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    • 64. 发明专利
    • Surface defect inspection method of disk and inspection device
    • 磁盘和检查装置的表面缺陷检查方法
    • JP2011122998A
    • 2011-06-23
    • JP2009282530
    • 2009-12-14
    • Hitachi High-Technologies Corp株式会社日立ハイテクノロジーズ
    • MOCHIZUKI HIDEKI
    • G01N21/95
    • G11B20/10527G11B19/048G11B20/18G11B2020/1823G11B2220/2516G11B2220/2537
    • PROBLEM TO BE SOLVED: To provide a defect inspection method and an inspection device determining quickly whether a defect on a disk is a circumferential flaw or an island defect. SOLUTION: In this invention, a circumferential flaw is detected in a totalized track domain exceeding a standard deviation value on a defect detection amount (the number of detected defects) classified by radius in defect number histogram data classified by radius. Otherwise, an island defect is detected in a totalized angle domain exceeding a standard deviation value on a defect detection amount classified by angle in defect number histogram data classified by angle. Hereby, since defect detection processing of the circumferential flaw or the island defect can be performed stepwise separately from other defects, even if the number of defects to be detected is increased, a processing load of a data processing device can be reduced. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供缺陷检查方法和检查装置,快速确定盘上的缺陷是圆周缺陷还是岛缺陷。 解决方案:在本发明中,在由半径分类的缺陷数量直方图数据中的半径分类的缺陷检测量(检测到的缺陷的数量)上超过标准偏差值的累计轨迹中检测出周向缺陷。 否则,在以角度分类的缺陷数量直方图数据中的角度分类的缺陷检测量上,超过标准偏差值的总计角度域中检测到岛缺陷。 因此,由于周向缺陷或岛缺陷的缺陷检测处理可以与其他缺陷分开执行,所以即使要检测的缺陷数量增加,也可以减少数据处理装置的处理负担。 版权所有(C)2011,JPO&INPIT