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    • 83. 发明专利
    • PRODUCTION OF THREE-DIMENSIONAL PATTERN
    • JPS6075804A
    • 1985-04-30
    • JP18309483
    • 1983-10-03
    • NIPPON TELEGRAPH & TELEPHONE
    • YAMADA TAKESHIKUROKAWA TAKASHIOONO MASAYOSHITATE AKIYUKI
    • G02B6/04G02B6/12G02B6/13
    • PURPOSE:To gel and dry alcoholate in the part irradiated with light and to manufacture easily a three-dimensional pattern by installing base plates into a liquid consisting principally of metallic alcoholate, org. solvent and water and sinking gradually the base plates while irradiating a pattern by parallel light to the liquid surface. CONSTITUTION:Base plates 2 are installed into a liquid 5 consisting principally of at least one kind of metallic alcoholate, an org. solvent and water and while patterned parallel light 6 is irradiated to the surface of the liquid 5, the base plates 2 are gradually sunk into the liquid 5. The metallic alcoholate in the part irradiated with the light is thereby gelled and thereafter the base plates are taken out of the liquid 5 and are dried to shrink to a desired shape thereby manufacturing a three-dimensional pattern. The gel pattern obtd. in such a way can be gelled and embedded together with the other different compsn. into the base plates by dipping the plates in the liquid mixed with said compsn. The three-dimensional pattern is easily formed with the simple device without requiring high temp. as mentioned above, by which the three-dimensional pattern having good accuracy is obtd. and the method is usable for manufacturing, for example, a rod lens array, etc.
    • 86. 发明专利
    • PRODUCTION OF MULTILAYERED THIN FILM
    • JPS6017078A
    • 1985-01-28
    • JP12468583
    • 1983-07-11
    • NIPPON TELEGRAPH & TELEPHONE
    • TATE AKIYUKIYAMADA TAKESHIKUROKAWA TAKASHIOONO MASAYOSHI
    • C23C16/48C23C16/44C23C16/455C23C16/54G02B1/10G02B1/11G02B1/115
    • PURPOSE:To form easily multilayered thin films of which the refractive indices change continuously or discretely at a low temp. by forming continuously the thin films by using a photovapor reaction and changing the compsn. of reactive gases so that the thin films are formed uniformly in a large area. CONSTITUTION:A gaseous phase reactant and an oxygen-contg. precursor are mixed with a diluting gas, carrier gas and sensitizing material to a prescribed compsn. ratio in feeder systems 7.1-7.7 including a control system for the flow rate thereof and are introduced into a reaction vessel 4 contg. a sample 1 on a susceptor 3. An electromagnetic wave 2 is then made incident to the vessel 4 through the light transmission window 5 thereof and the deposition of the multilayered dielectric film is started. The compsn. of the gaseous phase reactant in the above-described gaseous mixture is thereafter continuously changed by controlling the flow rate of the gases for the respective components with a flow rate control device in each device 7. The multilayered dielectric films of which the refractive index distributions are successively changed are thus formed on the substrate. The multilayered dielectric films having various refractive index distributions are obtd. according to the way of controlling the flow rate of the above-described gases in the above-mentioned way.