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    • 74. 发明专利
    • METHOD AND DEVICE FOR FORMING FILM ON INSIDE SURFACE OF PIPE-SHAPED BODY AND VESSEL
    • JPH0353071A
    • 1991-03-07
    • JP18591389
    • 1989-07-20
    • NIPPON KOKAN KK
    • TANAKA YUZOSUZUKI MITSUOMIZUNO KENICHIROAKASHI TETSUO
    • C23C16/44C23C16/455
    • PURPOSE:To form the chemical-vapor deposited film having uniform film quality and thickness on the inside surface of the pipe-shaped body by heating the pipe-shaped body and hermetically closing this body to a vacuum state, then supplying previously mixed gaseous raw materials therein at the time of formation of the chemical vapor deposited film on the inside surface of the pipe-shaped body by a vapor reaction. CONSTITUTION:Heaters 12A, 12B are provided over the entire part in the longitudinal direction of the pipe-shaped body P to be formed with the chemical-vapor deposited film by the vapor reaction on the inside surface and the pipe-shaped body P is heated over the entire part thereof to the reaction temp. of the gaseous raw materials or above. The inside of this body is simultaneously evacuated to a vacuum by a vacuum pump 14 and is closed by a stop valve 13. The gaseous raw materials 5A, 5B are once stored at a prescribed volumetric ratio into respective gas reservoirs 8A, 8B and are thereafter mixed at the temp. below the reaction temp. of both gases in a premixing chamber 11. These raw materials are ejected as the gaseous mixture into the pipe-shaped body P in which the vacuum state is maintained. The gaseous mixture diffuses instantaneously into the pipe-shaped body P and reacts on the inside surface of the pipe kept at the reaction temp. or above. The chemical-vapor deposited film having the uniform material quality and thickness is thus formed on the inside surface of the pipe.