会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 67. 发明专利
    • PRODUCTION OF COMPOUND SEMICONDUCTOR SINGLE CRYSTAL
    • JPH0717793A
    • 1995-01-20
    • JP16558993
    • 1993-07-05
    • HITACHI CABLE
    • SUZUKI TAKASHI
    • C30B11/00C30B13/00C30B27/02C30B29/42
    • PURPOSE:To stably obtain a single crystal having a uniformly distributed carbon concn. without deteriorating a graphite jig by using gaseous hydrocarbon having low reactivity with this jig. CONSTITUTION:A GaAs melt 4 is produced in a crucible 2 enclosed by a graphite heater 9. Pure gaseous Ar and gaseous Ar mixture contg. a prescribed amt. of gaseous methane are simultaneously supplied from gas cylinders 12, 13 into a pressure vessel 1. The valves 14, 15 are so controlled that the concn. of the gaseous methane in the atmosphere in the vessel 1 and in-vessel pressure by a gas concn. measuring instrument 19 and a pressure gauge 17 attains prescribed values. The same concn. and the same pressure are maintained in order for the carbon concn. in the crystal to attain the desired value. A seed crystal 8 is immersed into a melt 4 in this state and a GaAs crystal 4 of a prescribed diameter and prescribed length are pulled up. Oxygen is not incorporated into the gaseous methane during growth and, therefore, the oxygen does not come into reaction with the heater 9, etc., and the control of the concn. of the gaseous methane is accurately executed.