灵敏度。 麦克风包括支撑件(27)和振动膜(22)。 支撑件(27)支撑振动膜(22)的中心部分,从而排除和排出振动膜(22)在热处理过程中产生的应力,保持振动膜(22)平坦,并提高精度 静电电容检测。 此外,麦克风可以包括刚性振动膜(32)和弹性部件(33),刚性振动膜(32)安装在弹性部件(33)上,刚性振动膜(32)移动 通过弹性部件(33)的弹性操作在背电极(34)的方向上平行,刚性振动膜(32)和背电极(34)之间的静电电容变化被获取,并且具有较高的检测灵敏度 被提供。 版权所有(C)2012,JPO&INPIT