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1. 发明专利

JPH07268634A CVD APPARATUS FOR LIQUID RAW MATERIAL AND CVD PROCESS USING LIUQID RAW MATERIAL AND THE LIQUID RAW MATERIAL 失效
公开(公告)号：JPH07268634A
公开(公告)日：1995-10-17
申请号：JP5735994
申请日：1994-03-28
申请人： MITSUBISHI ELECTRIC CORP
发明人： KAWAHARA TAKAAKI , MAKITA TETSUO , MATSUNO SHIGERU , TSUTAHARA KOUICHIROU , DOI NOBUAKI , YUKI AKIMASA , SANKOU MIKIO , MIKAMI NOBORU , MATSUI YASUTSUGU , SATO KAZUNAO , ONO KOICHI , NISHIOKA KYUSAKU
IPC分类号： C23C16/40 , C23C16/44 , C23C16/448 , H01L21/205
摘要： PURPOSE:To obtain a CVD apparatus for a liquid raw material which prevents the trouble by particle precipitation occurring in solidification of raw material components in the transportation process, evaporation process and film forming process of the liquid raw material, a CVD process which uses the liquid raw material and is capable of forming good-quality thin films free from deviation in compsn. on a substrate and the liquid raw material. CONSTITUTION:A piping extending from one end of valves 20 and 21 is connected to a refrigerant vessel 18 which is hermetically stored and in which a solvent (THF) is stored. The piping extending from the other end of the valve 20 is connected commonly to the piping extending from the other end of the valve 12. As a result, the cause for particles and a change (increase) in the soln. concn. by remelting of Sr(DPM)2 remaining in the pipings when the liquid raw material is freshly made to flow after the exchange of a liquid raw material container 1 are prevented and the stable supply of the raw material is executed.

2. 发明专利

JPH04351854A MANUFACTURE OF FUSED CARBONATE FUEL CELL 失效
公开(公告)号：JPH04351854A
公开(公告)日：1992-12-07
申请号：JP12372291
申请日：1991-05-28
申请人： MITSUBISHI ELECTRIC CORP
发明人： FUJITA YOJI , NISHIMURA TAKASHI , SATO KAZUNAO
IPC分类号： H01M4/88 , H01M8/02
摘要： PURPOSE:To provide a fused carbonate fuel cell which can avoid drastic contraction of an air pole even in a highly integrated fuel cell. CONSTITUTION:An air pole 3 comprising a porous body including at least one species among nickel, copper and iron, and which has an electrolyte in the hole part, and an electrolytic layer 1 including an organic material, are provided. The organic material is baked away by elevating temperature, and an electrolyte of lower melting point than the electrolyte held in the air pole is melted, and is impregnated in the trace of the abovementioned organic material. An oxide gas is injected into the air pole under a condition where the gas is not transmitted by the electrolytic layer due to the impregnation of the electrolyte, and where the electrolyte of the air pole is not completely melted, so as to oxidate the metal in the air pole.

3. 发明专利

JPH0215536A RECOVERING METHOD OF CATHODE RAY TUBE 失效
公开(公告)号：JPH0215536A
公开(公告)日：1990-01-19
申请号：JP16564088
申请日：1988-06-30
申请人： MITSUBISHI ELECTRIC CORP
发明人： KIMURA HIROSHI , SATO KAZUNAO , KOITABASHI MASAYASU , YAMAMOTO MORIO , FUKUNISHI TOSHIAKI , SHIOTANI MITSUYUKI , TAKEOKA KUNIO
IPC分类号： H01J9/50
摘要： PURPOSE:To enable to recover a reusable shadow mask without cleaning by introducing the mixed gas of the controlled content of O2, Co2 and H2O in breaking the vacuum of a cathode ray tube. CONSTITUTION:In breaking the vacuum of a defective cathode ray tube, the mixed gas of O2, CO2 and H2O is introduced. This mixed gas is controlled in its composition such as to convert the getter metal attached to a shadow mask 3 rapidly into BaCO3, that is, as BaCO3 does not have an adverse effect even if it remains on the shadow mask 3 to be reused, it converts rapidly Ba on the getter metal surface into BaO, then into BaCO3, and protects BaO created in the getter metal interior from moisture by means of the BaCO3 layer of the surface so as to prevent the conversion into Ba(OH)2. As a result, a shadow mask can be recovered efficiently without cleaning as well as the cost can be reduced.

4. 发明专利

JP2000299449A SEMICONDUCTOR ELEMENT 失效
公开(公告)号：JP2000299449A
公开(公告)日：2000-10-24
申请号：JP2000082642
申请日：2000-03-23
申请人： MITSUBISHI ELECTRIC CORP
发明人： MIKAMI NOBORU , HORIKAWA TAKESHI , MAKITA TETSUO , SATO KAZUNAO
IPC分类号： H01G4/33 , H01L21/8242 , H01L27/108
摘要： PROBLEM TO BE SOLVED: To provide a capacitor which can obtain a large capacitance with a small area and has little temperature changes by using a ferroelectric material, and a semiconductor element using the capacitor for a memory. SOLUTION: A ceramic capacitor is formed, by adjusting the average crystal grain size of a ferroelectric material to 150 nm or smaller. When a capacitor for semiconductor element used for a memory is formed, the mean crystal grain size of the dielectric material is adjusted to 150 nm or smaller, and at the same time, the thickness of the capacitor is made smaller than that of a thin dielectric layer 1. In addition, when the crystal grain size or the volume of the crystal lattice of the dielectric material is adjusted so that the Curie temperature of the material becomes lower than the working temperature range of the semiconductor element, the ferroelectric material can be used is an normal dielectric phase, and a semiconductor element for memory which does not fatigue much even when the number of writing times is increased can be obtained.

5. 发明专利

JPS6240823B2 失效
公开(公告)号：JPS6240823B2
公开(公告)日：1987-08-31
申请号：JP4961182
申请日：1982-03-25
申请人： MITSUBISHI ELECTRIC CORP
发明人： MITSUTA KENRO , SATO KAZUNAO
IPC分类号： H01M8/02

6. 发明专利

JPS6235457A ELECTRODE MATERIAL 失效
公开(公告)号：JPS6235457A
公开(公告)日：1987-02-16
申请号：JP17459685
申请日：1985-08-06
申请人： MITSUBISHI ELECTRIC CORP
发明人： KIMURA HIROSHI , SATO KAZUNAO , FUJITA YOJI
IPC分类号： H01M4/66 , H01M4/80
摘要： PURPOSE:To keep the straight pores and to freely control a size of pores by perpendicularly erecting whisker metal having specified diameter to a metal substrate. CONSTITUTION:The whisker metals 2 in diameter of 0.5-10mum are provided in parallel in the longitudinal direction and perpendicularly erected on a thin plate 1. Namely, the whisker metals 1 are scattered on the thin plate 1 by the dry method, a sintering furnace to which the vertical or horizontal magnetic field is applied externally is used as the electric furnace for sintering, and the magnetic field is continuously applied from the timing before start of sintering to the timing after the end of sintering. Thereby, angle formed by the longitudinal direction of whisker metal 2 and the thin plate 2 and interval, namely a size of pores may be controlled freely.

7. 发明专利

JPH0766071A CAPACITOR AND SEMICONDUCTOR DEVICE HAVING IT 失效
公开(公告)号：JPH0766071A
公开(公告)日：1995-03-10
申请号：JP21277993
申请日：1993-08-27
申请人： MITSUBISHI ELECTRIC CORP
发明人： MIKAMI NOBORU , HORIKAWA TAKESHI , MAKITA TETSUO , SATO KAZUNAO
IPC分类号： H01G4/12 , H01L21/8242 , H01L21/8246 , H01L27/10 , H01L27/105 , H01L27/108
摘要： PURPOSE:To obtain an element having small electrode areas, an excellent insulating property, and a small electrostatic capacity change with temperature by adjusting the diameter of the average crystal grain of the polycrystalline substances of a compound. CONSTITUTION:Like usual synthesis of ceramics, raw materials such as carbonate, oxide, etc., are mixed, press-formed, and calcined after that. The calcined ferroelectric compound is ground by a ball mill, and impalpable powder of an average grain diameter of 150nm or less is synthesized. This impalpable powder is mixed by a binder, and burned at a low temperature to obtain a ceramic. Electrodes 2a and 2b and leads 3a and 3b are fitted to this ceramic 1 by evaporation, adhesion, baking, etc., respectively, and an insulating coat layer 4 is formed to obtain a capacitor. Incidentally, it is desirable that a ferroelectric material should be a material in which parts of Ba and/or Ti of Babies are replaced with other metal ions.

8. 发明专利

JPH0697164A WIRING IN INTEGRATED CIRCUIT AND STRUCTURE THEREOF 失效
公开(公告)号：JPH0697164A
公开(公告)日：1994-04-08
申请号：JP24335092
申请日：1992-09-11
申请人： MITSUBISHI ELECTRIC CORP
发明人： TOYODA YOSHIHIKO , SATO KAZUNAO , FUKADA TETSUO , HASEGAWA MAKIKO
IPC分类号： H01L21/3205 , H01L23/52
摘要： PURPOSE:To obtain wiring in an integrated circuit having long lifetime and the structure thereof by employing Cu having lower resistivity than Al, long electromigration life, and excellent mechanical characteristics, and retarding oxidation of Cu. CONSTITUTION:At least one kind of element, having higher energy than the oxide standard production free energy of CU, is added to Cu to produce a wiring base material 1. The wiring base material 1 is covered with a coating layer 10 composed of the mixture of a Cu oxide and an oxide of element thus added. Alternatively, the coating layer may be composed of an oxide or a nitride of an element having oxide standard production free energy higher than that of Cu or a metal having oxide standard production free energy higher than that of Cu.

9. 发明专利

JPH05290858A 失效
公开(公告)号：JPH05290858A
公开(公告)日：1993-11-05
申请号：JP8191992
申请日：1992-04-03
申请人： MITSUBISHI ELECTRIC CORP
发明人： FUJITA YOJI , NISHIMURA TAKASHI , URUSHIBATA HIROAKI , SATO KAZUNAO
IPC分类号： H01M4/88 , H01M8/04
摘要： PURPOSE:To prevent contraction of an air electrode generated in starting operation of a high laminated body by applying an oxidation process at a specified temperature in forming an oxide porous body, and oxidizing part of nickel in the air electrode before fusing electrolyte. CONSTITUTION:Porous material including nickel is used for an air electrode, and in forming an oxide porous body by a process of oxidizing nickel in starting operation of a cell, it is oxidized at a temperature of 35 deg.C or more and an electrolyte fusing temperature or less. 5% or more of the nickel of the air electrode is thus oxidized prior to fusion of electrolyte. By thus oxidizing the nickel porous body partly in a condition where solid electrolyte is included, controction of the electrode is not generated, and by heating the air electrode strengthened by generation of nickel oxide to heat the electrolyte, contraction of the air electrode can be prevented. Extreme contraction of the air electrode of a highly laminated fuel cell can thus be avoided without applying a special process prior to assembling of the cell.

10. 发明专利

JPH0473869A AUTOMATIC FASTENING DEVICE 失效
公开(公告)号：JPH0473869A
公开(公告)日：1992-03-09
申请号：JP18415190
申请日：1990-07-13
申请人： MITSUBISHI ELECTRIC CORP
发明人： HOSOKAWA JUNICHI , SATO KAZUNAO
IPC分类号： F16B2/06 , H01M8/24
摘要： PURPOSE:To automatically regulate a fastening pressure according to the rise and fall of temperature by providing an energizing means for fastening a fastened member in the direction of a main body, and a control means for detecting the temperature of the main body to control the energizing means. CONSTITUTION:A hydraulic pump 40, a four-way switching valve 47, a hydraulic cylinder 50 as an energizing means for fastening and pressurizing the manifold 2 of a fastened member to a stack body 1, the temperature sensor 51 of the stack body 1, and a relay switch 53 as a control means for receiving the signal of a temperature regulator 52 and controlling the hydraulic equipment are provided. According to the temperature change of the main body, the fastening pressure of the manifold 2 is automatically regulated. When the main body 1 is a molten carbonate fuel cell, and the fastened member is its gas manifold 2, the cracking of an insulating frame such as ceramics interposed between the cell and the manifold 2 by the temperature change of the cell is prevented, and a highly reliable fuel cell can be obtained.

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