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    • 3. 发明专利
    • Method for creating calibration curve and destructive testing apparatus
    • 用于创建校准曲线和破坏性测试装置的方法
    • JP2014002119A
    • 2014-01-09
    • JP2012139230
    • 2012-06-20
    • Nippon Api Corp株式会社日本エイピーアイ
    • MIZOGAMI KAZUAKI
    • G01N27/62
    • PROBLEM TO BE SOLVED: To accurately measure a small amount of a gas component generated by destructing an inspection target.SOLUTION: When measuring an impurity component in argon gas by an atmospheric pressure ionization mass spectrometer 28, all ions are not scanned but only M/z=40(Ar) and M/z=80(Ar) of a parent ion and a necessary impurity component to be measured are scanned, relative ion intensity is found out by dividing ion intensity of the impurity component to be measured by the ion intensity of the parent ion to be a denominator, and an impurity concentration is calculated by multiplying the relative ion intensity of the impurity component to be measured by a concentration conversion factor. Since all scanning is not performed, a measurement interval of once per 60 sec is improved to a measurement interval of once per 1 sec.
    • 要解决的问题:精确测量由检测目标破坏产生的少量气体成分。解决方案:当通过大气压电离质谱仪28测量氩气中的杂质成分时,所有离子都不被扫描,只有M / 扫描母体离子的z = 40(Ar)和M / z = 80(Ar)和待测量的必需杂质成分,通过用离子对待测量的杂质成分的离子强度除以相对离子强度 母离子的强度为分母,杂质浓度通过将待测量的杂质成分的相对离子强度乘以浓度换算系数来计算。 由于不执行全部扫描,因此将每60秒一次的测量间隔提高到每1秒一次的测量间隔。
    • 6. 发明专利
    • Gas analysis method, gas analysis apparatus, and inspection apparatus using it
    • 气体分析方法,气体分析装置和检查装置
    • JP2005300288A
    • 2005-10-27
    • JP2004115123
    • 2004-04-09
    • Nippon Api Corp株式会社日本エイピーアイ
    • MIZOGAMI KAZUAKI
    • G01N27/62G01N27/68
    • PROBLEM TO BE SOLVED: To analyze gases continuously for a long time by eliminating the need for an adsorbent even when substances except moisture contents in gases to be measured are to be detected.
      SOLUTION: A mass spectroscope 2 comprises an ionizing part 3 for introducing a gas to be measured, and a mass spectroscopic part 4 for analyzing ions ionized by the ionizing part 3. The ionizing part 3 comprises a primary ionizing chamber 3a, and a secondary ionizing chamber 3b. Steam generated by a steam generating device 6 is introduced to the primary ionizing chamber 3a with a carrier gas from a cylinder 12. Steam generated by a steam generating device 5 is introduced to the secondary ionizing chamber 3b with a carrier gas from a cylinder 11 in addition to a sample gas from a sample cylinder 8.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:即使检测到待测气体中的水分含量以外的物质,也不需要吸附剂,即使长时间连续分析气体。 解决方案:质谱仪2包括用于引入待测气体的电离部分3和用于分析由离子化部分3离子化的离子的质谱分析部分4.电离部分3包括一次离子化室3a和 二次电离室3b。 由蒸汽发生装置6产生的蒸汽用来自气缸12的载气引入一次离子化室3a中。由蒸汽发生装置5产生的蒸汽用来自气缸11的载气引入二次电离室3b 除了来自样品筒8的样品气体外。版权所有(C)2006,JPO&NCIPI