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81. 发明专利

JPH07318341A RECTILINEAR MOTION APPARATUS EQUIPPED WITH DEFORMATION-AMOUNT DETECTION MEANS AND WITH DISPLACEMENT SCALE 失效
公开(公告)号：JPH07318341A
公开(公告)日：1995-12-08
申请号：JP13117194
申请日：1994-05-20
申请人： HATAMURA YOTARO
发明人： HATAMURA YOTARO
IPC分类号： G01B21/32 , B23Q17/00
摘要： PURPOSE:To obtain a rectilinear motion apparatus in which a change in the temperature of a rectilinear shaft member due to a change in an environmental temperature, due to heat generated by a motor and the like is obtained as information and in which a tool, a table or the like is positioned precisely by a method wherein a deformation-amount detection means is installed at the rectilinear shaft member. CONSTITUTION:A guide device 10 for rolling-contact-type rectilinear motion is constituted of a track rail 11 as a rectilinear shaft member and of a sliding stand 13 which is installed on the track rail 11 so as to be freely movable via a rolling body 12 such as a ball, a roller or the like. Then, a deformation-amount detection means 1 which detects the absolute deformation amount of the track rail 11 is installed at the track rail. The deformation-amount detection means 1 is constituted of a criterion member 2 which is installed in parallel with a part, where the deformation amount of the track rail 11 is to be detected, and which is held in a state that no force acts and of a displacement sensor 3 which detects the relative displacement amount of the criterion member 2 and that of the track rail 11. Thereby, only when the criterion member 2 and the track rail 11 are arranged in parallel and their relative displacement is detected, the absolute displacement amount in the axial direction of the track rail 11 can be recognized.

82. 发明专利

JPH07185458A DEVICE FOR GENERATING LOW FREQUENCY PULSATING CURRENT 失效
公开(公告)号：JPH07185458A
公开(公告)日：1995-07-25
申请号：JP35159793
申请日：1993-12-28
申请人： HATAMURA YOTARO , MATSUI MFG CO
发明人： HATAMURA YOTARO
IPC分类号： B06B1/14
摘要： PURPOSE:To generate a significant oscillation by driving an oscillator supported by a spring oscillation system using a drive means with low amplitude. CONSTITUTION:An oscillation generating device 1 is connected to a piston rod R1 through a coil spring S1, and the piston rod R1 is connected and firmly fixed to a piston P1 inside a cylinder C1. A coil spring S2 is attached in an aerial direction between the piston P1 and the cylinder C1 to support the piston P1. A spring oscillation system is formed by a mass such as the piston P1 and the rod R1, and the coil spring S2. If the oscillation generating device 1 is driven by an oscillation frequency close to the intrinsic oscillation frequency of the spring oscillation system, the oscillation is transmitted to the rod R1 and the piston P1 through the coil spring S1, and the piston P1 moves back and forth to generate an oscillation to allow a pulsating current to be output from a port H1.

83. 发明专利

JPH0750323A MANUFACTURE OF CANTILEVER OF PROBE MICROSCOPE DEVICE 失效
公开(公告)号：JPH0750323A
公开(公告)日：1995-02-21
申请号：JP20530193
申请日：1993-08-19
申请人： HATAMURA YOTARO , HITACHI CONSTRUCTION MACHINERY
发明人： HATAMURA YOTARO , ONOZATO AKIMASA , KURODA HIROSHI
IPC分类号： G01B21/30 , G01Q60/38 , G01Q70/16 , H01J37/28 , H01L21/66
摘要： PURPOSE:To provide a manufacturing method of a cantilever of a probe microscope which enables arbitrary formation of a chip which is easy to manufacture and suitable for an application purpose. CONSTITUTION:A silicon oxide thin film 101 which becomes a lower lever and a single-crystal silicon thin film 102 which becomes a strain gauge are formed on a silicon water 100, a wiring layer 105 is applied, an opening 55 is shaped by etching and a PIQ resin layer 104, and a silicon oxide thin film 105 which becomes an upper lever are formed. A hole 106 is shaped from the layer 105 to the silicon wafer 100, a silicon nitride thin film 108 is formed in an inner wall thereof and the PIQ resin layer 104 and the silicon wafer 100 are lastly removed by solution.

84. 发明专利

JPH0724677A MOVEMENT SYSTEM 失效
公开(公告)号：JPH0724677A
公开(公告)日：1995-01-27
申请号：JP16630993
申请日：1993-06-12
申请人： HATAMURA YOTARO
发明人： HATAMURA YOTARO
IPC分类号： B23Q1/00 , B23Q1/25 , B23Q1/44 , B23Q1/60 , B81C99/00
摘要： PURPOSE:To concurrently perform various kinds of working while fitting work to an working object by constituting a mount so that the surroundings of the working object can be moved on a solid surface including the rotation surface of the working object and the movement of devices fitted to the mount can be concentrated on the working object. CONSTITUTION:Mounts 5-8 of devices 3 and 4 necessary to work such as observation, analysis, and working, etc., are supported via track members (rail) 10-15 for movably guiding the mounts 5-8 so that they can be moved on a solid surface including a rotation surface around a worked object 9, and the respective mounts 5-8 are driven by a driving means while ensuring a working space 16 in the middle. That is, an observing device, an analyzing device, and various working tools are provided so as to be concentrated on the worked object 9 in the middle. The worked object 9 is loaded on a working stage 17 vertically movable on a Z axis an horizontally movable on a X-Y axis. Such a working system is preferably housed in a chamber 18 constituting a closed surface wherein a working atmosphere can be changed.

85. 发明专利

JPH06307851A CANTILEVER AND MINUTE PROCESSING DEVICE USING IT 失效
公开(公告)号：JPH06307851A
公开(公告)日：1994-11-04
申请号：JP10139393
申请日：1993-04-27
申请人： HATAMURA YOTARO , HITACHI CONSTRUCTION MACHINERY
发明人： HATAMURA YOTARO , KURODA HIROSHI
IPC分类号： G01B21/30 , B82B3/00 , G01Q20/04 , G01Q60/38 , G01Q80/00 , H01J37/28
摘要： PURPOSE:To provide a cantilever, which can hold a chip at a specified angle relative to a specimen even though an acting force is generated between the specimen and chip, and provide a fine processing device in which the cantilever is incorporated. CONSTITUTION:The arrangement according to the present invention comprises an upper lever 2 installed in a single piece with a base flat plate 8a, a lower lever 1 installed in a single piece with another base flat plate 8b and having a cavity 12 in the neighborhood of the central part, a lever body 14 formed by locating the two levers in parallel, and a sharp chip 3 which is supported through a pillar 4 in the neighborhood of the foremost of the lever body 14. When an acting force is generated between the specimen and the chip 3, the levers 1, 2 deflect at two places in one identical amount parallel with each other in such a way that the cavities 12a, 12b of the lower lever 1 serve as fulcra, and thereby it is possible to hold the chip at a specified angle relative to the specimen even in such case the acting force is generated. Thereby processing of the specimen can also be done by the chip 3 while this angle holding function is utilized.

86. 发明专利

JPH06230827A FINE POSITIONING DEVICE 失效
公开(公告)号：JPH06230827A
公开(公告)日：1994-08-19
申请号：JP22583293
申请日：1993-09-10
申请人： HATAMURA YOTARO , HITACHI CONSTRUCTION MACHINERY
发明人： HATAMURA YOTARO , ONO KOZO
IPC分类号： G05D3/00 , H02N2/00
摘要： PURPOSE:To provide a fine positioning device capable of executing multi-axis translation displacement without generating interference displacement. CONSTITUTION:A parallel deflected beam displacing mechanism 22x is constituted of rigid body parts 35, 36 and a straight driving part 50x, a parallel deflected beam displacing mechanism 22y is constituted of rigid body parts 34, 35 and a straight driving part 50y and a parallel deflected beam displacing mechanism 22z is constituted of rigid body parts 33, 34 and a straight driving part 50z. Respective straight driving parts 50x, 50y, 50z are constituted of actuators loaded between both the rigid body parts, and when the actuators are driven, curved deformation is generated in the parallel deflected beams of the mechanisms 22x, 22y, 22z and the mechanisms 22x, 22y, 22z are subjected to translation displacement in their reference directions (x, y and z axial directions).

87. 发明专利

JPH06170694A WORK MACHINE 失效
公开(公告)号：JPH06170694A
公开(公告)日：1994-06-21
申请号：JP15110191
申请日：1991-05-27
申请人： HATAMURA YOTARO , HAMAI SANGYO
发明人： HATAMURA YOTARO
IPC分类号： B23Q15/18
摘要： PURPOSE:To improve machining accuracy by real time correcting relative posi tion displacement between a machining tool and a workpiece caused by heat generation and machining reaction force generated during machi0iflg. CONSTITUTION:A sensor 23 for detecting heat generation, machining reaction force and deformation is set up in each structural part for supporting a machining tool of a work machine and a workpiece, and by referring a detection value of the sensor to a data base 32 left as preaccumulated, dimension after machining is reproduced and estimated of a workpiece during the actual machining or machined hereafter. The obtained dimension is compared with target design dimension, to correct, from the compared difference, a command value output from an NC controller 15 to an actuator 21 of the work machine, and relative position displacement between the machining tool and the workpiece is corrected.

88. 发明专利

JPH05288215A 失效
公开(公告)号：JPH05288215A
公开(公告)日：1993-11-02
申请号：JP11529992
申请日：1992-04-09
申请人： HATAMURA YOTARO
发明人： HATAMURA YOTARO
IPC分类号： F16C29/04
摘要： PURPOSE:To provide a rectilinear motion guide apparatus for causing displacement, capable of positioning at high accuracy and high resolving power. CONSTITUTION:A displacement portion 4 is provided in a sliding rest 3. The displacement portion 4 comprises an elastic member which can be deformed in the direction in which displacement is caused and is rigid in other directions and a displacement means 4 for expanding and contracting the elastic member. A displacement detection means 8 for detecting the displacement of the displacement portion 4 or a force detection means 9 for detecting forces is provided. The displacement of the displacement means 4 is adjusted according to values detected by the displacement detection means 8 or force detection means 9.

89. 发明专利

JPH0555263B2 失效
公开(公告)号：JPH0555263B2
公开(公告)日：1993-08-16
申请号：JP4644385
申请日：1985-03-11
申请人： HATAMURA YOTARO , HITACHI CONSTRUCTION MACHINERY
发明人： HATAMURA YOTARO , ONO KOZO
IPC分类号： B23Q5/28 , B23Q1/00 , B23Q1/34 , B23Q1/36 , B23Q5/22 , B25J17/02 , G03F7/20 , H01L21/68 , H02N2/00 , B23Q1/02

90. 发明专利

JPH0493628A TORQUE MEASUREMENT DEVICE 失效
公开(公告)号：JPH0493628A
公开(公告)日：1992-03-26
申请号：JP20676390
申请日：1990-08-06
申请人： HATAMURA YOTARO
发明人： HATAMURA YOTARO
IPC分类号： G01L3/14
摘要： PURPOSE:To enable torque to be detected in a non-contact condition with the simple construction of a detecting device by providing a rotary shaft at one side with a thrust detection section comprising a joint body of a thrust detection section and a structure equivalent to a vertical deflection structure. CONSTITUTION:Torque acts between shaft sections 1a and 1b in an arrow H-direction. A deflection conversion structure A is twisted in the same direction, according to the torque. Concurrently with twisting, the structure A is displaced in a contracting direction by a distance corresponding to the torque. As a result, a rigid section 2b, a torque transmission section B and another rigid section 2c are pulled in an upward direction. This pulling force is transmitted to a vertical deflection structure C and as a result, this structure C elongates, due to the deflection beam C3 thereof. The torque transmission section B is displaced in an upward direction, according to acting torque and a distance between the surface b1 thereof and a detector 3 increases, according to the extent of the displacement. The detector 3 senses the displacement and outputs and electrical signal corresponding thereto.

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