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    • 82. 发明专利
    • TREATMENT FOR HARDENING SURFACE
    • JPH07258847A
    • 1995-10-09
    • JP5201994
    • 1994-03-23
    • KOBE STEEL LTD
    • TOMARI HARUOSUGIZAKI YASUAKIYASUNAGA TATSUYAKAWADA KAZUHISA
    • C23C14/48
    • PURPOSE:To form a stable modified layer having sufficiently high hardness and causing no problem of peeling on the surface of a metallic base material by vacuum deposition and ion implantation. CONSTITUTION:The surface of a metallic base material is subjected to dinamic ion mixing treatment in which vacuum deposition and ion implantation are simultaneously executed. Furthermore, at the time of the dinamic ion mixing treatment, the ratio of the number of ions to be implanted to the number of atoms to be vacuum-deposited reaching the metallic matrix (the ratio of Ion/Atom) is regulated to >=1.5, and a modified layer constituted of a mixed hardened layer of a vacuum-deposited hardened layer, implanted elements under the vacuum-deposited hardened layer and matrix elements is formed on the surface of the metallic matrix. By increasing the ratio of ion/atom at the time of the dinamic ion mixing treatment, the outer direction transporting phenomenon of the matrix atoms in which the matrix atoms are moved to the side of the vacuum-deposited film is made to occur, and a stable modified layer having a gradient structure gradually changed from the base material to the film compsn. and free from the generation of peeling is formed, by which a surface effect member stably excellent in surface hardness and wear resistance can be obtd.