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81. 发明专利

JPH08309686A ANGLE DISPLACING MECHANISM 失效
公开(公告)号：JPH08309686A
公开(公告)日：1996-11-26
申请号：JP13990195
申请日：1995-05-15
申请人： MITSUI KIMIYUKI , MITSUBISHI HEAVY IND LTD
发明人： MITSUI KIMIYUKI , TAWARA SATOSHI , GOTO TAKAYUKI
IPC分类号： B23H7/26 , B25J15/08 , B25J19/00
摘要： PURPOSE: To provide an angle displacing mechanism smaller in size, large in generating force and capable of controlling an angle high-accurately. CONSTITUTION: A device comprises a work tool part 1 serving as an angle displacing objective part connected by a universal joint 3 angularly displaceably relating to a main unit 2, moving unit 11 stored in the main unit 2 to be connected to the work tool part 1 by piano wires 12, 13 also to be extended/ contracted by changing voltage applied to an extension/contraction mechanism use piezoelectric element 22 and a piezoelectric drive mechanism 8 comprising holding mechanisms 18, 19 of changing force of fixing the moving unit 11 by changing voltage applied to holding mechanism use piezoelectric elements 24, 25.

82. 发明专利

JPH08203810A DRAWING DEVICE 失效
公开(公告)号：JPH08203810A
公开(公告)日：1996-08-09
申请号：JP1234795
申请日：1995-01-30
申请人： MITSUBISHI HEAVY IND LTD
发明人： ASANO SHIN , GOTO TAKAYUKI , TAWARA SATOSHI , TSUNO TAKESHI
IPC分类号： G03F7/20 , G03F9/02 , H01L21/027
摘要： PURPOSE: To form a line pattern on a large area by measuring an error between the absolute position of a workpiece measured with an absolute position measuring means and a desired position, by adding to it a relative positional signal measured with a relative position measuring means, inputting the signal into a coarse movement means, and further inputting the error into a fine movement means. CONSTITUTION: A work 113, which comprises a fine movement means 114a and a coarse movement means 114b, is placed on a movement means 114 which is moveable in the X-Y direction. A control means 118 compares the absolute position of the workpiece 113 measured with an absolute position means 117 to a desired position and generates an error signal. Further, a relative positional signal measured with a relative positional measuring means 116 is added to it and imputed into the coarse movement means 114b. Also, the error signal is inputted into the fine movement means 114a. In this way, the fine movement means 114a and the coarse movement means 114b are subjected to cooperative positional control to form a line pattern on a large area.

83. 发明专利

JPH08105733A STRAIGHTNESS MEASURING METHOD 失效
公开(公告)号：JPH08105733A
公开(公告)日：1996-04-23
申请号：JP23989494
申请日：1994-10-04
申请人： MITSUBISHI HEAVY IND LTD
发明人： HASEGAWA OSAMU , ASANO SHIN , GOTO TAKAYUKI
IPC分类号： G01B11/30 , B23Q17/24
摘要： PURPOSE: To obtain a straightness measuring method in which a displacement in a right-angled direction is measured continuously and in which a straightness measurement can be performed with high accuracy by a method wherein the displacement, in the inner-face direction of a diffraction grating, which is generated when a rectlinear movement mechanism is displaced perpendicularly to its movement direction is detected as a change in the phase of interference light. CONSTITUTION: Single-frequency coherent light 2 from a light source 1 is made incident perpendicularly to a diffraction grating 6 on a rectlinear movement mechanism 8. Then, + first-order diffraction light 9a and -first-order diffraction light 9b which are generated in the diffraction grating 6 are made parallel, they are condensed by a condensing lens 16 so as to interfere, and only interference light having a limited phase component is selectively taken out through a slit 17 so as to be incident on a light detection part 18. When the rectilinear movement mechanism 8 is displaced to a direction perpendicular to its movement direction, a displacement in a right-angled direction is generated even in the diffraction grating 6. When the displacement in the inner-face direction of the diffraction grating 6 is detected as the phase change amount ϕof the interference light which is incident on the light detection part 18, the displacement amount, i.e., the straightness, in the right-angled direction of the rectlinear movement mechanism 8 can be measured with high accuracy and continuously.

84. 发明专利

JPH0635081B2 失效
公开(公告)号：JPH0635081B2
公开(公告)日：1994-05-11
申请号：JP8886687
申请日：1987-04-13
申请人： MITSUBISHI HEAVY IND LTD
发明人： OOMORI SHUNJI , EGAWA TSUNEO , GOTO TAKAYUKI , OGAWA MAKOTO
IPC分类号： B23B1/00 , B23B27/00 , B23B27/16 , B23Q1/00 , B23Q1/72

85. 发明专利

JPH0571649A DOUBLE-SEAL TYPE BIPLANE VALVE 失效
公开(公告)号：JPH0571649A
公开(公告)日：1993-03-23
申请号：JP2621091
申请日：1991-02-20
申请人： MITSUBISHI HEAVY IND LTD
发明人： GOTO TAKAYUKI
IPC分类号： F16K1/22 , F16K1/226
摘要： PURPOSE:To prolong the service life of sheet packing as well as to reduce the capacity of a driver for a valve element. CONSTITUTION:Two identical valve plates 4, being attached with sheet packing 6b on the outer circumference and installed in parallel with each other in holding a valve stem 2 between, are engaged with respective valve seats 10a, 10b via the sheet packing 6b while two valve plates 4a, 4b of a double-seal type biplane valve, rotating with the valve stem 2 as the center and opening in one direction alone, are constituted in decentering them to linear symmetry centering on the valve stem 2 as making the opening side outward with each other together with respective these valve seats 10a, 10b.

86. 发明专利

JPH0526273A VIBRATION DAMPING DEVICE 失效
公开(公告)号：JPH0526273A
公开(公告)日：1993-02-02
申请号：JP18461491
申请日：1991-07-24
申请人： MITSUBISHI HEAVY IND LTD
发明人： GOTO TAKAYUKI
IPC分类号： F16F7/08 , F16F15/02
摘要： PURPOSE:To facilitate damping of vibration of an object, such as the moving rod of a moving device for vacuum or a positioning device for vacuum, being easily damaged by vibration. CONSTITUTION:A vibration damping device comprises engaging members 10a and 10b engaged with an object needing damping of vibration and contact members 11a-11d held in a state to make contact with the engaging members 10a and 10b in a manner to be slidable through vibration and having a given mass.

87. 发明专利

JPH0419033A MICRO-LOCATIONAL DEVICE 失效
公开(公告)号：JPH0419033A
公开(公告)日：1992-01-23
申请号：JP12012290
申请日：1990-05-11
申请人： AGENCY IND SCIENCE TECHN , MITSUBISHI HEAVY IND LTD
发明人： OKAZAKI YUICHI , ASANO SHIN , GOTO TAKAYUKI
IPC分类号： H01L21/66 , B23Q5/34
摘要： PURPOSE:To enhance the locational accuracy by providing an elastic deforming member to support a member to be driven and an X-axis and a Y-axis actuator, and arranging either of the actuators on both sides in pair as pinching the center line of the driven member stretching in the direction of the motion axis. CONSTITUTION:Within a frame 12 a table 11 is supported by an elastic deforming member 13 in such a way as movable along the X-axis and Y-axis, and energization in the X and Y-axis directions is generated by X-asix and Y-asix actuators 14, 15, 16. The X-axis actuator 14 is mounted on the driving center line stretching in the X-axis direction on this table 11, while the Y-axis actuators 15, 16 are installed in such a way as symmetrical about the driving center line in parallel with the Y-axis and in such a way that the driving shaft will become parallel. One X-axis displacement sensor 17 is arranged on the driving center line stretching along the X-axis on the table 11, while another X-axis displacement sensor 18 is arranged apart from the first named sensor 17 in parallel with the X-axis. On the other hand, a Y-axis displacement sensor 19 is arranged on the driving center line stretching along the Y-axis.

88. 发明专利

JPH03154385A MANUFACTURE OF PHOTOVOLTAIC GENERATOR 失效
公开(公告)号：JPH03154385A
公开(公告)日：1991-07-02
申请号：JP29221389
申请日：1989-11-13
申请人： MITSUBISHI HEAVY IND LTD
发明人： ASANO SHIN , GOTO TAKAYUKI , MORITA SHOJI
IPC分类号： H01L31/04
摘要： PURPOSE:To convert the energy of a laser beam into heat efficiently thereby reducing the loss by reflection so as to improve processing efficiency by applying a light absorbing body at the laser beam irradiation part of a rear electrode. CONSTITUTION:A transparent electrode 2, an amorphous semiconductor layer 3, and a rear electrode 4 are stacked in order on a glass board 1, whereby plural pieces of photoelectric transfer elements are connected in series. Furthermore, black silicon rubber is applied at the laser beam irradiation position of the rear electrode 4. The black silicon rubber is one which functions as a light absorbing body to the laser beam 6, and converts the laser beam 6 into heat efficiently, accordingly for the laser power density required for dividing the rear electrode 4, the processing can be done at the power density at a level of about one-tenth, and processing efficiency improves. Hereby, the absorption of the laser beam to the rear electrode 4 can be elevated, and the loss by reflection is reduced, and also the work efficiency can be elevated.

89. 发明专利

JPH01301075A DOUBLE STRUCTURAL GRINDING WHEEL FOR ON-LINE ROLL GRINDING 失效
公开(公告)号：JPH01301075A
公开(公告)日：1989-12-05
申请号：JP13122088
申请日：1988-05-28
申请人： NORITAKE CO LTD , MITSUBISHI HEAVY IND LTD
发明人： HENMI YOSHINORI , TANABE AKIRA , SAWAKE KOICHI , HAYASHI KANJI , GOTO TAKAYUKI , MATSUSHIMA HISAO
IPC分类号： B24D7/14
摘要： PURPOSE:To regulate a relative movement in the shaft center direction between two grinding wheels as well as to surely prevent an outer circumferential side stone from slipping off to the tip end side in the shaft center direction by forming a mating face between these inner and outer circumferential side stones into an uneven or tapered form being engaged with each other. CONSTITUTION:In such a state that a tip end face 18 of a cylindrical grindstone is pressed to an outer circumferential surface of a roll, sliding friction is produced in an interval between this roll outer circumferential surface and the stone, and the roll outer circumferential surface is ground by this tip end face with on-line. At this time, this grindstone consists of a cylindrical inner circumferential side stone 12 and an outer circumferential stone 14 solidly attached tight in a state of being coherent to the outer circumferential side of this inner side stone 12. A ring projection 20 being engaged with a ring groove 16 formed on an outer circumferential surface of this inner side stone 12 is formed on an inner circumferential surface of the outer side stone 14,and a relative movement in the shaft center direction between these inner and outer side stones 12 and 14 is regulated by engagement between this ring grove 16 and a ring projection 20. In consequence, the outer side stone 14 is not separated from the inner side stone 12, and it is in no case slipped off to the tip side in the shaft center direction.

90. 发明专利

JPH01252303A CUTTING TOOL TIP 失效
公开(公告)号：JPH01252303A
公开(公告)日：1989-10-09
申请号：JP7482088
申请日：1988-03-30
申请人： MITSUBISHI HEAVY IND LTD
发明人： YAMASHITA NOBUKI , WADA TETSUYOSHI , GOTO TAKAYUKI
IPC分类号： B23B27/14
摘要： PURPOSE:To enhance the heat resistance of a tip and the cutting accuracy during the cutting operation of hard materials to prolong the life of a cutting tool by forming a CBN layer on the surface of a diamond tip on which a cutting edge is previously formed. CONSTITUTION:A sharp cutting edge is formed on a diamond tip 14. The surface of the diamond tip 14 is covered by a cubic boron nitride (CBN) layer 15. As a result, even when relatively hard materials such as iron, etc. are cut, the heat resistance of the tip can be remarkably improved to prolong the life of a cutting tool, and very high cutting accuracy can also be obtained.

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