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61. 发明专利

JPS61209846A FINE POSITIONING DEVICE 失效
公开(公告)号：JPS61209846A
公开(公告)日：1986-09-18
申请号：JP4644385
申请日：1985-03-11
申请人： HATAMURA YOTARO , HITACHI CONSTRUCTION MACHINERY
发明人： HATAMURA YOTARO , ONO KOZO
IPC分类号： B23Q5/28 , B23Q1/00 , B23Q1/34 , B23Q1/36 , B23Q5/22 , B25J17/02 , G03F7/20 , H01L21/68 , H02N2/00
摘要： PURPOSE:To make it possible to yield fine displacement with high accuracy in a manufacturing device or the like for a semiconductor by composing a fine positioning device of at least either of a displacement mechanism for a symmetrical parallel flexible beam and that for a symmetrical radial flexible beam. CONSTITUTION:When voltage applied to piezoelectric actuators 19a, 19b generates force f being of the same strength in Z axial direction, displacement yielded on displacement mechanisms 22a, 22b for a parallel flexible beam causes a strong press on a rigid body 15c, and the parallel flexible beams 16a, 16a, 16b, 16b are therefore bent to yield the displacement epsilon. This stretch strain is detected by a strain gauge 21, and the applied voltage controlled on the above detected value makes positioning to the target displacement possible. In addition, when the voltage is applied to the piezoelectric actuators 29a, 29b by means of displacement mechanisms 32a, 32b for radial flexible beam, rotary displacement can be similarly yielded. Thus the fine displacement and fine rotary displacement can be yielded with excellent accuracy.

62. 发明专利

JP2002223059A METHOD FOR FORMING FINE PATTERN 失效
公开(公告)号：JP2002223059A
公开(公告)日：2002-08-09
申请号：JP2001015156
申请日：2001-01-24
申请人： SHARP KK , HATAMURA YOTARO
发明人： KIYOUHO MASANORI , HATAMURA YOTARO , NAKAO MASAYUKI
IPC分类号： G03F7/20 , H01L21/288 , H01L21/3205 , H05K3/00 , H05K3/10 , H05K3/18
摘要： PROBLEM TO BE SOLVED: To precisely and stably form a fine pattern of

63. 发明专利

JP2002043337A SYSTEM AND METHOD FOR ALIGNING MICROCHIP 失效
公开(公告)号：JP2002043337A
公开(公告)日：2002-02-08
申请号：JP2000226391
申请日：2000-07-27
申请人： HATAMURA YOTARO , SHARP KK
发明人： HATAMURA YOTARO , NAKAO MASAYUKI , IMAE KAZUYOSHI
IPC分类号： G02F1/1345 , H01L21/02 , H01L21/52 , H01L27/12
摘要： PROBLEM TO BE SOLVED: To solve problems of a conventional mounting technique that a fine microchip cannot be handled and that a large number of microchips cannot be aligned precisely in a short time. SOLUTION: In an alignment system wherein a microchip is placed on a stage to change its position, a plurality of depressed portions to be filled with a thermoplastic adhesive are provided in the stage. There is also provided a heating means for heating this adhesive to change the adhesive from a solid phase to a liquid phase.

64. 发明专利

JP2001345350A SPHERICAL SEMICONDUCTOR, PACKAGING BOARD THEREOF, AND METHOD FOR MANUFACTURING THE SAME 失效
公开(公告)号：JP2001345350A
公开(公告)日：2001-12-14
申请号：JP2000165569
申请日：2000-06-02
申请人： HATAMURA YOTARO , SHARP KK
发明人： HATAMURA YOTARO , NAKAO MASAYUKI , TAGUSA YASUNOBU
IPC分类号： G02F1/136 , G02F1/1368 , H01L21/02 , H01L21/60 , H01L23/12 , H01L27/12 , H01L29/06 , H01L29/786
摘要： PROBLEM TO BE SOLVED: To solve the problems in conventional technology for mounting parts on a board using a surface tension such as limitations to increasing mounting density and reducing the thickness, size and weight, and reliability in connection after mounting which is caused by contact holes for connecting a conductive layer for connecting the parts to a bottom surface and a conductive layer on the surface of the board. SOLUTION: Trenches are formed at the portions of a board where parts are mounted and the parts are self-aligned with and mounted on the board by surface tension to reduce the thickness, size and weight of a mounted board. Further, this method eliminates the need for forming a contact hole for connecting a conductive layer for connecting the parts to the bottom surface and the conductive layer on the surface of the board, and thus improves reliability in connection after mounting.

65. 发明专利

JP2001237531A ELECTRONIC COMPONENT AND METHOD OF MANUFACTURING ELECTRONIC COMPONENT 失效
公开(公告)号：JP2001237531A
公开(公告)日：2001-08-31
申请号：JP2000043961
申请日：2000-02-22
申请人： HATAMURA YOTARO , SHARP KK
发明人： HATAMURA YOTARO , NAKAO MASAYUKI , TAGUSA YASUNOBU
IPC分类号： G02F1/1333 , G02F1/1345 , H05K1/18 , H05K3/34
摘要： PROBLEM TO BE SOLVED: To solve a problem in the conventional art wherein limit exists regard ing high density mounting, thinning, miniaturization and weight reduction of the conventional component mounting using surface tension, and reliability of connection is deteriorated after mounting since a contact hole forming process for connecting a part between a conducting layer connected with a lower surface of a component and a conducting layer on a surface of a substrate is necessary. SOLUTION: A trench is formed on a mounting part of a component of a substrate, and the component is subject to self alignment to the substrate by using surface tension and mounted on the substrate. Consequently, thinning, miniaturization and weight reduction of a mounting substrate are realized. Since formation of a contact hole for connecting the part between the conducting layer connected with the lower surface of the component and the conducting layer on the surface of the substrate is unnecessary in the mounting method, the reliability of connection after mounting is improved.

66. 发明专利

JP2001076017A METHOD FOR INPUTTING AND OUTPUTTING DESIGN ATTACHED INFORMATION AND MEDIUM WHERE DESIGN ATTACHED INFORMATION INPUT/OUTPUT PROGRAM IS RECORDED 失效
公开(公告)号：JP2001076017A
公开(公告)日：2001-03-23
申请号：JP24627299
申请日：1999-08-31
申请人： HATAMURA YOTARO
发明人： HATAMURA YOTARO , NAKAO MASAYUKI
IPC分类号： G06F17/50
摘要： PROBLEM TO BE SOLVED: To readily find out a process of thinking of a design drawing, a process of generating it, request functions reaching decisions on respective design places, restriction conditions, hesitations, advices, etc., by writing design attached information as to necessary places of a design drawing and viewing the design attached information in future. SOLUTION: A design attached information input/output method comprises a 1st step (S1) for displaying a design drawing which is generated or to be generated by computer assistance, a 2nd step (S3, S4) for specifying a part or a whole of design attached information on figures, symbols, numerals, etc., constituting the design drawing and inputting design attached information regarding them, a 3rd step (S4) for connecting and storing the design attached information and the design figure information to which the design attached information is inputted, and a 4-th step (S6, S7) for displaying the design attached information regarding design figure information by indicating the design drawing information containing the design attached information in the design drawing.

67. 发明专利

JPH11266488A ORIGINAL VOICE SUBSTITUTE GENERATOR 失效
公开(公告)号：JPH11266488A
公开(公告)日：1999-09-28
申请号：JP6820498
申请日：1998-03-18
申请人： HATAMURA YOTARO
发明人： HATAMURA YOTARO , NAKAO MASAYUKI , TAKAHASHI HIROKAZU
IPC分类号： A61F2/20 , H04R1/14
摘要： PROBLEM TO BE SOLVED: To provide a novel original voice substitute generator with a small size and light weight that generates a substituted for original voice of a person with his throat extracte by surgical operation which can be used handsfree, can freely change a vibrating frequency and attain sounding with intonation. SOLUTION: The original voice substitute generator 10 mounted in an oral cavity is provided with a vibration body 12 for generating a substitute voice, a driver 13 for driving the vibrating body, and a support 11 to support the vibrating body. The support 11 is formed as a false tooth or is provided with a fixing member 14 to fix the support to a human tooth.

68. 发明专利

JP2789166B2 失效
公开(公告)号：JP2789166B2
公开(公告)日：1998-08-20
申请号：JP12196094
申请日：1994-05-11
申请人： HATAMURA YOTARO
发明人： HATAMURA YOTARO , SHIRAI TAKEKI , WATANABE MUNENORI
IPC分类号： B23Q15/18 , B23Q5/22 , B23Q15/013 , B23Q15/14 , B23Q17/20 , B23Q17/22 , B24B7/02 , B24B41/04 , B24B49/16

69. 发明专利

JPH1078667A FINE PROCESSING METHOD 失效
公开(公告)号：JPH1078667A
公开(公告)日：1998-03-24
申请号：JP25387096
申请日：1996-09-04
申请人： EBARA CORP , HATAMURA YOTARO
发明人： ICHIKI KATSUNORI , HATAKEYAMA MASAKI , TAIMA YASUSHI , HATAMURA YOTARO , NAKAO MASAYUKI
IPC分类号： G21K1/06 , C08J7/00 , G02B3/00 , G02B5/18 , G03F7/40 , G21K5/04 , H01L21/302
摘要： PROBLEM TO BE SOLVED: To obtain smooth and arbitrarily processed surface shapes by packing a material into the recesses of a work piece to form contrast parts and irradiating the work piece with energy beams from diagonal to each the work piece, thereby forming inclined surfaces. SOLUTION: A resist having line and space pattern of a specified pitch is applied on the surface of a substrate 10 made of quartz glass to form a light shielding film 12. The film is subjected to high-speed atom beam etching to form grooves 14. Next, a resist 16 is applied thereon to pack the grooves 14 and to cover the surface of the substrate 10. Next, the resist is subjected to UV exposure via a photomask 18 and is developed to expose the surface of the quartz glass 10 of the parts exclusive of the grooves. As a result, the resists in the grooves 14 are discretely separated to form the contrast parts 20. The resists are then irradiated with the fast atom beam FAB from diagonal 45 deg. to etch the parts exclusive of the parts to be the shades of the contrast parts 30, by which the slopes 22 are formed. Finally, the resist is removed, by which saw tooth-like sectional shapes are obtd.

70. 发明专利

JPH09145897A MANUFACTURE OF VERY SMALL WIDTH SLIT 失效
公开(公告)号：JPH09145897A
公开(公告)日：1997-06-06
申请号：JP4663196
申请日：1996-02-08
申请人： EBARA CORP , HATAMURA YOTARO
发明人： ICHIKI KATSUNORI , HATAKEYAMA MASAKI , KATO TAKAO , HATAMURA YOTARO , NAKAO MASAYUKI
IPC分类号： G21K1/02 , C23F1/00 , C23F4/00
摘要： PROBLEM TO BE SOLVED: To manufacture a slit with a very small width by dividing a material having cleavage along the cleavage crystal surface, and using a pair of formed flat surfaces as a slit surface. SOLUTION: A thin plate A having cleavage is formed by GaAs monocrystal and a mica plate and the cleavage plane azimuth is made intersect perpendicularly to the plate surface. A jig B is so constructed that the displacement of a tracting part 5 by the drive of a screw mechanism 6 is turned out according to the thickness of thin walls 2, 4 to set the thin wall 2 thicker than the thin wall 4, and a movable table 3 is finely displaced from one-severalth of the tracting part 5 to one several hundredth thereof. In a frame 1, a notch 7 is formed on the back side to be bent, the thin plate A is fixed extending over fitting stages 1a, 3a of the jig B, and the jig B is bent by the notch 7 to be slit. After cleavage, the mechanism 6 is operated to move the table 3 in parallel, and a gap is expanded to a designated size to manufacture a slit. At this time, the cleavage plane has an orderly crystal structure at an atomic level, so that the surface roughness is about several nm and very flat to manufacture a high accuracy slit.

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