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    • 61. 发明专利
    • Driving method of semiconductor pressure sensor
    • 半导体压力传感器的驱动方法
    • JPS6177734A
    • 1986-04-21
    • JP20008784
    • 1984-09-25
    • Fujikura Ltd
    • OKADA KAZUHIRONURI KENJI
    • G01L9/04G01L9/00G01L9/06
    • G01L9/06
    • PURPOSE:To make the effect of fluctuation in current conduction as small as possible, by applying a pulse current, whose amplitude is larger than that of a rated current, to gage resistors formed in a semiconductor diaphragm when a power source is turned ON. CONSTITUTION:Gage resistors 3a-3d are formed in a semiconductor diaphragm. A bridge circuit BR is constituted of the resistors 3a-3d. When a power source is turned ON, a large current flows to the circuit BR through a capacitor C15 and a variable resistor R2. The resistors 3a-3d are heated, and the temperature of the entire diaphragm is quickly increased to a specified temperature. When the charging of the C15 is finished, a rated current I is supplied to the circuit BR through a constant current circuit 14. Thus the effect of the fluctuation in current conduction can be made as small as possible with respect to the output of a sensor at output terminals 6a and 6b.
    • 目的:为了使导通波动的效果尽可能小,通过施加振幅大于额定电流的脉冲电流,在电源接通时,形成在半导体膜片中的电容器。 规格:量规电阻器3a-3d形成在半导体膜片中。 桥接电路BR由电阻器3a-3d构成。 当电源接通时,大电流通过电容器C15和可变电阻器R2流向电路BR。 电阻器3a-3d被加热,并且整个隔膜的温度快速地增加到指定的温度。 当C15的充电结束时,通过恒流电路14向电路BR提供额定电流I.因此,可以使传导波动的影响尽可能地小于传感器的输出 在输出端子6a和6b处。