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    • 66. 发明专利
    • LIQUID PHASE EPITAXY
    • JPS62264631A
    • 1987-11-17
    • JP10895186
    • 1986-05-13
    • MITSUBISHI ELECTRIC CORP
    • KOMINE YOSHIHARUYASUMURA KENJISATO KENKIMURA HIROSHI
    • H01L21/208H01L21/363H01L21/368
    • PURPOSE:To minimize the dispersion of the epitaxial film composition, due to the dispersion of the melt material composition and to form a good quality film by using substantially the same crystal as the composition of desired epitaxial film as a source substrate. CONSTITUTION:An epitaxial growth uses a source substrate 13 in addition to an epitaxial substrate 3 and wells 2 and 12 for the substrate are mounted at a lower boat 1 respectively. Further, the epitaxial growth allows the substrates 3 and 13 to be used as the same material and to attain a given temperature in a flow of hydrogen, after the substrate 3 is fixed to the well 2 and the substrate 13 is fixed to the well 12. And then, after melting a melting material 7, the whole temperature is lowered up to the solid-liquid balanced temperature corresponding to the melt composition. Such a temperature level is kept constant and the melt material 7 is arranged on the substrate 13 by making an upper boat 4 slide. Subsequently, its melt material 7 is arranged on the substrate 3 and at the same time makes the whole cool. As a result, the arrangement for the epitaxial and source substrates minimizes an amount of dispersion of the epitaxial film composition which is just due to dispersion of the melt material 7.
    • 67. 发明专利
    • SLIDER BOAT FOR LIQUID PHASE EPITAXIAL GROWTH
    • JPS62160715A
    • 1987-07-16
    • JP250286
    • 1986-01-09
    • MITSUBISHI ELECTRIC CORP
    • YASUMURA KENJIKOMINE YOSHIHARUSATO KENKIMURA HIROSHI
    • H01L21/208
    • PURPOSE:To remove an impurity gas in a well for melt by enabling a lid to slide on an upper boat in order to make the state of the well for melt from an open state to a closed one. CONSTITUTION:A substrate 3 is put in a well 2, a melt material 7 is stored in a well 5 for melt, the whole boat is put in a quartz reaction tube and a hydrogen atmosphere is made at a room temperature. Then, a slide rod 10 is drawn to the right direction and a lid 6 is slided to the left direction against an upper boat 4 by a stopper 8. Then, the melt material 7 is melted to a melt 7 by moving the whole boat to a high temperature region by using a slide rod 9 and the temperature of the whole is made uniform. Later, the temperature of the whole boat is made lower at a constant speed by moving the slide rod 10 to the left direction and an epitaxial film is grown on the substrate 3. Then, the slide rod 10 is moved further to the left direction, the epitaxial film and the melt 7 are separated and the whole boat is moved in a room temperature region by the slide rod 9. This can remove an impurity gas in the well for melt and can obtain a film of good characteristics by reducing the evaporation of an easily volatile element at the time of epitaxial growth.
    • 70. 发明专利
    • Heat storage material
    • 热存储材料
    • JPS59109578A
    • 1984-06-25
    • JP22227282
    • 1982-12-15
    • Mitsubishi Electric Corp
    • KIMURA HIROSHI
    • C09K5/06F28F23/00F28F23/02
    • PURPOSE: To provide a heat storage material which has a low melting point and excellent stability to phase change and is suitable for storing solar energy etc., prepared by adding at least one ammonium salt selected from among NH
      4 Cl, NH
      4 Br and NH
      4 NO
      3 .
      CONSTITUTION: The heat storage material is prepared by adding 10wt% or lower at least one ammonium salt selected from among NH
      4 Cl, NH
      4 Br and NH
      4 NO
      3 to CaCl
      2 .6H
      2 O having a melting point of 29°C to lower its melting point to about 20°C. The resultant heat storage material can repeat smooth freezing/ fusion phase change when cooled to about 18°C and heated to about 30°C and is suitable for solar energy storage, etc. Combined use of NH
      4 Br and NH
      4 NO
      3 in a small amount imparts a higher stability against phase change than in the case when they are used singly, thus leading to reduction in cost of to heat storage material.
      COPYRIGHT: (C)1984,JPO&Japio
    • 目的:提供一种具有低熔点和优异的相变稳定性的储热材料,适用于储存通过加入至少一种选自NH4Cl,NH4Br和NH4NO3的铵盐制备的太阳能等。 构成:通过将10重量%以下的至少一种选自NH 4 Cl,NH 4 Br和NH 4 NO 3的铵盐加入到熔点为29℃的CaCl 2·6H 2 O中来制备储热材料,以降低其熔点至约20℃。 C。 所得的储热材料在冷却至约18℃时可重复平滑的冷冻/熔融相变,并加热至约30℃,适用于太阳能储存等。少量NH4Br和NH4NO3的组合使用 相对于相变的稳定性高于单独使用时的稳定性,因此降低了储热材料的成本。